JPH1047245A - Evacuating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To freely release the air of an evacuating chamber and improve the exhaust performance for water and hydrogen without lowering of substantial exhaust performance of a turbo molecular pump in an evacuating device. SOLUTION: A turbo molecular pump 19 is provided in an evacuating chamber 11a to make the ultimate pressure in the evacuating chamber 10<-1> Pa or less. The turbo molecular pump is fitted to the outside of an exhaust port 12 of the evacuating chamber, a cryovalve element 13 is installed in the exhaust port of the evacuating chamber, the cryovalve element 13 is provided with a hydrogen storage alloy 10 and a cooling panel 16 for discharging water molecules to the turbo molecular pump side, and a cold valve element part 15 is provided on the evacuating chamber side. The cryovalve element 13 is operated to open and close as a gate valve for controlling the exhaust operation of the evacuating chamber.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to relates to a vacuum exhaust device, particularly suitable for vacuum exhaust device that requires less pressure reached 10 ^{over 1} Pa, an improved structure of the cryo-turbo molecular pump having high exhaust performance, and The present invention relates to a structure obtained by further developing the improved structure.

[0002]

2. Description of the Related Art A chamber to be evacuated (hereinafter, "evacuation chamber")
Is evacuated to a pressure of 10 ^-1 Pa or less, gas molecules (mainly water molecules) adhered to the wall surface of the vacuum evacuation chamber.
Is discharged into the evacuation chamber. Therefore, in order to evacuate the evacuation chamber to a pressure of 10 ^-1 Pa or less, it is necessary to use a vacuum pump having a high evacuation rate for water molecules.

In general, a cryopump or a turbo molecular pump is used as a vacuum pump of a vacuum evacuation apparatus requiring an ultimate pressure of 10 ^-1 Pa or less. However, these pumps have advantages and disadvantages based on their pumping principle. While a cryopump has the advantage of high exhaust performance for water and hydrogen, it is a built-in vacuum pump, so the stored gas must be re-discharged and refreshed someday (the refresh operation is referred to as " Regeneration)), and cannot be used continuously for a long time. There is also a disadvantage that it takes time to perform reproduction. The turbo-molecular pump is a gas transport type vacuum pump, and thus has an advantage that it can be used continuously for a long period of time, but has a disadvantage that its pumping performance for water and hydrogen is inferior to that of a cryopump.

Therefore, a combined vacuum pump called a cryo-turbo molecular pump as shown in FIG. 6 is used as a vacuum pump of an evacuation device, which is configured to make up for the respective drawbacks of the cryopump and the turbo-molecular pump. It may be done.

In this combined vacuum pump, as shown in FIG. 6, a nipple 54 is first attached to an exhaust port 52 of a vacuum exhaust chamber 51, which is an internal space of a vacuum vessel 50, without directly attaching a turbo molecular pump 53. , A turbo molecular pump 53 is mounted on the downstream side. Inside the nipple 54, a cylindrical cooling panel 55 cooled to a temperature of about 55 to 160K is provided. According to this configuration, since the exhaust of water molecules is mainly performed by the cooling panel 55 and the exhaust of other gases is performed by the turbo-molecular pump 53, the exhaust speed for the water molecules can be improved and the water molecules can be continuously used for a long time. it can.

The cooling panel 55 is, for example, a nipple 5
4 is cooled to a predetermined temperature by a refrigerator 56. Reference numeral 57 denotes a disk-shaped gate valve provided in the exhaust port 52, and 58 denotes an auxiliary pump.

FIG. 7 shows the configuration of another conventional apparatus.
In FIG. 7, elements that are substantially the same as the elements described in FIG. 6 are given the same reference numerals. In this device configuration, a cooling panel 55 similar to that described above is provided in the vacuum exhaust chamber 51. Also with this device, water molecules are evacuated by the cooling panel 55, and both the increase in the water evacuating speed and the continuous use by the turbo molecular pump 53 for a long period of time are achieved.

