GB2418005B - Diaphragm valve for atomic layer deposition - Google Patents
Diaphragm valve for atomic layer depositionInfo
- Publication number
- GB2418005B GB2418005B GB0525685A GB0525685A GB2418005B GB 2418005 B GB2418005 B GB 2418005B GB 0525685 A GB0525685 A GB 0525685A GB 0525685 A GB0525685 A GB 0525685A GB 2418005 B GB2418005 B GB 2418005B
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer deposition
- atomic layer
- diaphragm valve
- diaphragm
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000231 atomic layer deposition Methods 0.000 title 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0686—Braking, pressure equilibration, shock absorbing
- F16K31/0693—Pressure equilibration of the armature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K39/00—Devices for relieving the pressure on the sealing faces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0644—One-way valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
- F16K49/002—Electric heating means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Valves (AREA)
- Fluid-Driven Valves (AREA)
- Magnetically Actuated Valves (AREA)
- Diaphragms And Bellows (AREA)
- Temperature-Responsive Valves (AREA)
- Chemical Vapour Deposition (AREA)
- Valve Housings (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0612855A GB2426808C (en) | 2003-06-26 | 2004-06-28 | Diaphragm valve for atomic layer deposition |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/609,339 US7021330B2 (en) | 2003-06-26 | 2003-06-26 | Diaphragm valve with reliability enhancements for atomic layer deposition |
US10/609,136 US6907897B2 (en) | 2003-06-26 | 2003-06-26 | Diaphragm valve for high-temperature precursor supply in atomic layer deposition |
US10/609,134 US6941963B2 (en) | 2003-06-26 | 2003-06-26 | High-speed diaphragm valve for atomic layer deposition |
PCT/US2004/020916 WO2005003605A2 (en) | 2003-06-26 | 2004-06-28 | Diaphragm valve for atomic layer deposition |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0525685D0 GB0525685D0 (en) | 2006-01-25 |
GB2418005A GB2418005A (en) | 2006-03-15 |
GB2418005B true GB2418005B (en) | 2006-11-01 |
Family
ID=33568641
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0525685A Expired - Lifetime GB2418005B (en) | 2003-06-26 | 2004-06-28 | Diaphragm valve for atomic layer deposition |
GB0612855A Expired - Lifetime GB2426808C (en) | 2003-06-26 | 2004-06-28 | Diaphragm valve for atomic layer deposition |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0612855A Expired - Lifetime GB2426808C (en) | 2003-06-26 | 2004-06-28 | Diaphragm valve for atomic layer deposition |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2007528962A (en) |
KR (1) | KR20060084360A (en) |
DE (1) | DE112004001147T5 (en) |
GB (2) | GB2418005B (en) |
WO (1) | WO2005003605A2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8741062B2 (en) * | 2008-04-22 | 2014-06-03 | Picosun Oy | Apparatus and methods for deposition reactors |
KR101262638B1 (en) * | 2010-12-06 | 2013-05-08 | 기아자동차주식회사 | A solenoid valve for liquid propane injection system |
DE102016106410A1 (en) | 2016-04-07 | 2017-10-12 | Samson Aktiengesellschaft | Electropneumatic solenoid valve, impact valve member for an electropneumatic solenoid valve |
KR101919385B1 (en) * | 2017-01-05 | 2018-11-16 | 주식회사 대정밸브 | Supercritical flow exclusive valve |
JP7117836B2 (en) * | 2017-09-28 | 2022-08-15 | タカノ株式会社 | solenoid valve |
DE102021129940A1 (en) * | 2021-11-17 | 2023-05-17 | Sisto Armaturen S.A. | secondary sealing |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4273028A (en) * | 1978-04-12 | 1981-06-16 | Linde Aktiengesellschaft | Valves and operating system for expansion machines |
