KR20060084360A - Diaphragm valve for atomic layer deposition - Google Patents

Abstract

Diaphragm valves (200) for use in an atomic layer deposition (ALD) system are disclosed. In one embodiment, a heating body (290) forms a thermally conductive pathway between the diaphragm (220) and the valve body (210) to help maintain an operating temperature at the diaphragm and inhibit condensation or freezing of high- temperature ALD precursor gases in the valve passage (214). In another embodiment, a pressure vent (302, 306, 310) communicating with an enclosed space (296) behind the diaphragm reduces resistance to transitioning of the diaphragm between the open and closed positions. In some implementations, a pump or other source of suction (316) is coupled to the pressure vent to reduce fluid pressure in the enclosed space. In yet another embodiment, a valve seat (230) includes an annular seating surface that surrounds an inlet (216) of the valve and contacts a substantial portion of one side of the diaphragm when closed, to facilitate heat transfer and counteract dissipative cooling of the diaphragm.

Description

DIAPHRAGM VALVE FOR ATOMIC LAYER DEPOSITION}

The present application relates to a diaphragm valve having characteristics useful for use in high temperature thin film deposition equipment, particularly for precursor mass transfer systems in atomic layer deposition reactors.

Atomic layer deposition (ALD), also known as atomic layer epitaxy (ALE), is a method of depositing thin films on substrates that involve sequential and alternating self-saturated surface reactions. ALD processes are described in US Pat. No. 4,058,430 to Suntola et al., Which is incorporated herein by reference. ALD is known in the art for physical vacuum deposition (PVD) (eg, as described in atomic layer epitaxy (T. Suntola and M. Simpson, eds., Blackie and Son Ltd., Glasgow, 1990)). It offers several benefits over other thin film deposition methods such as vacuum deposition or sputtering) and chemical vacuum deposition (CVD). The ALD method has been proposed for use in depositing thin films on semiconductor wafer substrates to achieve the desired step range and physical properties required for next generation integrated circuits.

Successful ALD growth requires the sequential introduction of two or more precursor vapors into the reaction space around the substrate surface. In general, ALD is performed at elevated temperatures and reduced pressures. For example, the reaction space can be heated between 150 ° C. and 600 ° C. and can be operated at pressures between 0.1 mbar and 50 mbar. Even at such high temperatures and low working pressures, the pulse of precursor vapor is not a delta function, which means that it has a substantial rise and fall time. If the second pulse starts before the first pulse is completely lowered, that is, the excess first precursor vapor is substantially purged from the reaction space, the sequential pulses of the precursor vapor will overlap. If a significant amount of different precursor vapors are present in the reaction space at the same time, non-ALD growth can occur, which can produce particle or non-uniform film thickness. To avoid this problem, the pulses of precursor vapor are separated by purge intervals in which excess excess of the first precursor vapor is purified in the reaction space. During the purge interval, the reaction chamber is purged by flushing the reaction chamber with an inert gas, applying a vacuum, pumping, suction, or some combination thereof.

In general, the ALD reaction space is bounded by a reaction chamber, which is supplied by one or more precursor mass transfer systems (also called "precursor sources"). The size of the reaction space is influenced by the dimensions of the reaction chamber required to receive the substrate. Some reaction chambers are large enough to fit multiple substrates for batch processing. However, increased volume of reaction space in a batch processing system may require increased precursor pulse duration and purge intervals.

In order to prevent overlap of precursor pulses and to form a thin film of relatively uniform thickness, the ALD process may require a purge interval 10 times longer than the duration of the precursor vapor pulse. For example, a thin film deposition process may include thousands of precursor vapor pulses of 50 ms duration, alternating with purge intervals of 500 ms duration. Long purge intervals increase processing time, which can substantially reduce the overall efficiency of the ALD reactor. The inventors have recognized that reducing the rise and fall times also reduces the overall time needed for precursor pulses and purging without causing non-ALD growth, thereby improving throughput of the ALD reactor.

The precursor mass transfer system may generally include one or more diaphragm valves located in the flow path of the system to produce and distribute one or more precursor vapors. The precursor vapor is pulsed into the reaction chamber by opening and closing the appropriate diaphragm valve in the precursor delivery system. Diaphragm valves may also be used to control the flow of inert gas and other materials into and out of the ALD reactor. Known diaphragm valves commonly have actuators for opening and closing the diaphragm flexible to the valve seat. When the diaphragm is in the open position, the precursor vapors pass through the valve passageway and enter the reaction chamber. When closed, the diaphragm closes the valve passageway and prevents precursor vapor from entering the reaction chamber. Because ALD processing can require many thousands of cycles of pioneering steam and purification to form a film on a single workpiece, the valves used in ALD systems must have very high durability and millions of cycles without failure. You should be able to do it.

Hydraulic and pneumatic actuators typically include dynamic seals that can fail under the high temperatures and many cycles required for the delivery of precursor and purge gases in ALD systems.

Solenoid actuators are generally preferred because they have a faster reaction time than pneumatic and hydraulic actuators and are capable of multiple open-closed cycles. However, solenoid actuators generate heat when current is applied, and, like hydraulic and pneumatic valves, solenoid operated valves can fail when exposed to the high temperatures required to keep some precursor material in vapor form. Heat can degrade the breaks around the solenoid windings, resulting in short circuits between the windings and failure of the solenoid coil. It can also melt the plastic bobbin in which the solenoid coil is wound. The inventors believe that active cooling of the actuator tends to also enter from the walls of the diaphragm, valve seat, and valve passageway to avoid heat-related failures, which allows the precursor material to condense or solidify in the valve passageway. It was recognized. Condensation and consolidation of the precursor material on the diaphragm and valve seat may cause the valve to leak or clog, resulting in undesirable non-ALD growth and particles in the reaction chamber.

For successful ALD processing, the precursor gas is delivered to the reaction chamber at temperatures generally above 100 ° C., often between 200 ° C. and 300 ° C., in particular various precursor materials are used to form thin films on semiconductor substrates. Through conventional diaphragm valves, a significant amount of heat is conducted from the flow path through the valve, where heat is dissipated to the surrounding environment. Heat dissipation through the valve can result in cooling of the flow path and the associated condensation problems described above. In order to avoid condensation, for example, US Provisions entitled “Precursor Mass Transfer System for Atomic Layer Deposition,” filed September 11, 2002, owned by the assignee of the present invention and incorporated herein by reference. The flow path can be heated as described in patent application number 60 / 410,067. However, heating of the flow path will tend to contribute to overheating of the actuator in conventional diaphragm valves. The inventors have found that the valve passageway, diaphragm, and valve seat can be kept hot enough to prevent precursor vapors from condensing (typically in the range of 130 ° C. to 260 ° C. or higher) without overheating the valve actuator. It has been recognized that an improved diaphragm valve is needed.

U.S. Patent No. 5,326,078 to Kimura, 6,116,267 to Suzuki et al., And 6,508,453 to Mamyo, describe known diaphragm valves for controlling hot gas flow for semiconductor manufacturing.

The inventors have recognized that there is a need for a valve that maintains a temperature sufficient to allow the diaphragm to prevent condensation of the ALD precursor, while not exceeding the temperature limit of the actuator. The inventors also recognized the need for a durable valve that transitions from an open position to a closed position faster than a conventional valve.

According to one embodiment, the diaphragm valve may include a heating body that thermally contacts the valve body of the valve and extends close to the outside of the diaphragm facing the valve passageway. The heating body forms a thermally conductive path between the diaphragm and the valve body that facilitates maintaining the operating temperature at the diaphragm. When the valve body is heated, heat is conducted to the diaphragm by the heating body. Such a configuration is useful, for example, in ALD systems to prevent hot precursor gases from condensing or cooling in the valve passages.

In a preferred embodiment, the plunger extends through the central opening in the heating body to operably couple the valve actuator to the diaphragm. In some embodiments, a heat resistant member such as, for example, such a thin section, hollow portion, or insulating material may be inserted between the valve passage and the actuator to dampen heat transfer between the valve passage and the actuator.

The inventors have recognized that conventional diaphragm valves are generally resisted when transitioning between an open position and a closed position. The gas present behind the diaphragm and in a confined space adjacent to the outside of the diaphragm facing the valve passageway is generally present at ambient pressure in a conventional diaphragm valve. When the pressure of the medium in the valve passageway is substantially lower or higher than the ambient pressure in the enclosed space, a differential pressure is exerted on the diaphragm. In some diaphragm valves, the space behind the diaphragm is tightly sealed, causing compression or expansion of the gas trapped in the hermetic space as the diaphragm moves between the open and closed positions. Resistance caused by the differential pressure and / or expansion or contraction of the trapped gas may slow the movement of the diaphragm. In ALD reactors, slow valve speeds increase the amount of time it takes to pulse the amount of precursor vapor into the reaction chamber and reduce the efficiency of the ALD reactor. The resistance can also stress the diaphragm and valve actuator.