[0008]

In the above-mentioned conventional apparatus,
There are the following problems. Although the exhaust performance of the turbo molecular pump for water can be improved, the exhaust performance for hydrogen is not improved. In the conventional apparatus shown in FIG. 6, a cooling panel 5 for capturing water molecules is provided upstream of the turbo molecular pump 53.
5, the conductance of this portion is reduced, and there is a problem that the performance of the turbo molecular pump 53 such as the exhaust speed cannot be sufficiently exhibited.

In the conventional apparatus shown in FIG. 7, although the exhaust performance of the turbo-molecular pump 53 is not impaired, when the vacuum exhaust chamber 51 is opened to the atmosphere, the cooling panel 55 is heated to room temperature. Must be evacuated chamber 5
There was a problem that it took a long time to open 1 to the atmosphere.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and it is possible to freely open the vacuum exhaust chamber to the atmosphere and to reduce water and hydrogen without substantially reducing the exhaust performance of the turbo-molecular pump. An object of the present invention is to provide a vacuum exhaust device with improved exhaust performance.

[0011]

The vacuum evacuation apparatus according to the present invention is configured as follows to achieve the above object.

[0012] An evacuation apparatus according to the present invention (corresponding to claim 1) includes a turbo molecular pump in an evacuation chamber,
Ultimate pressure in the vacuum exhaust chamber is less than ^{10-2 1} Pa.
The turbo molecular pump is mounted outside the exhaust port of the vacuum exhaust chamber. A characteristic configuration of the present invention is that a valve member (hereinafter, referred to as a “cryovalve”) is provided at an exhaust port of a vacuum exhaust chamber, and the cryogenic valve is configured to exhaust a hydrogen storage alloy and water molecules on a turbo molecular pump side. A cooling panel cooled to a temperature suitable for cooling is provided, and a normal temperature valve body is provided on the side of the vacuum exhaust chamber. The cryovalve is configured to open and close as a gate valve for controlling the evacuation operation of the evacuation chamber.

[0013] The cooling temperature of the cooling panel must be a temperature at which water condenses and other gases do not condense.
A temperature range of ~ 160K is suitable.

If the surface of the hydrogen-absorbing alloy is covered with water molecules, the hydrogen-absorbing ability is reduced. Therefore, the hydrogen-absorbing alloy is preferably provided between the cooling panel and the valve member. It is necessary to prevent incidence on the alloy. Therefore, it is preferable that the cooling panel has a chevron shape or a louver shape. By making the cooling panel in such a shape, the passage probability (conductance) of hydrogen molecules is kept good, and water molecules are easily captured.

The temperature of the hydrogen storage alloy is preferably
It is kept in thermal contact with the cooling panel and has substantially the same temperature as the cooling panel. The temperature of the hydrogen storage alloy is
It is also possible to connect to a cooling panel via a heat insulating member and to maintain the temperature at room temperature. The hydrogen storage alloy has a hydrogen storage capacity even at room temperature, and the hydrogen storage capacity is further improved by cooling.

When a hydrogen storage alloy stores a certain amount of hydrogen, its storage capacity is reduced, so it is necessary to regenerate it someday. This regeneration is practically performed by using the hydrogen storage alloy for 300 hours.
The temperature must be higher than ℃. However, since the heat resistance temperature of the refrigerator is generally low, when the hydrogen storage alloy and the cooling panel are connected by a heat insulating member so as to reduce the influence of heat during regeneration on the refrigerator and its peripheral components. There is also.

Further, it is preferable to provide a heater at a portion of the valve body on the side of the hydrogen storage alloy so that the hydrogen storage alloy can be easily regenerated.

Further, the valve body needs to be at approximately room temperature in both normal use and regeneration, so that the hydrogen storage alloy and the valve body are preferably connected by a heat insulating member.

The cooling panel is connected to refrigeration means via a heat transfer member and is cooled. The heat transfer member is usually preferably formed of a member having deformability. If the heat resistance of the refrigerator is low and the effect of heat during regeneration becomes a problem, the heat transfer member is made of a rigid member, and the cryogenic valve is moved to the regeneration position where heat load is not applied to the refrigerator. It is preferable to regenerate.