US4513945A (en) * | 1981-09-14 | 1985-04-30 | Nippondenso Co., Ltd. | Electromagnetic reed valve |
US4826132A (en) * | 1987-07-21 | 1989-05-02 | Firma A.U.K. Muller Gmbh & Co. Kg | Solenoid valve, especially an outlet valve for infusion water |
US5112027A (en) * | 1989-06-21 | 1992-05-12 | Benkan Corporation | Metal diaphragm valve |
US5383646A (en) * | 1989-12-22 | 1995-01-24 | Bermad | Diaphragm control valve |
US5386849A (en) * | 1993-03-24 | 1995-02-07 | South Bend Controls, Inc. | Solenoid valve |
US5520001A (en) * | 1994-02-20 | 1996-05-28 | Stec, Inc. | Vapor controller |
US6073648A (en) * | 1999-04-26 | 2000-06-13 | Watson Grinding And Manufacturing Company | Metal element having a laminated coating |
US6179925B1 (en) * | 1999-05-14 | 2001-01-30 | Applied Materials, Inc. | Method and apparatus for improved control of process and purge material in substrate processing system |
US6241213B1 (en) * | 2000-03-07 | 2001-06-05 | Itt Manufacturing Enterprises, Inc. | Diaphragm valve |
US6585823B1 (en) * | 2000-07-07 | 2003-07-01 | Asm International, N.V. | Atomic layer deposition |
US6659421B1 (en) * | 1998-03-03 | 2003-12-09 | Continental Teves Ag & Co. Ohg | Electromagnetic valve |
-
2004
- 2004-06-28 KR KR1020057024768A patent/KR20060084360A/en not_active Application Discontinuation
- 2004-06-28 GB GB0525685A patent/GB2418005B/en not_active Expired - Lifetime
- 2004-06-28 JP JP2006517779A patent/JP2007528962A/en active Pending
- 2004-06-28 WO PCT/US2004/020916 patent/WO2005003605A2/en active Application Filing
- 2004-06-28 DE DE112004001147T patent/DE112004001147T5/en not_active Withdrawn
- 2004-06-28 GB GB0612855A patent/GB2426808C/en not_active Expired - Lifetime
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4273028A (en) * | 1978-04-12 | 1981-06-16 | Linde Aktiengesellschaft | Valves and operating system for expansion machines |
US4513945A (en) * | 1981-09-14 | 1985-04-30 | Nippondenso Co., Ltd. | Electromagnetic reed valve |
US4826132A (en) * | 1987-07-21 | 1989-05-02 | Firma A.U.K. Muller Gmbh & Co. Kg | Solenoid valve, especially an outlet valve for infusion water |
US5112027A (en) * | 1989-06-21 | 1992-05-12 | Benkan Corporation | Metal diaphragm valve |
US5383646A (en) * | 1989-12-22 | 1995-01-24 | Bermad | Diaphragm control valve |
US5386849A (en) * | 1993-03-24 | 1995-02-07 | South Bend Controls, Inc. | Solenoid valve |
US5520001A (en) * | 1994-02-20 | 1996-05-28 | Stec, Inc. | Vapor controller |
US6659421B1 (en) * | 1998-03-03 | 2003-12-09 | Continental Teves Ag & Co. Ohg | Electromagnetic valve |
US6073648A (en) * | 1999-04-26 | 2000-06-13 | Watson Grinding And Manufacturing Company | Metal element having a laminated coating |
US6179925B1 (en) * | 1999-05-14 | 2001-01-30 | Applied Materials, Inc. | Method and apparatus for improved control of process and purge material in substrate processing system |
US6241213B1 (en) * | 2000-03-07 | 2001-06-05 | Itt Manufacturing Enterprises, Inc. | Diaphragm valve |
US6585823B1 (en) * | 2000-07-07 | 2003-07-01 | Asm International, N.V. | Atomic layer deposition |
Also Published As
Publication number | Publication date |
---|---|
GB2426808C (en) | 2007-04-12 |
WO2005003605A3 (en) | 2005-07-21 |
GB2426808B (en) | 2007-03-28 |
DE112004001147T5 (en) | 2006-06-29 |
GB2426808A (en) | 2006-12-06 |
GB0525685D0 (en) | 2006-01-25 |
KR20060084360A (en) | 2006-07-24 |
WO2005003605A2 (en) | 2005-01-13 |
GB0612855D0 (en) | 2006-08-09 |
GB2418005A (en) | 2006-03-15 |
JP2007528962A (en) | 2007-10-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) |
Free format text: REGISTERED BETWEEN 20130404 AND 20130410 |
|
PE20 | Patent expired after termination of 20 years |
Expiry date: 20240627 |