According to another embodiment, a diaphragm valve is disclosed, which includes a pressure vent through the enclosed space to reduce resistance to the transition of the diaphragm between the open and closed positions. In some implementations, a pump or other suction source is coupled to the pressure outlet to reduce hydraulic pressure in the confined space.

According to yet another embodiment, the valve seat surrounds the inlet or outlet of the valve passageway. The flexible diaphragm is located adjacent to the valve passage facing the valve seat, in an open position through which the medium can flow through the valve passage, and with respect to the valve seat to prevent the medium from flowing through the valve passage at the first side of the diaphragm. It is operable in response to an actuation force that causes bending between the closed positions being pressed. The action force can be exerted, for example, by a solenoid or hydraulic actuator. The valve seat includes an annular seating surface, which surface extends radially from the inlet and is sized and shaped to contact a substantial portion of the first side of the diaphragm when the diaphragm is bent to the closed position, thereby providing a valve. It facilitates heat transfer between the seat and the diaphragm. Improved heat transfer between the valve and the diaphragm can neutralize wasteful cooling of the diaphragm (to the environment), preventing the medium from condensing or cooling in the valve passage.

When an elastic diaphragm is used, the annular seating surface is preferably devoid of sharp features to prevent shearing of the diaphragm when pressed against the valve seat. The annular seating surface will also be made large enough not to contact the outer peripheral edge of the seating surface when closed. When plastic diaphragms are used, the valve seat is small enough to allow a substantial portion of the diaphragm to contact the annular seating surface, while high enough to cause local permanent deformation of the first side of the diaphragm when closed. And a ring-shaped seating ridge extending from the seating surface. In some embodiments, the seating surface is polished to improve thermal conduction from the valve seat to the diaphragm when closed. A spacer ring may also be inserted between the valve seat and the valve body to establish the axial position of the seating surface relative to the valve body for more precise control of the valve seating force.

Further aspects and advantages of the present invention will become apparent from the following detailed description of the preferred embodiments, which proceeds with reference to the accompanying drawings.

1 is an isometric view of a precursor mass transfer system including several diaphragm valves.

FIG. 2 is a front view showing a cross section of one of the diaphragm valves of FIG. 1, with the diaphragm of the diaphragm valve shown in the closed position; FIG.

3 is a cross-sectional view of the diaphragm valve of FIG. 2 taken along line 3-3 of FIG.

FIG. 4 is an enlarged cross-sectional view specifically showing the region of the valve passageway, the valve seat, and the diaphragm of the diaphragm valve of FIG. 2 with the illustrated diaphragm transitioned to the open position;

FIG. 5 is an enlarged cross-sectional view specifically illustrating a seating area of a diaphragm valve including an alternative valve seat having a seating ridge suitable for use with a plastic diaphragm. FIG.

1 is an isometric view of the precursor mass transfer system 100 of the ALD reactor 102, including an exemplary embodiment of use for the valves 104a-104e in accordance with a first preferred embodiment. Referring to FIG. 1, the supply of precursor material is stored in the precursor container 106, from which flow into the reaction chamber 112 through the flow path 110 of the precursor material delivery system 100 (generally FIG. From 1 to left to right) before heating and evaporating. The ALD reactor 102 will generally have two or more precursor mass transfer systems 100 connected to the reaction chamber 112. The precursor mass transfer system 100 includes electric heaters 116 and 118 to heat the precursor in the flow path 110. Valves 104a-104e are used to control the flow of precursor material and to adjust the pressure of the precursor vapor at different stages in the precursor material delivery system 100.

The precursor mass transfer system 100 preferably includes a removable module 120 having a body 122 processed from a solid block of thermally conductive material such as aluminum, titanium, or stainless steel. Module 120 has a variety of different functions such as storage, evaporation, valving, filtering and pulsing of precursors, and purification with inert gas. All of the modules 120 preferably have a heavy configuration that promotes a gentle temperature gradient along the length of the precursor mass transfer system 100, where the temperature increases towards the reaction chamber 112. The downstream heater 118 may operate at a slightly higher temperature than the upstream heater 116 to facilitate temperature gradients. In alternative embodiments (not shown), a greater number of heating zones may be used. Positive temperature gradients are important to prevent unwanted condensation or cooling of precursor gas in flow path 110 at any point downstream from precursor container 106. The magnitude of the temperature gradient is generally not critical, as long as the temperature and pressure conditions in the flow path 110 are sufficient to prevent condensation or cooling of the precursor vapor. To maintain evaporation, heaters 116 and 118 may operate at temperatures generally in the range of approximately 50 ° C to 300 ° C.

Volume module 124 is provided downstream from precursor container 106 to prepare a single dose of gas-phase precursor material. Particle filter module 128 prevents particles from being transported from precursor container 106 to volume module 124. Valve 104d is a diaphragm valve used to control the timing and duration of pulses of precursor vapor introduced into reaction chamber 112 by precursor mass transfer system 100. The diffusion barrier module 140 includes a valve 104e for controlling the inert gas flow direction in the barrier portion 144 of the flow path 110 located between the diaphragm valve 104d and the reaction chamber 112.

2 is a cross-sectional view showing a cross section of a diaphragm valve 200 according to an exemplary, preferred embodiment of the valves 104a-104e. Referring to FIG. 2, the diaphragm valve 200 includes a valve body 210 that defines a valve passage 214, through which the medium can flow when the diaphragm valve 200 is opened. . The valve passage 214 includes an inlet 216 and an outlet 218, which can be selectively blocked by the flexible diaphragm 220, the flexible diaphragm 220 being shown in FIG. 2. Shut off the valve passage 214 when bent to the closed position as shown. The valve body 210 is preferably integrally formed of one body 122 of the module 120 of the precursor mass transfer system 100 (FIG. 1). Forming the valve passageway 214 in the module body 122 allows connection of the inlet 216 and outlet 218 to adjacent portions of the flow path 110 in the inver module 120 of the precursor mass transfer system 100. To facilitate. Alternatively, the valve body 210 may comprise a separate structure that may be coupled to the module body 122 when used in the ALD precursor mass transfer system 100. The valve body 210 is preferably formed of a solid billet material of a material having good thermal conductivity. Alternatively, however, the valve body 210 may be formed in multiple parts or by means other than processed from a solid rod, such as by molding or casting. Suitable valve body materials for use in the ALD system 102 include aluminum, titanium, and stainless steel. Other materials, such as copper, brass, other metals, and molded materials, such as hot plastics and molded metals, may also be suitable for use in the valve body 210 depending on the environment in which the diaphragm valve 200 is used. .

In a preferred embodiment, inlet 216 and outlet 218 extend generally axially with respect to diaphragm valve 200. However, in alternative embodiments (not shown), the valve passage 214 may comprise a straight-pass passage extending across the diaphragm valve 200. Another alternative may include a weir formed in the valve body between the inlet and the outlet. Many other means and structures may be used to define the valve passage 214 to handle the flow of a medium such as a fluid (liquid and / or gas) or slurry.

The inlet 216 and outlet 218 extend into a cylindrical blind bore 226 framed by a rim 228 to which the diaphragm 220 is fixed. Bore 226 is deep enough to receive valve seat 230 that is pressed when diaphragm 220 transitions to the closed position. The bore 226 is sized to allow the medium to flow through the valve passage 214 between the inlet 216 and the outlet 218 when the diaphragm 220 transitions to the open position (FIG. 4). Thus, the bore 226 forms the side and bottom boundaries of the central chamber 232 (FIG. 4) of the valve passage 214. In a preferred embodiment, the diaphragm 220 is a flexible disk-like member having a central portion that is selectively pressed against or pulled against the valve seat 230 in response to an applied action force. The diaphragm 220 includes a first side 234 located adjacent to the valve passage 214 and forming an upper boundary of the central chamber 232. The second side 236 of the diaphragm 220 facing the first side 234 is engaged by means for applying an action force, such as the actuator 240.

The diaphragm valve 200 is shown oriented with the actuator 240 extending vertically from the diaphragm 220 and the valve passage 214. However, the diaphragm valve 200 may be oriented with an actuator 240 extending to the side, bottom, or inclined surfaces of the diaphragm 220 and the valve passage 214. Moreover, the diaphragm 220, the valve passage 214, and other components of the diaphragm valve 220 may be oriented in many different ways. For example, in an alternative valve body that includes a weir, the valve passage can be oriented at any angle to promote drainage over the weir when the valve is in the open position, common to conventional diaphragm valves. have. Thus, names of top, bottom, top, bottom, side, front, back and other similar names are conveniently used to describe preferred embodiments, oriented as shown in the figures, and are intended to limit the scope of the invention. It should not be interpreted.