The cryogenic valve body is provided inside a vacuum exhaust chamber, and is configured to be freely displaceable to a closed position or an exhaust position by a position moving mechanism. The evacuation position is in a vacuum evacuation chamber. When the heat resistance of the refrigerator is low and the influence of heat during regeneration becomes a problem, the displacement position can be set to any of the closed position, the exhaust position, and the regeneration position as described above.

The refrigeration means is preferably arranged outside the vacuum evacuation chamber. For example, a refrigerator is used.

In the above configuration, in the vacuum exhaust device provided with the cryogenic valve, when the cryogenic valve is closed, the valve portion facing the vacuum exhaust chamber is at room temperature. There is no problem when opening to the atmosphere. When the vacuum exhaust chamber is evacuated, the cryogenic valve moves to the exhaust position to open the space between the vacuum exhaust chamber and the vacuum pump, and the vacuum pump evacuates the vacuum exhaust chamber. In addition to the exhaust capacity of the vacuum pump, the cooling panel that has the exhaust capability for water molecules and the hydrogen storage alloy that has the exhaust capability for hydrogen molecules are exposed in the vacuum exhaust chamber. Can be increased. In addition, the cryogenic valve does not significantly increase the size and shape as compared with the conventional gate valve, and thus does not increase the shape restriction on the vacuum exhaust device. Further, in the above-described conventional apparatus, the conductance on the upstream side of the turbo-molecular pump is reduced. However, in the present invention, the substantial evacuation performance of the turbo-molecular pump is not significantly reduced.

Further, since the cryogenic valve is actually a built-in pump like a cryopump, it cannot be used continuously for a long period of time as in the case of using a turbo molecular pump alone. Except when introducing hydrogen into the evacuation system, the amount of water or hydrogen released from the wall of the evacuation system or the amount of water or hydrogen entering the evacuation system due to permeation from a sealing member or the like is extremely small. Because of its volume, it does not require regeneration as frequently as a cryopump. Accordingly, the turbo molecular pump can be used with practical convenience close to the case where the turbo molecular pump is used alone.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 to 3 show a first embodiment of the present invention. 1 shows a state in which the cryogenic valve is moved to the exhaust position, FIG. 2 shows a state in which the cryogenic valve is moved to the closed position, and FIG. 3 shows a moving mechanism of the cryogenic valve. The first embodiment shows an example in which a refrigerator having a sufficiently high heat-resistant temperature is used. FIGS. 4 and 5 show a second embodiment of the present invention, in which a refrigerator having a low heat-resistant temperature is used.

The first embodiment will be described with reference to FIGS. In FIG. 1, the inside of a vacuum vessel 11 is evacuated, and as a result, an evacuated chamber 11a is formed inside.
A circular opening (exhaust port) 12 is formed, for example, at the center of the lower wall of the vacuum vessel 11, and a vacuum pump device is provided outside the opening 12. A valve member 13 is provided at an inner portion of the opening 12. This valve member 13 is hereinafter referred to as a “cryovalve” due to its structural characteristics. The cryogenic valve body 13 is a gate valve member having a diameter larger than the diameter of the opening 12, and is supported by, for example, a well-known moving mechanism shown in FIG. By the moving mechanism, the cryogenic valve body 13 is provided so as to approach (downward in the illustrated example) or move away from the opening 12 (upward in the illustrated example). FIG. 1 shows a state in which the cryogenic valve body 13 is displaced upward and the opening 12 is opened. In the illustrated example, the cryovalve 13 is located at the upper limit position and is set to the most open exhaust position. Note that the exhaust position of the cryogenic valve 13 is not limited to the upper limit position. Even the intermediate open position can be used as the exhaust position. On the other hand, FIG. 2 shows that the cryogenic valve 13 is displaced downward, and the outer peripheral portion of the cryogenic valve 13 is provided on the peripheral portion of the opening 12 via a sealing member (such as an O-ring) 14 provided on the peripheral portion. It shows a state in which the contact is made and the opening 12 is closed. At this time, the cryovalve 13 is at the lower limit position, and a closed state is created.

