GB0412469D0 - Film deposition - Google Patents

Film deposition

Info

Publication number
GB0412469D0
GB0412469D0 GB0412469A GB0412469A GB0412469D0 GB 0412469 D0 GB0412469 D0 GB 0412469D0 GB 0412469 A GB0412469 A GB 0412469A GB 0412469 A GB0412469 A GB 0412469A GB 0412469 D0 GB0412469 D0 GB 0412469D0
Authority
GB
United Kingdom
Prior art keywords
film deposition
deposition
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0412469A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trikon Technologies Ltd
Original Assignee
Trikon Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd
Priority to GB0412469A priority Critical patent/GB0412469D0/en
Publication of GB0412469D0 publication Critical patent/GB0412469D0/en
Priority to DE200510023904 priority patent/DE102005023904A1/en
Priority to US11/137,430 priority patent/US20050269200A1/en
Ceased legal-status Critical Current

Links

GB0412469A 2004-06-04 2004-06-04 Film deposition Ceased GB0412469D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0412469A GB0412469D0 (en) 2004-06-04 2004-06-04 Film deposition
DE200510023904 DE102005023904A1 (en) 2004-06-04 2005-05-24 Depositing films on substrate, e.g. liner or barrier layer in semiconductor devices, by depositing first films of target material with magnetron, and depositing second film using reactive physical vapor deposition process with magnetron
US11/137,430 US20050269200A1 (en) 2004-06-04 2005-05-26 Film deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0412469A GB0412469D0 (en) 2004-06-04 2004-06-04 Film deposition

Publications (1)

Publication Number Publication Date
GB0412469D0 true GB0412469D0 (en) 2004-07-07

Family

ID=32696655

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0412469A Ceased GB0412469D0 (en) 2004-06-04 2004-06-04 Film deposition

Country Status (2)

Country Link
DE (1) DE102005023904A1 (en)
GB (1) GB0412469D0 (en)

Also Published As

Publication number Publication date
DE102005023904A1 (en) 2006-01-12

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)