The diaphragm 220 is preferably formed of a flexible plastic or elastic material. In some ALD systems, the diaphragm 220 is made of a plastic material such as polytetrafluoroethylene (PTFE), which may be of the type sold by the US, Delaware, Wilmington, EI du Pont de Nemours & Company under the TEFLON® brand name It is preferable to form a thin molded disk. PTFE is the preferred diaphragm material for use in precursor mass transfer systems that deliver aluminum chloride (AlCl ₃ ) to the reaction chamber 112. While PTFE is preferred for purity, inertness, chemical resistance, heat resistance, and toughness, other plastic materials such as, for example, polyvinylidene fluoride (PVDF) may also be suitable for use in the diaphragm 220. . In ALD systems used in semiconductor manufacturing, the diaphragm 220 may be preferably formed from an elastic material, such as VITON® brand fluoroelastomer (FKM), manufactured by DuPont Dow Elastomers LLC, Delaware, Wilmington, USA. have. Other elastomeric materials suitable for diaphragm 220 include KALREZ® manufactured by DuPont Dow Elastomers LLC, CHEMRAZ® manufactured by Hatfield, Medical & Biotechnology Group, Greene, Tweede & Co., USA, Michigan, USA, Pennsylvania, USA, Ethylene propylene diene monomer (EPDM), such as SIMRIZ® sold by Freudenberg-NOK; Silicone rubber; Nitrile rubber; Chloroprene rubber (neoprene); Natural rubber; And perfluoroelastomer (FFKM). In some ways, elastomers are less desirable than plastics due to the tendency of fillers in some elastomers and the poor high temperature resistance of the elastomers to contaminate the precursor material flowing in the valve passage 214. However, elastomers such as VITON, EPDM, and others have good chemical resistance, good purity, and excellent sealing performance, making this a desirable diaphragm material for use with many ALD precursors used in semiconductor processing. Alternatively, the diaphragm 220 may be formed of a metal having the potential to degrade the elastomeric material, especially when the medium temperature exceeds 260 ° C. However, metal diaphragms are more susceptible to weakening-related failures and damage than plastic and elastomeric diaphragms. The diaphragm 220 is preferably formed of a solid disc material, but may also include non-disc structures, composite structures, and any other flexible forms, and structures that can transition between open and closed positions. have. Thus, the term "diaphragm" is broadly encompassed to encompass any member that, when open, may rim the valve passage 214 and may be moved or bent to a closed position, thereby blocking the valve passage 214. Will be interpreted.

To help prevent corrosion and / or accumulation of precursors in flow path 110, valve passage 214, diaphragm 220, and valve seat 230 may be coated with a passivation layer. The passivation layer may comprise an oxide such as Al ₂ O ₃ , ZrO ₂ , HfO ₂ , TiO ₂ , Ta ₂ O ₅ , SnO ₂ , or Nb ₂ O ₅ ; Nitrides such as AlN, ZrN, HfN, TiN, TaN, NbN, or BN; Carbides such as TiC, TaC, ZrC, or HfC; Or mixtures thereof. However, other passivation materials and coatings can be used. Passivation is particularly important when using halide-based precursors to prevent exchange reactions between halide-based precursors and metals typically used in valve body 210 and valve seat 230. Do. The particular composition of the passivation layer is chosen to be compatible with the precursor material, or other type of medium in which the diaphragm valve 200 is used. Other considerations such as, for example, thermal properties, electrical properties, durability, and malleability may also be important factors in the selection of the materials used for passivation.

Actuator 240 is operatively coupled to diaphragm 220 to exert an action force to transfer diaphragm 220 from an open position to a closed position. In alternative embodiments, actuator 240 transitions diaphragm 220 from a closed position to an open position, or in both directions. However, preferred diaphragm valves 200 for use in precursor mass transfer system 100 typically have a closed configuration. The actuator 240 preferably includes a solenoid 246 that can be energized by the application of a current to drive the plunger 250 that transmits force to the diaphragm 220. Solenoid 246 is a preferred actuator for diaphragm valve 200 due to its speed and generally low maintenance requirements. Alternatively, actuator 240 may include different means for actuating diaphragm 220, such as, for example, pneumatic or hydraulic cylinders. Other devices and methods of operating the diaphragm 220, such as for example piezoelectric devices, may also be used.

Plunger 250 of actuator 240 includes a first end 256 engaged by solenoid 246 and a second end 258 coupled to diaphragm 220. Plunger 250 may be coupled to diaphragm 220 in many ways. For example, the diaphragm 220 may include a head 262 or a ball end, which extends from the second side 236 of the diaphragm 220 and may be formed of the plunger 250. It is snapped to the side opening 266 (FIG. 3) at the two ends 258. This snap-fit connection between the head 262 and the plunger 250 causes the actuator 240 to pull the central portion of the diaphragm 220 away from the valve seat 230. In addition, the diaphragm 220 is conveniently detached for repair or replacement without completely disassembling the actuator 240, the plunger 250, and other components of the diaphragm valve 200.

Actuator 240 includes a stop 276 that is secured to solenoid 246 at distal end 278 and that solenoid 246 is restricted to limit outward movement of plunger 250. Extend to center The stop 276 is preferably formed of a magnetic material (ie, a material having a high permeability) to reduce reluctance in the magnetic circuit of the solenoid 246. More specifically, the stop 276 reduces the high reluctance air gap between the distal end 278 of the solenoid 246 and the plunger 250, thereby reducing the overall reluctance in the magnetic circuit. And enhances the magnetic force exerted on the plunger 250 by the solenoid 246 when energized. The actuating magnetic force increases further as the plunger 250 moves closer to the stop 276, ie when the low permeability gap between the plunger 250 and the stop 275 is reduced. In other embodiments, stop 276 is made of a nonmagnetic material or omitted entirely. The spring 280 is preferably inserted between the stop 276 and the plunger 250, and the first side 234 of the diaphragm 220 is connected to the valve seat 230 to block the valve passage 214. The plunger 250 and the diaphragm 220 are biased towards the closed position being pressed against. The spring 280 is preferably placed in a counterbore at the first end 256 of the plunger 250, but alternative embodiments may include the placement of the spring 280 in other locations, or the valve seat 230. May involve the use of other means for deflecting the plunger 250 relative to. For example, typically in an open embodiment (not shown), the plunger 250 is deflected away from the valve seat 230, and the plunger 250 is driven towards the valve seat 230 when the actuator 240 is actuated. do. In another embodiment, spring 280 may be omitted, in which case diaphragm 220 may be driven by actuator 240 in both open and closed directions. In another embodiment, the spring 280 is omitted and the diaphragm 220 has an inherently elastic hemispherical shape to provide an integrated return spring force. Many other means and devices may be used by those skilled in the art to accomplish the return of the diaphragm 220 to its normal position.

Preferably, the diaphragm 220 includes a heating body for forming a substantially hermetic seal along the periphery of the diaphragm 220 which is clamped against the rim 228 by the heating body 290. 290 is fixed to the valve body 210. The heating body 290 includes a proximal end 294 that helps to define a space 296 adjacent the second side 236 of the diaphragm 220. The space 296 provides clearance to the diaphragm 220 when the diaphragm 220 moves to an open position (FIG. 4) and is substantially enclosed, while the plunger 250 causes the A small amount of play is provided around the plunger 250 to allow it to move freely in response to actuation. For valves used in an ALD system, the clearances around the plunger 250, the space 296, and any other passages in fluid communication with the space 296 may include a precursor or other medium surrounding the diaphragm 220. It is desirable to be sealed to prevent leakage out of valve 200 when exiting around or when diaphragm 220 is damaged. However, particularly when the diaphragm valve 200 is used for applications other than ALD systems, it may not be necessary to seal and seal the space 296. In a preferred embodiment, the sealing space 296 is at least partially defined by the proximal end 294 of the heating body 290. However, in an alternative embodiment (not shown), the space 296 may extend, for example, close to the valve body, actuator housing, valve stem, or second side 236 of the diaphragm 220. As defined by one or more other components of the diaphragm valve 200.

