GB2418005A - Diaphragm valve for atomic layer deposition - Google Patents

Diaphragm valve for atomic layer deposition Download PDF

Info

Publication number
GB2418005A
GB2418005A GB0525685A GB0525685A GB2418005A GB 2418005 A GB2418005 A GB 2418005A GB 0525685 A GB0525685 A GB 0525685A GB 0525685 A GB0525685 A GB 0525685A GB 2418005 A GB2418005 A GB 2418005A
Authority
GB
United Kingdom
Prior art keywords
diaphragm
valve
atomic layer
layer deposition
another embodiment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0525685A
Other versions
GB0525685D0 (en
GB2418005B (en
Inventor
Jarmo Ilmari Maula
Hannu Leskinen
Teemu Lang
Pekka Kuosmanen
Kari Haerkoenen
Bradley J Aitchison
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Planar Systems Inc
Original Assignee
Planar Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/609,136 external-priority patent/US6907897B2/en
Priority claimed from US10/609,339 external-priority patent/US7021330B2/en
Priority claimed from US10/609,134 external-priority patent/US6941963B2/en
Application filed by Planar Systems Inc filed Critical Planar Systems Inc
Priority to GB0612855A priority Critical patent/GB2426808C/en
Publication of GB0525685D0 publication Critical patent/GB0525685D0/en
Publication of GB2418005A publication Critical patent/GB2418005A/en
Application granted granted Critical
Publication of GB2418005B publication Critical patent/GB2418005B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K39/00—Devices for relieving the pressure on the sealing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0686—Braking, pressure equilibration, shock absorbing
    • F16K31/0693—Pressure equilibration of the armature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Magnetically Actuated Valves (AREA)
  • Valve Housings (AREA)
  • Temperature-Responsive Valves (AREA)
  • Diaphragms And Bellows (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Diaphragm valves (200) for use in an atomic layer deposition (ALD) system are disclosed. In one embodiment, a heating body (290) forms a thermally conductive pathway between the diaphragm (220) and the valve body (210) to help maintain an operating temperature at the diaphragm and inhibit condensation or freezing of high-temperature ALD precursor gases in the valve passage (214). In another embodiment, a pressure vent (302, 306, 310) communicating with an enclosed space (296) behind the diaphragm reduces resistance to transitioning of the diaphragm between the open and closed positions. In some implementations, a pump or other source of suction (316) is coupled to the pressure vent to reduce fluid pressure in the enclosed space. In yet another embodiment, a valve seat (230) includes an annular seating surface that surrounds an inlet (216) of the valve and contacts a substantial portion of one side of the diaphragm when closed, to facilitate heat transfer and counteract dissipative cooling of the diaphragm.

Description

GB 2418005 A continuation (72) cont Teemu Lang Pekka Kuosmanen Kari
Harkanen Bradley J Aitchison (74) Agent and/or Address for Service: Forrester Ketley & Co Forrester House, 52 Bounds Green Road, LONDON, N11 2EY, United Kingdom
GB0525685A 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition Expired - Lifetime GB2418005B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0612855A GB2426808C (en) 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/609,136 US6907897B2 (en) 2003-06-26 2003-06-26 Diaphragm valve for high-temperature precursor supply in atomic layer deposition
US10/609,339 US7021330B2 (en) 2003-06-26 2003-06-26 Diaphragm valve with reliability enhancements for atomic layer deposition
US10/609,134 US6941963B2 (en) 2003-06-26 2003-06-26 High-speed diaphragm valve for atomic layer deposition
PCT/US2004/020916 WO2005003605A2 (en) 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition

Publications (3)

Publication Number Publication Date
GB0525685D0 GB0525685D0 (en) 2006-01-25
GB2418005A true GB2418005A (en) 2006-03-15
GB2418005B GB2418005B (en) 2006-11-01

Family

ID=33568641

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0525685A Expired - Lifetime GB2418005B (en) 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition
GB0612855A Expired - Lifetime GB2426808C (en) 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB0612855A Expired - Lifetime GB2426808C (en) 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition

Country Status (5)

