GB2426808C - Diaphragm valve for atomic layer deposition - Google Patents

Diaphragm valve for atomic layer deposition

Info

Publication number
GB2426808C
GB2426808C GB0612855A GB0612855A GB2426808C GB 2426808 C GB2426808 C GB 2426808C GB 0612855 A GB0612855 A GB 0612855A GB 0612855 A GB0612855 A GB 0612855A GB 2426808 C GB2426808 C GB 2426808C
Authority
GB
United Kingdom
Prior art keywords
layer deposition
atomic layer
diaphragm valve
diaphragm
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB0612855A
Other versions
GB2426808B (en
GB0612855D0 (en
GB2426808A (en
Inventor
Jarmo Ilmari Maula
Hannu Leskinen
Teemu Lang
Pekka Kuosmanen
Kari Harkonen
Bradley J Aitchison
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Planar Systems Inc
Original Assignee
Planar Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/609,339 external-priority patent/US7021330B2/en
Priority claimed from US10/609,136 external-priority patent/US6907897B2/en
Priority claimed from US10/609,134 external-priority patent/US6941963B2/en
Application filed by Planar Systems Inc filed Critical Planar Systems Inc
Publication of GB0612855D0 publication Critical patent/GB0612855D0/en
Publication of GB2426808A publication Critical patent/GB2426808A/en
Application granted granted Critical
Publication of GB2426808B publication Critical patent/GB2426808B/en
Publication of GB2426808C publication Critical patent/GB2426808C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0686—Braking, pressure equilibration, shock absorbing
    • F16K31/0693—Pressure equilibration of the armature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K39/00—Devices for relieving the pressure on the sealing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
GB0612855A 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition Active GB2426808C (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/609,339 US7021330B2 (en) 2003-06-26 2003-06-26 Diaphragm valve with reliability enhancements for atomic layer deposition
US10/609,136 US6907897B2 (en) 2003-06-26 2003-06-26 Diaphragm valve for high-temperature precursor supply in atomic layer deposition
US10/609,134 US6941963B2 (en) 2003-06-26 2003-06-26 High-speed diaphragm valve for atomic layer deposition
GB0525685A GB2418005B (en) 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition

Publications (4)

Publication Number Publication Date
GB0612855D0 GB0612855D0 (en) 2006-08-09
GB2426808A GB2426808A (en) 2006-12-06
GB2426808B GB2426808B (en) 2007-03-28
GB2426808C true GB2426808C (en) 2007-04-12

Family

ID=33568641

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0525685A Active GB2418005B (en) 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition
GB0612855A Active GB2426808C (en) 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB0525685A Active GB2418005B (en) 2003-06-26 2004-06-28 Diaphragm valve for atomic layer deposition

Country Status (5)

Country Link
JP (1) JP2007528962A (en)
KR (1) KR20060084360A (en)
DE (1) DE112004001147T5 (en)
GB (2) GB2418005B (en)
WO (1) WO2005003605A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8741062B2 (en) * 2008-04-22 2014-06-03 Picosun Oy Apparatus and methods for deposition reactors
KR101262638B1 (en) * 2010-12-06 2013-05-08 기아자동차주식회사 A solenoid valve for liquid propane injection system
DE102016106410A1 (en) 2016-04-07 2017-10-12 Samson Aktiengesellschaft Electropneumatic solenoid valve, impact valve member for an electropneumatic solenoid valve
KR101919385B1 (en) * 2017-01-05 2018-11-16 주식회사 대정밸브 Supercritical flow exclusive valve
JP7117836B2 (en) * 2017-09-28 2022-08-15 タカノ株式会社 solenoid valve
DE102021129940A1 (en) * 2021-11-17 2023-05-17 Sisto Armaturen S.A. secondary sealing

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2815849C2 (en) * 1978-04-12 1984-08-23 Linde Ag, 6200 Wiesbaden Electromagnetically operated gas exchange valves for piston engines
JPS5840672U (en) * 1981-09-14 1983-03-17 株式会社デンソー Solenoid reed valve
DE8709978U1 (en) * 1987-07-21 1987-10-08 A. U. K. Mueller Gmbh & Co Kg, 4000 Duesseldorf, De
US5112027A (en) * 1989-06-21 1992-05-12 Benkan Corporation Metal diaphragm valve
IL92851A (en) * 1989-12-22 1996-10-31 Evron Kibbutz Bernad Diaphragm control valve
US5333643A (en) * 1993-03-24 1994-08-02 South Bend Controls, Inc. Solenoid valve
US5520001A (en) * 1994-02-20 1996-05-28 Stec, Inc. Vapor controller
WO1999044872A1 (en) * 1998-03-03 1999-09-10 Continental Teves Ag & Co. Ohg Electromagnetic valve
US6073648A (en) * 1999-04-26 2000-06-13 Watson Grinding And Manufacturing Company Metal element having a laminated coating
US6179925B1 (en) * 1999-05-14 2001-01-30 Applied Materials, Inc. Method and apparatus for improved control of process and purge material in substrate processing system
US6241213B1 (en) * 2000-03-07 2001-06-05 Itt Manufacturing Enterprises, Inc. Diaphragm valve
US6585823B1 (en) * 2000-07-07 2003-07-01 Asm International, N.V. Atomic layer deposition

Also Published As

Publication number Publication date
GB0525685D0 (en) 2006-01-25
GB2418005A (en) 2006-03-15
WO2005003605A2 (en) 2005-01-13
GB2426808B (en) 2007-03-28
WO2005003605A3 (en) 2005-07-21
JP2007528962A (en) 2007-10-18
GB0612855D0 (en) 2006-08-09
KR20060084360A (en) 2006-07-24
GB2426808A (en) 2006-12-06
DE112004001147T5 (en) 2006-06-29
GB2418005B (en) 2006-11-01

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20130404 AND 20130410