When vacuum evacuation is not required, as shown in FIG. 2, the cryovalve 13 is brought into close contact with the seal member 14 to keep the space between the vacuum evacuation chamber 11a and the vacuum pump unit airtight. , Quarantine. In addition, the evacuation chamber 11a
When the vacuum evacuation is required, the cryogenic valve body 13 is moved to a predetermined upper position, and the vacuum evacuation chamber 11a can be evacuated by the vacuum pump device.

Here, the moving mechanism of the cryovalve 13 will be described with reference to FIG. The cryovalve 13 is supported by at least two columns 41. The column 41 extends outward from the lower wall of the vacuum vessel 11, and a plate-like piston member 42 is attached to the lower end thereof, and a sliding seal member (such as an O-ring) 43 is fixed around the piston member 42. . A cylinder 44 is provided outside the lower wall of the vacuum vessel 11, and a cylinder chamber 45 in which the piston member 42 is disposed is formed inside the cylinder 44. A sliding seal member 46 is disposed between the wall of the cylinder chamber 45 and the column 41, and a bellows 47 is attached above the sliding seal member 46. Valves 48a, 48 are provided on both sides of the piston member 42 in the cylinder chamber 45.
Air can freely enter and exit through each of b. By controlling the opening and closing of the valves 48a and 48b and supplying and discharging air, the position of the piston member 42 in the cylinder chamber 45 can be controlled, and the position of the cryogenic valve 13 can be changed. In order to confirm the position of the cryovalve 13, three position sensors 4 are provided outside the cylinder chamber 45.
9 is attached. Such a moving mechanism is an example of a position displacement mechanism for displacing the position of the cryogenic valve body 13, and the configuration of the position displacement mechanism itself is arbitrary.

Next, the structure of the cryovalve 13 will be described.
The cryovalve 13 has a valve body 15 having a disk shape with a required thickness, and a circular recess 15a formed on a surface (a lower surface in FIG. 1) of the valve body 15 on the opening 12 side. The cooling panel 16 and the hydrogen-absorbing alloy 10 arranged at the same position. The diameter of the recess 15 a is substantially equal to the diameter of the opening 12. The cooling panel 16 is formed of a material having good heat conductivity such as copper. The hydrogen storage alloy 10 has a plate shape, and is preferably provided in contact with the cooling panel 16. The hydrogen storage alloy 10 is made of, for example, Zr.
-V-Fe is used. Hydrogen storage alloys are roughly divided into Ca and Mg groups, Ti, Zr, V, and N.
There are various types such as group b, rare earth group, Pb group and the like. The hydrogen storage alloy 10 and the cooling panel 16 which are integrally mounted are attached to the holder 1 made of a heat insulating material.
7 is fixed to the valve body 15. A heater 25 such as a lamp heater is disposed in the recess 15a. FIG. 1
In FIG. 2, a power supply and a power supply line for supplying heating power to the heater 25 are not shown. The valve body 15
A narrow space is formed between the metal alloy and the hydrogen storage alloy 10.

A vacuum pump unit provided below the vacuum vessel 11 includes a nipple 18 for mounting a refrigerator attached to a lower peripheral edge of the opening 12 and a turbo fixed to a lower portion of the nipple 18. Molecular pump 19 and nipple 1
8 comprises a cooling panel refrigerator 20 attached to the cylindrical side projection 18a and an auxiliary pump 24 such as a dry pump or an oil rotary pump. Seal members 21 and 22 are interposed between the vacuum vessel 11 and the nipple 18 and between the side projection 18a of the nipple 18 and the refrigerator 20, respectively. The tip portion 20a of the refrigerator 20 is provided with the side protrusion 1
It extends through the internal space of 8a to the internal space of the nipple 18.

The cooling panel 16 of the cryovalve 13
Is connected by the heat transfer member 23 to the tip portion 20a of the refrigerator 20.
Connected to. Cooling panel 16 and refrigerator 20 are kept in good thermal contact with heat transfer member 23. The heat transfer member 23 is made of, for example, a copper fiber, has good heat conduction, and has a length and a degree of freedom that can sufficiently cope with a vertical displacement of the cryogenic valve 13. The heat transfer member 23 has deformation flexibility such that the heat transfer member 23 is freely deformed in accordance with the position of the cryogenic valve 13. Heat transfer member 23
1 shows the most extended state and FIG. 2 shows the most bent state.