In order to relieve the pressure behind the diaphragm 220, the space 296 is preferably discharged. Ejection of the sealing space 296 may provide one or more benefits. For example, the discharge can reduce or prevent resistance to movement of the diaphragm 220 that would otherwise have been caused by the compression or expansion of the trapped gas in the space 296. When the medium flowing in the valve passage 214 has a lower operating pressure as in the case of the ALD precursor supply, suction may be applied along with the exhaust to reduce the pressure differential acting on the diaphragm 220. Suction may also be applied to create a vacuum at the same pressure as the medium in the valve passage 214, thus equalizing the pressure on each of the first and second sides 234 and 236 of the diaphragm 220. In some embodiments, the discharge is achieved to achieve pressure in a space 296 that is slightly smaller than the medium in the valve passage 214, thereby allowing the actuator 240 to open the diaphragm 220. This can be applied. Thus, in a preferred embodiment, the discharge can advantageously reduce the force required to actuate the diaphragm 220 and move the diaphragm to the open position, and also the spring required to return the diaphragm 220 to the closed position. Can reduce the force. Similar reductions in force are alternatively possible in the normal open configuration, in which case the direction of operation and the direction of the spring force are reversed. By reducing the force required for the transition of the diaphragm 220 between the open and closed positions, the discharge can also extend the life of the diaphragm 220 and prevent solenoid consumption. Extending the lifetime of valves 104a through 104e in ADL precursor mass transfer system 100 can greatly reduce downtime and improve yield in ADL reactor 102. Applying suction to space 296 has the additional advantage of improving stability in that any gas leaking around or through diaphragm 220 is pumped out. This feature is particularly advantageous when using toxic precursors that would otherwise have leaked into the human workspace. Applying a vacuum to the space 296 also reduces the density of the gas in the valve space 296, which limits the convection path from the diaphragm 220 to the actuator 240.

Discharge is preferably achieved by the discharge passage, an embodiment of which is described below with reference to FIGS. 2 and 3. 3 is a cross-sectional view of the diaphragm valve 200 taken along line 3-3 of FIG. 2 and 3, the discharge passage includes: a first discharge passage portion 302 extending through the heating body 290 and traveling to and from the space 296; A second discharge passage portion 306 passing through the valve body 210; An annular connecting passage 310 extending around the middle portion of the heating body 290 to link the first and second discharge passage portions 302 and 306 together. In another embodiment (not shown), the discharge passage follows a different path through one or more other portions of the diaphragm valve 200. The formation of at least a portion of the outlet passage in the valve body 210, in particular the body 122 of the module 120, provides a convenient means for connecting the pump 316 or other suction source to the second outlet passage 306. do. More specifically, connecting the pump 316 to the discharge passage may include connecting the pump 316 to one or more diaphragm valves 104a to 104e and possibly other modules of the precursor mass transfer system 100 that require suction. Connection to a manifold (not shown) providing 120. Pump 316 is operable to introduce a vacuum in space 296 relative to the external pressure (typically atmospheric pressure) of valve body 210.

Elastic seals 328 and 382 are provided to prevent leakage around heating body 290 and to allow vacuum to be achieved in space 296 behind diaphragm 220. As used herein, the term "vacuum" is used vaguely to describe a hydraulic pressure or otherwise normal pressure lowered from the atmosphere. The suction generated by the pump 316 reduces the pressure in the space 296 to a pressure equal to or close to the hydraulic pressure of the medium flowing in the valve passage 214, thereby causing a differential force on the diaphragm 220. It is preferable to make the same or almost the same. In an alternative embodiment for use with a high pressure medium, the pressure in space 296 is increased by the application of positive hydraulic pressure instead of suction. However, varying the hydraulic pressure in the space 296 is optional, so the pump 316 may be omitted in some embodiments. In the preferred ALD precursor mass transfer system 100, the pump 316 or other means for generating suction is operable to reduce the pressure in the space 296 to between approximately 0.1 mbar and approximately 20 mbar, the pressure being flow Comparable to the operating pressure of the precursor vapor in path 110 and valve passage 214.

Diaphragm valve 200 includes features that improve elasticity when valve 200 is used to control the flow of hot medium, such as, for example, ALD precursor vapor used to deposit thin films on semiconductor wafer substrates. It is desirable to. The improved thermal design of the diaphragm valve 200 may provide advantages over conventional diaphragm valves, where solenoid actuators (or other types of actuators) are vulnerable to heat-related failures. For example, one conventional solenoid-operated diaphragm valve is evaluated for operating temperatures up to 140 ° C. When the operating temperature exceeds 140 ° C., the solenoid may overheat, melt the plastic bobbin supporting the solenoid coil and / or melt the insulation around the coil windings, thus blocking the plunger and shorting the coil. , And other modes of failure. In non-solenoid valves, high operating temperatures can cause failures due to permanent deformation of structural components, melting or deformation of the elastic seal material in the actuator, and other reasons.

The heat conducted to the actuator 240 may cool the diaphragm 220 or the valve body 210 sufficiently to allow the medium to condense or cool in the valve passage 214 or on the surface abutting the valve passage 214. have. Condensation of the medium is particularly problematic in the ALD precursor mass transfer system 100, in which particles or condensation may cause blockage in the delivery system 100 or may propagate to the reaction chamber 112, thereby causing This is because gold is formed. Condensation on the surface of diaphragm 22 and / or valve seat 230 may also cause leakage of precursor material past valve 200 when closed, which may result in non-ALD in reaction chamber 112. May cause growth.

The operating temperature depends on the vapor pressure of the particular precursor medium, but will generally be in the range of 130 ° C to 220 ° C. To prevent condensation or cooling of the precursor gas as the precursor gas travels along the flow path 110, the precursor material is gradually heated to a positive temperature gradient towards the reaction chamber 112. In a preferred embodiment, heat is provided by the heaters 116 and 118 in two zones along the precursor mass transfer system 100, although different numbers of zones and heaters may be used in alternative embodiments (not shown). . Heat may be provided by means other than an electric heater, but generally results in conducting heat to the valve body 210. In order to evenly and smoothly distribute heat along the flow path 110, the body 122 of the valve body 210 and other modules 120 is preferably formed of a thermally conductive material such as aluminum, titanium, or stainless steel. .

The heating body 290 is in thermal contact with the valve body 210 and extends close to the second side 236 of the diaphragm 220, thereby providing heat between the valve body 210 and the diaphragm 220. Form a conductive path. The thermally conductive path facilitates maintaining an operating temperature at the diaphragm 220 sufficient to prevent condensation in the valve passage 214. The heating body 290 is inserted between the diaphragm 220 and the actuator 240 and includes a central opening 322 that aligns with the diaphragm 220 and the actuator 240, through which the plunger 250 The actuator 240 extends to couple to the diaphragm 220. The second end 258 of the plunger 250 is preferably formed of a thermally conductive material and sized to fit closely but slip within the central opening 322, so that the diamond through the plunger 250 from the heating body 290 can be adjusted. Heat is easily transferred to the pram 220. The core 326 of the heating body 290 extends to a counterbore in the valve body 210 over the rim 228 and is shaped to define an annular connecting passage 310 (FIG. 3). A seal 328, such as an O-ring, is positioned around the core 326 to form a sealing seal between the heating body 290 and the valve body 210 at an axially distal position relative to the annular connecting passage 310. do. The flange 332 of the heating body 290 extends radially outward from the core 326 adjacent the outer surface 334 of the valve body 210. The flange 332 contacts the outer surface 334 along a relatively large area, thereby improving thermal conduction from the valve body 210 to the heating body 290. The flange 332 also provides a structure suitable for securing the heating body 290 to the valve body 210, for example via one or more screws or other fasteners 392 (FIGS. 2 and 3). The flange 332 also compresses the seal 328 relative to the valve body 210 when secured by the fastener 392. The heating body 290 is preferably made of a material having high thermal conductivity such as, for example, aluminum, stainless steel, titanium, copper, or other metals.

When the diaphragm 220 is in the closed position in contact with the valve seat 230, heat is conducted to the diaphragm 220 through the valve seat 230. Conduction from the valve seat 230 helps to dissipate lost heat in the diaphragm 220 by dissipating it to the surrounding environment through the plunger 250 and the actuator 240. Accordingly, the valve seat 230 is formed of a metal having a relatively high thermal conductivity such as, for example, aluminum, titanium, or other metals. When used with a diaphragm made of elastomeric material, the valve seat 230 preferably includes a substantially flat annular seating surface 342 extending radially from the inlet 216. The seating surface 342 provides an increased area of contact between the diaphragm 220 and the valve seat 230 when the diaphragm 220 is closed. The increased contact area reduces the contact resistance (thermal) between the valve seat 230 and the diaphragm 220. Preferably, the valve seat 230 from the valve seat 230 to the diaphragm 220 along a thermally effective contact area facing where the plunger 250 is in contact with the second side 236 of the diaphragm. It contacts a substantial portion of the first side 234 of the diaphragm 220 to promote heat transfer. In a preferred embodiment, the contact area between the seating surface 250 and the diaphragm 220 is comparable to the contact area between the plunger 250 and the diaphragm 220. When the diaphragm 220 is closed, the valve seat 230 may contact between approximately 5% and 100% of the portion of the first side 234 of the diaphragm 220 exposed to the central chamber 232. have. More preferably, the valve seat 230 may contact between approximately 12% and 50% of the exposed area of the first side 234 of the diaphragm 220 when the diaphragm 220 is closed. .