Country Link
JP (1) JP2007528962A (en)
KR (1) KR20060084360A (en)
DE (1) DE112004001147T5 (en)
GB (2) GB2418005B (en)
WO (1) WO2005003605A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8741062B2 (en) * 2008-04-22 2014-06-03 Picosun Oy Apparatus and methods for deposition reactors
KR101262638B1 (en) * 2010-12-06 2013-05-08 기아자동차주식회사 A solenoid valve for liquid propane injection system
DE102016106410A1 (en) 2016-04-07 2017-10-12 Samson Aktiengesellschaft Electropneumatic solenoid valve, impact valve member for an electropneumatic solenoid valve
KR101919385B1 (en) * 2017-01-05 2018-11-16 주식회사 대정밸브 Supercritical flow exclusive valve
JP7117836B2 (en) * 2017-09-28 2022-08-15 タカノ株式会社 solenoid valve
DE102021129940A1 (en) * 2021-11-17 2023-05-17 Sisto Armaturen S.A. secondary sealing

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4273028A (en) * 1978-04-12 1981-06-16 Linde Aktiengesellschaft Valves and operating system for expansion machines
US4513945A (en) * 1981-09-14 1985-04-30 Nippondenso Co., Ltd. Electromagnetic reed valve
US4826132A (en) * 1987-07-21 1989-05-02 Firma A.U.K. Muller Gmbh & Co. Kg Solenoid valve, especially an outlet valve for infusion water
US5112027A (en) * 1989-06-21 1992-05-12 Benkan Corporation Metal diaphragm valve
US5383646A (en) * 1989-12-22 1995-01-24 Bermad Diaphragm control valve
US5386849A (en) * 1993-03-24 1995-02-07 South Bend Controls, Inc. Solenoid valve
US5520001A (en) * 1994-02-20 1996-05-28 Stec, Inc. Vapor controller
US6073648A (en) * 1999-04-26 2000-06-13 Watson Grinding And Manufacturing Company Metal element having a laminated coating
US6179925B1 (en) * 1999-05-14 2001-01-30 Applied Materials, Inc. Method and apparatus for improved control of process and purge material in substrate processing system
US6241213B1 (en) * 2000-03-07 2001-06-05 Itt Manufacturing Enterprises, Inc. Diaphragm valve
US6585823B1 (en) * 2000-07-07 2003-07-01 Asm International, N.V. Atomic layer deposition
US6659421B1 (en) * 1998-03-03 2003-12-09 Continental Teves Ag & Co. Ohg Electromagnetic valve

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4273028A (en) * 1978-04-12 1981-06-16 Linde Aktiengesellschaft Valves and operating system for expansion machines
US4513945A (en) * 1981-09-14 1985-04-30 Nippondenso Co., Ltd. Electromagnetic reed valve
US4826132A (en) * 1987-07-21 1989-05-02 Firma A.U.K. Muller Gmbh & Co. Kg Solenoid valve, especially an outlet valve for infusion water
US5112027A (en) * 1989-06-21 1992-05-12 Benkan Corporation Metal diaphragm valve
US5383646A (en) * 1989-12-22 1995-01-24 Bermad Diaphragm control valve
US5386849A (en) * 1993-03-24 1995-02-07 South Bend Controls, Inc. Solenoid valve
US5520001A (en) * 1994-02-20 1996-05-28 Stec, Inc. Vapor controller
US6659421B1 (en) * 1998-03-03 2003-12-09 Continental Teves Ag & Co. Ohg Electromagnetic valve
US6073648A (en) * 1999-04-26 2000-06-13 Watson Grinding And Manufacturing Company Metal element having a laminated coating
US6179925B1 (en) * 1999-05-14 2001-01-30 Applied Materials, Inc. Method and apparatus for improved control of process and purge material in substrate processing system
US6241213B1 (en) * 2000-03-07 2001-06-05 Itt Manufacturing Enterprises, Inc. Diaphragm valve
US6585823B1 (en) * 2000-07-07 2003-07-01 Asm International, N.V. Atomic layer deposition

Also Published As

Publication number Publication date
GB0612855D0 (en) 2006-08-09
WO2005003605A2 (en) 2005-01-13
WO2005003605A3 (en) 2005-07-21
GB0525685D0 (en) 2006-01-25
GB2426808C (en) 2007-04-12
GB2418005B (en) 2006-11-01
GB2426808B (en) 2007-03-28
KR20060084360A (en) 2006-07-24
GB2426808A (en) 2006-12-06
DE112004001147T5 (en) 2006-06-29
JP2007528962A (en) 2007-10-18

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20130404 AND 20130410

PE20 Patent expired after termination of 20 years

Expiry date: 20240627