The hydrogen storage alloy 10 and the valve body 15 are
7, and the space therebetween is evacuated while the evacuation chamber 11a is evacuated. When the cryovalve 13 is closed, the turbo molecular pump 19
The hydrogen storage alloy 10 and the cooling panel 16 are vacuum-insulated because they are evacuated to a vacuum.
Therefore, even if the cooling panel 16 and the hydrogen storage alloy 10 are cooled by the refrigerator 20 to a temperature of, for example, 55 to 160K, the valve body 15 can be kept at a normal temperature.

[0032] For to be cooled the cooling panel 16 temperature, the equilibrium vapor pressure of water at 160K is about 10 ^{@ 4} Pa, as long as required ultimate pressure of about 10 ^{@ 4} Pa as a vacuum exhaust device, The temperature of the cooling panel 16 is 160
It may be K or less. However, since a lower pressure ultimately is often required in practice, the temperature of the cooling panel 16 is
Equilibrium vapor pressure of water is preferably less than or equal to 120K to be less than 10 ^over 9 Pa. Further, when a gas other than water condenses on the cooling panel 16, the pressure in the evacuation chamber 11a is determined by the equilibrium vapor pressure of the gas at the temperature of the cooling panel 16 based on the equilibrium vapor pressure characteristic of the condensed gas. Therefore, the temperature of the cooling panel 16 is set to, for example, an equilibrium vapor pressure of a gas such as nitrogen, oxygen, or argon, which is usually mainly exhausted, by 100, so that gases other than water do not condense.
It is necessary to set the temperature to 55K or more which becomes Pa or more.

When the vacuum vessel is evacuated to a vacuum,
Normally, the interior of the container is reduced to 10 P
After rough evacuation is performed to a to several tens Pa, the gate valve is opened and vacuum evacuation is performed using a turbo molecular pump or a cryopump. According to this embodiment, the internal space of the vacuum vessel 11 is reduced to 10 P by the auxiliary pump 24.
The gas is roughly evacuated from a to several tens Pa. Thereafter, the cryogenic valve body 13 is opened, and vacuum evacuation is performed by the turbo molecular pump 19. Therefore, when the cryogenic valve body 13 is opened, the cooling panel 16 is displaced into the internal space of the vacuum vessel 11 having a pressure of 10 Pa to several tens Pa. At this time, the partial pressure of the gas in the evacuation chamber is reduced by the cooling panel 1.
Above the equilibrium vapor pressure of the gas at the temperature of 6, the gas condenses on the cooling panel 16. For this reason, the temperature of the cooling panel 16 is set such that the equilibrium vapor pressure of the gas mainly exhausted is 1 unit.
It is necessary to set the pressure to 55 K or more on the basis of 0 Pa to higher than several tens Pa, for example, 100 Pa or more.

As described above, in order for the cooling panel 16 to effectively exhaust only water molecules, the temperature must be maintained at 55 to 120K. Also, the pressure condition of the vacuum exhaust system is ^10-4
When it is about Pa, it may be 55 to 160K.

With the above configuration, when the cryogenic valve body 13 serving as the gate valve moves to the exhaust position, the cooling panel 16 of the cryogenic valve body 13
Will have the ability to pump out water molecules at a pumping speed almost equal to that of a cryopump having an inlet diameter equal to the diameter of the cryopump. Hydrogen is stored and exhausted by the hydrogen storage alloy 10 in addition to the hydrogen exhaust performance of the turbo molecular pump 19. Therefore, according to the above configuration, a vacuum evacuation apparatus having significantly improved water and hydrogen evacuation performance is realized.