The seating surface 342 may also be polished or otherwise smoothed to further reduce contact resistance and media leakage between the valve seat 230 and the diaphragm 220 when the diaphragm 220 is in the closed position. have. The passivation layer across the first side 234 of the diaphragm 22 may further enhance the conduction of heat from the valve seat 230 to the diaphragm 220. For example, the passivation layer on the first side 234 may comprise an aluminum oxide (Al ₂ O ₃ ) or other metal coating layer having a thickness between about 10 nm and about 100 nm.

5 is a cross-sectional view of an alternative embodiment of a diaphragm valve 500 that includes a plastic diaphragm 520. Referring to FIG. 5, the plastic diaphragm 520 is preferably formed of PTFE, or another elastic, high purity, chemically inert material such as, for example, PDVF. Since the plastic diaphragm 520 is not as easily sealed as the elastomeric diaphragm, the diaphragm valve 500 has a ring-shaped seating ridge 522 extending upward from the seating surface 542 to the diaphragm 520. And a deformed valve seat 530. The seating ridge 522 is sufficiently protruding and sized to permanently deform the first side 534 of the diaphragm 520 when the diaphragm 520 is pressed against the valve seat 530. The seating ridge 522 is preferably located immediately adjacent the inlet 516 to surround the inlet 516 and reduce the amount of spring force required to cause permanent deformation of the diaphragm 520. However, in other embodiments (not shown), the seating ridge 522 may be located outside the inlet 516 or in another location. The seating ridge 522 may be flat-topped as shown in FIG. 5 or may have other shapes, such as a knife edge. However, the seating ridge 522 may be configured such that the first side 534 of the diaphragm 520 has a peripheral seating surface 542 after the seating ridge 522 forms a ring-shaped heat channel 544 at the first side 534. It differs from the knife-edge valve seat of the prior art in that the seating ridge 522 is short enough to be pressed against. In comparison, the diaphragm valve of the prior art prevents contact of the area between the flat surface and the diaphragm around a sharp seating edge, as particles in some circumstances may lie on a flat surface and interfere with the closure of the diaphragm. Use a sharp valve seat long enough to prevent leakage. In the context of an ALD precursor mass transfer system, sealing interference is best avoided by improved heat transfer between valve seat 530 and diaphragm 520 to prevent particle formation due to cooling of the diaphragm.

The seating ridge 522 provides the desired permanent deformation of the heat channel 544, while the seating surface 542 and diaphragm 520 of the valve seat 530 are formed after the heat channel 544 is formed. It is preferred that the height be between approximately 0.5 mm and 1.5 mm above the seating surface 542 to allow for contact of the area between the one side 534. Initial formation of heat channel 544 at first side 534 of diaphragm 520 may require a break-in period in which valve 500 is circulated prior to use. In order to provide an increased contact area between the diaphragm 520 and the valve seat 530 to promote heat transfer, the annular seating surface 542 is similarly similar to the seating surface of the embodiment of FIGS. 342). For example, the contact area between the seating surface 542 and the diaphragm 520 is comparable to the contact area between the second end 558 of the plunger 550 and the second side 536 of the diaphragm 520. can do. When the diaphragm 520 is closed, the valve seat 530 may contact between approximately 5% and 100% of the portion of the first side 534 of the diaphragm 520 exposed to the central chamber 532. And more preferably, between about 12% and 50% of the exposed area.

The valve seat 530 may have a polished surface finish and / or passivation similar to the surface treatments described above in conjunction with the valve seat 230 (FIGS. 2-4) of the type used with the elastomer diaphragm 220. It may include. Since the plastic material used for the diaphragm 520 of FIG. 5 is harder than the elastomeric material of the diaphragm 220 of FIGS. 2-4, the flexibility may reduce the thickness of the diaphragm 520, or Preferably at the diaphragm 520 by forming an annular thin region 552 between the head 562 of the diaphragm 520 and where the diaphragm is mounted relative to the rim 528 of the valve body 510. Can be improved. The diaphragm 520 and valve seat 530 are preferably rotatably fixed to prevent relative rotation that may cause leakage due to misalignment between the seating ridge 522 and the heat channel 544. Preventing relative rotation between the diaphragm 520 and the valve seat 530 is such that the first side of the mating micro-roughness against the corresponding micro-roughness of the seating surface 542. It facilitates the formation on the 534, thereby promoting the sealing seal.

Referring again to FIG. 2, the heat resistant member may be a valve passage to limit or inhibit heat transfer from the valve passage 214 (ie, from the heating body 210 and / or diaphragm 220) to the actuator 240. It is preferably inserted between 214 and actuator 240. The heat resistant member may be provided between the valve passage 214 and the actuator 240, or between the valve body 210 and the actuator 240, or between the heating body 290 and the actuator 240, or the actuator 240 and the diaphragm. It may include one or more structures for damping heat transfer between one or more other portions of the valve 200.

One type of heat resistant member includes a portion of the reduced cross sectional area between the valve passage 214 and / or the valve body 210 and the actuator 240. For example, the plunger 250 may include a hollow region 348 between the first and second ends 256 and 258, respectively. The hollow region 348 and the thin cylindrical wall around the plunger 250 attenuate heat transfer between the diaphragm 220 and the actuator 240. As noted above, damping of heat transfer prevents heat-related failure of solenoid 246 and cooling of diaphragm 220, which may otherwise result from condensation of the medium in valve passage 214.

To further prevent heat transfer through the plunger 250, the plunger 250 may have a composite configuration, where the first end 256 is formed of a magnetic material and the second end 258 is formed of a thermally conductive material { To conduct heat from the heating body 290 to the diaphragm 220, an insulating central portion 352 is between each of the first and second ends 256 and 258. The central portion 352 may be formed of a material having substantially lower thermal conductivity than the second end 258, or may have a structure that results in lower thermal conductivity than the second end 258.

Another kind of heat resistant member includes a heating stem 290 and a valve stem 360 supporting the actuator 240 above and away from the valve body 210. Valve stem 360 may include a portion of reduced cross-sectional area 364 to dampen heat transfer between heating body 290 and actuator 240. To increase the contact resistance, the valve stem 360 preferably contacts the heating body 290 and / or the valve body 210 along only a very small area. For example, the valve stem 360 can be supported on a small step 368 of the central boss 372 of the heating body 290. An insulating pedestal 376 formed of a heat resistant material such as plastic or ceramic extends around the perimeter of the flange 332 of the heating body 290 to separate the valve stem 360 from the heating body 290. Can be located around it. Insulation pedestal 376 may include a ring of insulating material or, alternatively, may include a set of posts extending from flange 332 around the perimeter.

An elastomer or plastic seal 382 is located around the boss 372 and between the heating body 290 and the valve stem 360. Seal 382 prevents gas leakage between heating body 290 and valve stem 360. Annular dead air space 386 may be formed between valve stem 360 and heating body 290, and between seal 382 and insulation pedestal 376. Dead air space 386 further disconnects valve stem 360 from heating body 290. Actuator 240 may be secured by adhesive or other means by press fitting of solenoid 246 on valve stem 360. Valve stem 360 and heating body 290 are valve body 210 by one or more screws 392 extending through a flange 332 of heating body 290 and a hole in the radial portion of valve stem 360. ) Is attached. Screw 392 is threaded within valve body 210 and is thermally disconnected from valve stem 360 by an insulating washer 396 located under the head of screw 392. Insulating washer 396 may be made of a plastic material such as, for example, PTFE.

A thermally insulating slide bushing 402 is inserted between the plunger 250 and the actuator 240. The slide bushing 402 is formed of a thermally insulating plastic material, such as PTFE, which also has a low coefficient of sliding friction against the inner surface of the valve stem 360 on which the first end 256 of the plunger 250 is supported. It is preferable. The slide bushing 402 can advantageously prevent heat transfer between the plunger 250 and the actuator 240, reduce the frictional resistance to movement of the plunger 250, and reduce the frictional resistance of the plunger 250 in the actuator 240. It can reduce wear and particle generation that can collide with movement.

The blocking member 410 is inserted between the plunger 250 and the stop 276. The blocking member 410 is preferably made of a durable plastic material that mitigates the impact of the plunger 250 against the stop 276 when powered to the solenoid 246. Mitigation of the impact may prevent cracking of the stop 276 and / or plunger 250, thereby preventing the formation of particles that may collide with the movement of the plunger 250 in the actuator 240. Suitable plastic material for the blocking member 410 is PTFE. The blocking member 410 also has thermal insulation properties to attenuate heat transfer between the plunger 250 and the stop 276 when the plunger 250 is in the fully open position in contact with the blocking member 410. Can be.

When formed from a non-magnetic material such as PTFE or other plastic, the blocking member 410 may cause the current to flow from the solenoid 246 before the spring 280 begins moving the plunger 250 away from the stop 276. Introduce a magnetic discontinuity between the stop 276 and the plunger 250 which may reduce the "release time" after removal. Indeed, the magnetic discontinuity introduced by the blocking member 410 may provide a nonmagnetic separation between the magnetically conductive stop 276 and the magnetically conductive first end 256 of the plunger 250. Reduce the magnetic field at the extreme end of the first end 256 of the. By further description, the magnetic attraction on plunger 250 generated by solenoid 246 is not immediately removed when the current to solenoid 246 is interrupted. Rather, a certain amount of time must elapse before the magnetic force drops below a threshold at which the spring 280 can begin moving the plunger 250 away from the stop 276. The blocking member 410 reduces the release time by reducing the holding force between the solenoid 246 and the plunger 250. Reducing the release time results in a faster switching from on state to off state, which can shorten the total opening time of the diaphragm valve 200.

Prior art diaphragm valves similar to those described, for example, in U.S. Pat.No. 5,326,078 to Kimura and 6,116,267 to Suzuki et al. A valve seat having a seating surface. As noted above, the diaphragm 220 may be composed of an elastomeric material such as, for example, VITON® or EPDM. When exposed to certain heated precursors and chemicals such as, for example, ZrCl ₂ , the elastomeric materials may be damaged, making them vulnerable to uniform and shear deformations for sharp valve seats. In a preferred embodiment, the seating surface 342 of the valve seat 230 is characterized by no sharp features, which helps to prevent cracking and resulting shear deformation or cracking of the diaphragm 220. Can give The seating surface 342 is preferably larger than 5 mm ² , more preferably larger than 25 mm ² . It is desirable to have a size of the valve seat 230 large enough to prevent shear deformation of the diaphragm 220, but nevertheless, the shape and size of the valve seat 230 is the biasing force from the spring 280. It may be selected to cause some surface deformation of the first side 234 of the diaphragm 220. Surface deformation causes the first side 234 to better conform to the seating surface 342, thereby causing the media to otherwise result from micro-roughness of the first side 234 and / or the seating surface 342. Reduce leakage. Surface deformation may include elastic deformation or plastic deformation, or both. Smooth or polished surface finish of the seating surface 342 may further enhance the ability of the diaphragm 220 to provide a leak-tight seal when pressed against the seating surface 342. .

As described above with reference to FIG. 5, when the diaphragm is made of a plastic material such as PTFE or PVDF, a primarily flat seating surface may be less desirable. Compared to the diaphragm formed of elastomeric material, the plastic diaphragm 520 (FIG. 5) has a greater hardness, making the sealing to the valve seat more difficult. Referring to FIG. 5, the valve seat 530 for use with the plastic diaphragm 520 preferably includes a seating ridge 522 extending from the seating surface 542 around the inlet 516. The seating ridge 522 causes plastic deformation of the first side 534 of the diaphragm 520 when pressed against the valve seat 530 during the intrusion period. Diaphragm 520 may be pre-circulated to help shut off before beginning use of diaphragm valve 500. Plastic deformation occurring during the pre-circulation or intrusion period attaches the ring-shaped heat channel 544 to the diaphragm 520 that is tightly mated against the seating ridge 522 to prevent leakage. Similar sharp edge valve seats may also be desirable to increase the local sealing pressure when the diaphragm 520 is made of metal, but it may be unnecessary or undesirable to deform the metal diaphragm to plastic.

To ensure a tight seal, the valve seats 230, 530 and diaphragms 220, 520 are fixed to the respective valve bodies 210, 510 and plungers 250, 550, thereby preventing relative rotation. Preventing relative rotation between the valve seat and the diaphragm is such that the same position on the diaphragm 220, 520 contacts the valve seat 230, 530 at the same place each time the diaphragm valve 200, 500 is closed. To ensure.

4 is an enlarged cross-sectional view specifically showing the valve passage 214, the valve seat 230, and the diaphragm 220 with the illustrated diaphragm 220 transitioned to the open position. Referring to FIG. 4, the annular seating surface 342 of the valve seat 230 is such that when bent to a slightly convex closed position, the first side 234 of the diaphragm 220 is outside of the seating surface 342. Large enough not to contact the side peripheral edge 418. The seating surface 342 may also be bent along the outer peripheral edge 418 as shown in FIG. 4, or may be slightly crowned (not shown), such that the diaphragm 220 is cracked or Further prevents shear deformation. The valve seat 230 is generally in the form of a pedestal and includes a threaded neck 422 extending from the opposite seating surface 342. The valve seat 230 is spiraled in the valve body 210 to achieve good thermal contact. Preferably, the valve seat 230 is spiraled into the inlet portion of the valve passage 214. However, in alternative embodiments (not shown), the inlet 216 and outlet 218 are reversed such that the valve seat 230 is spiraled in the outlet passageway formed in the valve body 210. The valve seat 230 is a diaphragm 220 and a valve passage 214 (described above) to prevent collision of the valve seat 230 or accumulation of precursor material on the seating surface 342 or inside the inlet 216. In a similar manner). The seat o-ring 430 is provided with the upper bore portion of the valve seat 230 and the blind bore 226 of the valve body 210 to provide a leak proof seal between the valve seat 230 and the valve body 210. It is inserted between the bottom surface. The spacer ring 440 or shim is a valve seat and a floor of the blind bore 226 of the valve body 210 to establish an axial position of the valve seat 330 relative to the valve body 210. It is inserted between the upper pedestal portion of (230). Spacer ring 440 prevents overcompression of O-ring 430 and establishes an axial position of seating surface 342 relative to valve body 210 and diaphragm 220. Precise axial positioning of the seating surface 342 allows improved control of the seating pressure of the diaphragm 220 relative to the seating surface 342, thereby allowing the first side 234 of the diaphragm 220 to be positioned. Improves leak-proofing without applying excessive force that can cause cracks on the shell.

It will be apparent to those skilled in the art that many modifications may be made to the details of the foregoing embodiments of the invention without departing from the basic principles of the invention. Therefore, the scope of the present invention should be determined only by the following claims.

As mentioned above, the present invention finds use in diaphragm valves and the like, which are useful for use in high temperature thin film deposition equipment, in particular having useful features in leading material delivery systems of atomic layer deposition reactors.

Claims (120)

As a diaphragm valve, A valve body defining a valve passage having an inlet and an outlet; A diaphragm having first and second sides, the diaphragm positioned such that the first side is proximate the valve passageway; An actuator operably coupled to a first side of the diaphragm to apply actuation force to the diaphragm, the diaphragm having a closed position for blocking the valve passage, An actuator operable in response to an applied actuation force for transition between the at least partially open open position; A heating body, in thermal contact with the valve body and extending close to the second side of the diaphragm, thereby forming a thermally conductive path from the valve body towards the diaphragm, the thermally conductive path A heating body, which facilitates maintaining an operating temperature at the diaphragm. Including, diaphragm valve. A heater thermally connected to the valve body, A combination of a heater and the diaphragm valve of claim 1, adapted to generate heat conducted through the valve body and the heating body, thereby preventing the medium in the valve passage from condensing or cooling in the valve passage. The diaphragm valve of claim 1, wherein the heating body comprises a material selected from the group consisting of aluminum, stainless steel, titanium, and copper. The apparatus of claim 1, wherein the heating body further comprises a plunger inserted between the diaphragm and the actuator, the central body being aligned with the diaphragm and the actuator and extending through the central opening. A diaphragm valve operatively coupling an actuator to the diaphragm. 5. The diaphragm valve of claim 4, wherein the plunger comprises a portion of a reduced cross-sectional area located between the diaphragm and the actuator, thereby reducing thermal conduction through the plunger to the actuator. 6. The diaphragm valve of claim 5, wherein the portion of the reduced cross-sectional area comprises a hollow area of the plunger. 5. The apparatus of claim 4, wherein the plunger comprises a first end engaged by the actuator mechanism, a second end operatively coupled to the diaphragm and formed of a first material, between the first and second ends. And a central portion, wherein the central portion is formed of a second material having a substantially lower thermal conductivity than the first material. The diaphragm valve of claim 1, wherein the actuator comprises a solenoid. The diaphragm valve of claim 1, further comprising a heat resistant member inserted between the valve passage and the actuator to attenuate heat transfer between the valve passage and the actuator. 10. The plunger of claim 9, wherein the heat resistant member includes a first end engaged by the actuator, a second end operably coupled to the diaphragm, and a hollow region between the second end and the actuator. Including, diaphragm valve. 10. The method of claim 9, wherein the heat resistant member has a first end engaged by the actuator mechanism, a second end operatively coupled to the diaphragm and formed of a first material, and a central portion between the first and second ends. And the central portion is formed of a second material having a substantially lower thermal conductivity than the first material. 10. The diaphragm valve of claim 9, further comprising a valve stem supporting the actuator, wherein the heat resistant member includes an insulating pedestal separating the valve stem from the heating body. 13. The diaphragm valve of claim 12, further comprising an elastomer or plastic seal inserted between the valve stem and the heating body. 13. The diaphragm valve of claim 12, further comprising a fastener coupling said valve stem to said heating body, and an insulator located between said fastener and said valve stem. The solenoid coil of claim 1, wherein the actuator comprises a plunger having a solenoid coil, a first end extending within the solenoid coil, and a second end operatively coupled to the diaphragm, the plunger being the solenoid coil. A diaphragm valve driven in response to the power supply box to transfer the diaphragm between the open and closed positions. 16. The diaphragm valve of claim 15, further comprising a spring operatively engaged with the plunger to bias the diaphragm toward one of the open and closed positions. The method of claim 16, The spring biases the diaphragm toward the closed position; The plunger is driven against the spring and moves the diaphragm to the open position in response to powering the solenoid coil. The diaphragm valve of claim 15, further comprising an adiabatic slide bushing inserted between the plunger and the actuator. The diaphragm valve of claim 1, wherein the actuator includes a removable plunger, a stop positioned to limit movement of the plunger, and an insulated blocking member inserted between the plunger and the stop. 2. The valve of claim 1 further comprising a valve seat positioned in the valve passage opposite the diaphragm, wherein the valve seat has a seating surface in contact with the diaphragm, with a substantial portion of the first side of the diaphragm. In response to the applied actuation force, the valve passage is blocked, and the seating surface is free of sharp terrain, thus preventing shear deformation of the diaphragm when the first side of the diaphragm is pressed against the valve seat. Resistant, diaphragm valve. 2. The valve of claim 1 further comprising a valve seat positioned in the valve passage opposite the diaphragm, the valve seat having a seating surface in contact with the diaphragm, wherein the first side of the diaphragm is applied to the diaphragm. Pressed in response to an actuation force, blocking the valve passage, the seating surface extending radially from the inlet to contact a substantial portion of the diaphragm when the first side of the diaphragm is pressed against the valve seat Thereby improving heat transfer from the valve seat to the diaphragm. The diaphragm valve of claim 1, wherein the diaphragm consists of a plastic material. The diaphragm valve of claim 1, wherein the diaphragm consists of an elastomeric material. The diaphragm valve of claim 1, wherein the first side of the diaphragm comprises a protective coating selected from the group consisting of oxides, nitrides, carbides, and mixtures thereof. The method of claim 1, An enclosed space adjacent the second side of the diaphragm; A discharge passage to and from the sealed space; A pump operably coupled to the discharge passage It further includes a diaphragm valve. A precursor mass transfer system comprising a diaphragm valve according to claim 1. A precursor delivery system comprising a diaphragm valve and a heater according to claim 2. A precursor mass transfer system comprising a diaphragm valve according to claim 9. ALD reactor comprising a diaphragm valve according to claim 25. ALD reactor comprising a precursor mass transfer system according to claim 26. An ALD reactor comprising the precursor mass transfer system according to claim 27. An ALD reactor comprising a precursor mass transfer system according to claim 28. As a diaphragm valve, Body means defining a valve passage having an inlet and an outlet; A diaphragm having first and second sides, the diaphragm positioned such that the first side is proximate the valve passageway; Means for actuating the diaphragm to transition the diaphragm between a closed position and an open position blocking the valve passage, the valve passage being at least partially open; Means for conducting heat from the body means toward the diaphragm to facilitate maintaining an operating temperature at the diaphragm; Including, diaphragm valve. 34. A combination of a diaphragm valve according to claim 33, with heating means for heating the body means such that the medium in the valve passage does not condense or cool in the valve passage. 34. The diaphragm valve of claim 33, wherein the actuating means comprises a solenoid. 34. The diaphragm valve of claim 33, further comprising means for damping heat transfer between said valve passageway and said actuating means. 37. The diaphragm valve of claim 36, wherein said means for damping heat transfer comprises an insulating pedestal inserted between said body means and said actuating means. 37. The diaphragm valve of claim 36, wherein the means for damping heat transfer comprises a plunger having a portion of reduced thermal conductivity. 34. The diaphragm valve of claim 33, wherein the actuating means comprises a solenoid. 34. The diaphragm valve of claim 33, further comprising means for defining a confined space adjacent the second side of the diaphragm. Combination of means for introducing a vacuum in a confined space and a diaphragm valve according to claim 40. 34. The diaphragm valve of claim 33, further comprising means for reducing hydraulic pressure on the second side of the diaphragm. A precursor delivery system comprising a diaphragm valve according to claim 33. A precursor material delivery system comprising a diaphragm valve according to claim 34. A precursor material delivery system comprising a diaphragm valve according to claim 36. ALD reactor comprising a diaphragm valve according to claim 33. ALD reactor comprising a diaphragm valve according to claim 34. ALD reactor comprising a diaphragm valve according to claim 36. 42. An ALD reactor comprising a diaphragm valve and means for introducing a vacuum according to claim 41. 43. An ALD reactor comprising a diaphragm valve and means for reducing hydraulic pressure in accordance with claim 42. As a diaphragm valve, Body means defining a valve passage having an inlet and an outlet; A diaphragm having first and second sides, the diaphragm positioned such that the first side is proximate to the valve passage, in response to an applied actuation force, the diaphragm is in a closed position to block the valve passage; A diaphragm operable to transition between a partially open open position; An enclosed space adjacent the second side of the diaphragm; To discharge the enclosed space to facilitate the transition of the diaphragm between the open and closed positions; Including, diaphragm valve. A combination of a diaphragm valve according to claim 51 with hydraulic reduction means operatively coupled to the discharge passage to reduce hydraulic pressure in the confined space. A combination of a pump operably coupled to an outlet passage and a diaphragm valve according to claim 51. 54. The combination of diaphragm valve and pump of claim 53, wherein the pump is operable to introduce a vacuum in a confined space. 55. The combination of diaphragm valve and pump of claim 53, wherein the pump is operable to introduce a vacuum between about 0.1 mbar and about 20 mbar in a confined space. 52. The diaphragm valve of claim 51, further comprising an actuator coupled to the diaphragm for applying an actuation force to the diaphragm to transfer the diaphragm between the open and closed positions. 53. The diaphragm valve of claim 51, further comprising a spring biasing the diaphragm toward one of the open and closed positions. 59. The apparatus of claim 57, wherein the spring further comprises an actuator operably coupled to the diaphragm for deflecting the diaphragm toward the closed position and for transferring the diaphragm from the closed position to the open position. , Diaphragm valve. 58. The apparatus of claim 57, wherein the spring further comprises an actuator operably coupled to the diaphragm to bias the diaphragm toward the open position and to transition the diaphragm from the open position to the closed position. , Diaphragm valve. The method of claim 56, wherein A heating body located proximate to the second side of the diaphragm to maintain an operating temperature of the diaphragm; The heat resistant member inserted between the valve passage and the actuator It further includes a diaphragm valve. 61. The diaphragm valve of claim 60, wherein the actuator comprises a solenoid. 61. The diaphragm valve of claim 60, wherein the discharge passage passes through the heating body. 53. The diaphragm valve of claim 51, wherein said discharge passage passes through said valve body. 59. The diaphragm valve of claim 56, wherein the actuator includes a removable plunger, a stop positioned to limit movement of the plunger, and a blocking member inserted between the plunger and the stop. 65. The apparatus of claim 64, further comprising a spring biasing the plunger away from the stop, the actuator comprising a solenoid, wherein the plunger magnetically pulls toward the stop when current is applied to the solenoid. And the blocking member comprises a nonmagnetic material, thereby reducing the required release time after removal of current from the solenoid until the spring moves the plunger. 53. The diaphragm valve of claim 51, wherein the diaphragm consists of a plastic material. 53. The diaphragm valve of claim 51, wherein the diaphragm consists of an elastomeric material. 52. A precursor mass delivery system comprising a diaphragm valve according to claim 51. A pioneering mass transfer system comprising a diaphragm valve according to claim 61. 53. An ALD reactor comprising a diaphragm valve according to claim 52 and means for generating suction. ALD reactor comprising a diaphragm valve according to claim 65. As a diaphragm valve system, Body means defining a valve passage having an inlet and an outlet; A diaphragm having a first side and a second side, the diaphragm positioned such that the first side is close to the valve passage; Means for defining a confined space adjacent the second side of the diaphragm; Means for reducing the hydraulic pressure in the closed space Including, diaphragm valve system. 73. The diaphragm valve system of claim 72, further comprising means for actuating the diaphragm. 73. The diaphragm valve system of claim 72, further comprising means for heating a medium in said valve passageway. 74. The diaphragm valve system of claim 73, further comprising means for damping heat transfer between said valve passageway and said actuating means. 82. Diaphragm valve system according to claim 72 for use in an ALD reactor. 77. A diaphragm valve system according to claim 75 for use in an ALD reactor. A method of transitioning a diaphragm between a closed position and an open position in a diaphragm valve having a valve body, the valve body defining a valve passageway having an inlet and an outlet, the diaphragm being a first side proximate the valve passageway. And a second side adjacent to the enclosed space, the diaphragm bends between a closed position to block the valve passage and an open position where the valve passage is at least partially open to allow flow through the valve passage. A method of transition of a diaphragm, which is more operable in response to an actuation force applied to it, Providing a discharge passage to and from said enclosed space; Discharging the confined space through the discharge passage to prevent build up of pressure behind the diaphragm to facilitate transition of the diaphragm between the closed position and the open position. A method of transferring a diaphragm, comprising. 80. The method of claim 78, further comprising applying suction to the discharge passage. 80. The method of claim 79, further comprising applying an actuation force to the diaphragm. As a diaphragm valve, A valve body defining a valve passage having an inlet and an outlet; A valve seat surrounding one of said inlet and outlet, said valve seat having an annular seating surface radially extending from said inlet and adjacent said valve passageway; A flexible diaphragm having first and second sides, wherein the diaphragm is positioned adjacent to the valve passage facing the valve seat having the first side abutting towards the seating surface of the valve seat, wherein the diaphragm is Flexible diaphragm operable in response to an actuation force applied to bend between an open position in which the valve passage is at least partially open and a closed position in which the first side of the diaphragm is pressed against the valve seat to block the valve passage Including; The seating surface is sized and shaped to contact a substantial portion of the first side of the diaphragm when the diaphragm is bent to the closed position, thereby facilitating heat transfer between the valve seat and the diaphragm. And prevent condensation on the first side of the diaphragm. 82. The diaphragm valve of claim 81, wherein the seating surface contacts between approximately 5% and 100% of the first side of the diaphragm when closed. 82. The diaphragm valve of claim 81, wherein the seating surface contacts between approximately 12% and 50% of the first side of the diaphragm when closed. 83. The diaphragm valve of claim 81, wherein the seating surface is not sharp in shape, thereby preventing shear deformation of the diaphragm. 83. The diaphragm valve of claim 81, wherein the seating surface is polished to thereby improve heat transfer from the valve seat to the diaphragm when the first side of the diaphragm is pressed against the valve seat. 84. The diaphragm valve of claim 81, wherein the seating surface is crowned. 84. The valve seat of claim 81 wherein the valve seat includes an annular seating ridge surrounding the inlet and extending from the seating surface toward the diaphragm, wherein the seating ridge is sufficiently long and sharp to provide a first side of the diaphragm. Is permanently deformed over the seating ridge in response to pressing the diaphragm against the valve seat, and the seating ridge is equivalent to the first side of the diaphragm after the diaphragm is deformed over the seating ridge. A diaphragm valve, short enough to have a portion pressed against the seating surface. 88. The diaphragm valve of claim 87, wherein said seating ridge extends from said seating surface to a height between approximately 0.5 mm and 1.5 mm. 88. The diaphragm valve of claim 87, wherein said diaphragm is comprised of a plastic material. 82. The diaphragm valve of claim 81, wherein the diaphragm consists of an elastomeric material. 83. The diaphragm valve of claim 81, further comprising a spacer ring inserted between the valve seat and the valve body to establish an axial position of the seating surface relative to the valve body. 82. The system of claim 81 wherein the seating surface is bounded by an outer peripheral edge and sized such that the diaphragm does not contact the outer peripheral edge of the seating surface when the diaphragm is bent to the closed position. Diaphragm valve. 84. The diaphragm valve of claim 81, further comprising a protective coating over the first side of the diaphragm. 95. The diaphragm valve of claim 93, wherein said protective coating is selected from the group consisting of oxides, nitrides, carbides, and mixtures thereof. 84. The diaphragm valve of claim 81, further comprising a protective coating lining the valve passageway. 95. The diaphragm valve of claim 95, wherein said protective coating is selected from the group consisting of oxides, nitrides, carbides, and mixtures thereof. 84. The diaphragm valve of claim 81, further comprising a protective coating over the seating surface of the valve seat. 98. The diaphragm valve of claim 97, wherein said protective coating is selected from the group consisting of oxides, nitrides, carbides, and mixtures thereof. 84. The apparatus of claim 81, further comprising an actuator for driving the diaphragm, the actuator including a removable plunger, a stop positioned to limit movement of the plunger, and a protective shutoff inserted between the plunger and the stop. A diaphragm valve comprising a member. 107. The diaphragm valve of claim 99, wherein said blocking member is comprised of a durable plastic material that mitigates the impact of said plunger against said stop, thereby preventing cracking of said stop and plunger. 107. The diaphragm valve of claim 99, wherein said blocking member is comprised of polytetrafluoroethylene. 82. The method of claim 81 wherein A removable plunger and solenoid operable to drive the diaphragm; The slide bushing inserted between the plunger and the solenoid It further includes a diaphragm valve. 84. The system of claim 81, further comprising: a confined space adjacent the second side of the diaphragm; The discharge space to and from the sealed space It further includes a diaphragm valve. 103. A combination of a diaphragm valve of claim 103 with a pump operably coupled to the discharge passage to reduce hydraulic pressure in the confined space. 82. The heating body of claim 81, wherein the heating body is in thermal contact with the valve body and extends proximate to the second side of the diaphragm, thereby forming a thermally conductive path that facilitates maintaining an operating temperature in the diaphragm. Further comprising, a diaphragm valve. A heater thermally connected to the valve body, 105. A heater adapted to generate heat conducting through the valve body and the heating body, thereby preventing the medium in the valve passage from condensing or cooling in the valve passage and the diaphragm according to claim 105. Combination of valves. According to claim 105, An actuator for driving the diaphragm; A heat resistant member inserted between the valve passage and the actuator to attenuate heat transfer between the valve passage and the actuator. It further includes a diaphragm valve. 84. The apparatus of claim 81, further comprising: a spring for biasing the diaphragm toward one of the open and closed positions; and an actuator operatively engaged with the diaphragm to drive the diaphragm in a direction opposite the spring. It further includes a diaphragm valve. According to claim 108, The actuator includes a solenoid and a removable plunger; The spring biases the diaphragm toward the closed position; The plunger is driven against the spring and moves the diaphragm to the open position in response to power supply of the solenoid coil. 84. The diaphragm of claim 81, further comprising means for contacting the valve body to conduct heat from the valve body toward the second side of the diaphragm to facilitate maintaining an operating temperature at the diaphragm. Fram valve. 83. A combination of a diaphragm valve according to claim 81, with means for heating the medium in the valve passage to prevent the medium from condensing or cooling in the valve passage. 84. The apparatus of claim 81, further comprising: means for actuating the diaphragm; Means for damping heat transfer between the valve passage and the actuating means. It further includes a diaphragm valve. 112. The diaphragm valve of claim 112, wherein said actuating means comprises a solenoid. 83. The diaphragm valve of claim 81, further comprising means for defining a confined space adjacent the second side of the diaphragm. A combination of means for introducing a vacuum in a confined space and a diaphragm valve according to claim 114. 84. The diaphragm valve of claim 81, further comprising means for reducing hydraulic pressure on the second side of the diaphragm. 83. A precursor material delivery system comprising a diaphragm valve according to claim 81. 107. A precursor mass transfer system comprising a diaphragm valve and a heater according to claim 106. ALD reactor comprising a diaphragm valve according to claim 81. 107. An ALD reactor comprising a diaphragm valve and a pump according to claim 104.

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