When regenerating the hydrogen storage alloy 10 and the cooling panel 16 provided on the cryogenic valve body 13, for example,
The heater 25 attached to the valve body 15 generates heat, and the heat heats the hydrogen storage alloy 10. At this time, practically, the hydrogen storage alloy 10 is heated to 300 ° C. or higher. For this reason, if the influence of radiant heat on the turbo molecular pump 19 and the components near it becomes a problem, the hydrogen storage alloy 10 and the cooling panel 16 are connected via a heat insulating member (not shown), By suppressing the temperature rise of the cooling panel 16 by this heat insulating member, it is possible to reduce the influence of radiant heat on the turbo molecular pump and the like. However, at this time,
Since the operating temperature of the hydrogen storage alloy 10 is at room temperature, the hydrogen storage capacity is reduced to the room temperature level.
Has no problem because it has a sufficiently large exhaust capacity for hydrogen even at room temperature. In addition, even with such a configuration, when the heat resistance temperature of the surrounding components is insufficient, the refrigerator 20 can be operated at the time of regeneration of the hydrogen storage alloy 10 so as to further reduce radiant heat. .

Next, a second embodiment in which the heat-resistant temperature of the refrigerator is not sufficient will be described with reference to FIGS. FIG.
(A) when the cryovalve is in the closed position,
(B) shows when the cryogenic valve is at the exhaust position, and (c) shows when the cryogenic valve is at the regeneration position. In FIG. 4, substantially the same elements as those described in the above-described embodiment are denoted by the same reference numerals.

As shown in FIG. 4, a heat transfer member 31 is attached to the lower part of the cooling panel 16. The heat transfer member 31 is formed of a rod-shaped member having good heat conduction and rigidity, such as a copper rod. On the other hand, a sliding holding member 32 is attached to the tip portion 30a of the refrigerator 30, for example, in a vertical direction.
0 for good thermal contact. The heat transfer member 31 is arranged so as to be able to contact the slide holding member 32 and is provided so as to be able to move up and down while maintaining the contact state within a certain range. More specifically, the heat transfer member 31 is provided between the closed position (shown in FIG. 4A) of the cryogenic valve 13 and the exhaust position (FIG. 4A).
(Shown in FIG. 4 (b)) so as to come into contact with the slide holding member 32 and to separate from the slide holding member 32 at the reproduction position (shown in FIG. Therefore, the cooling panel 16 is cooled by the refrigerator 30 at the closed position (FIG. 4A) and the exhaust position (FIG. 4B) of the cryovalve 13 due to the configuration of the heat transfer member 31 and the slide holding member 32. Is done. Other components are the same as those in the first embodiment.

FIG. 5 specifically shows a contact structure between the heat transfer member 31 and the slide holding member 32. 5A is a longitudinal sectional view, FIG. 5B is a side view of a main part, and FIG. 5C is a bottom view. The slide holding member 32 includes a holding member 33 forming a frame, and two slide plates 35 attached to the holding member 33 via a spring 34. The holding member 33 includes the refrigerator 3
0 is fixed to the leading end 30a. The rod-shaped heat transfer member 31
The lower end is sandwiched between the two sliding plates 35 and is in contact with the sliding plate 35 in a state where it can be pressed. With such a structure, the heat transfer member 31 can contact the slide holding member 32 and move in the axial direction while maintaining the contact state.

According to the above configuration, when the hydrogen storage alloy 10 is regenerated, as shown in FIG. 4C, the cryogenic valve 13 moves to the regenerating position, and the heat transfer member 31 has good thermal contact. Since it is separated from the slip holding member 32, the influence of heat on the refrigerator 30 is greatly reduced. Further, as described above, by connecting the hydrogen storage alloy 10 and the cooling panel 16 with a heat insulating member, the influence of heat during regeneration can be further reduced.

In the first and second embodiments described above, the cooling panel 16 of the cryovalve 13 has a structure that protrudes from the valve body 15, but the cooling panel 16 is
It can also be configured to fit inside. In the above embodiment, the refrigerator 2 for the cooling panel is provided on the vacuum pump side.
Although 0 and 30 are installed, the refrigerator can be manufactured as an airtight structure and mounted on the upper portion of the cryoplast 13. With this configuration, a similar effect can be obtained. Further, various types of refrigerators can be used as a cooling unit for cooling the cooling panel 16 of the cryogenic valve body 13 and the hydrogen storage alloy 10, and the same effect can be obtained even if cooling is performed by circulating a refrigerant such as liquid nitrogen. Is obtained.

[0042]

As apparent from the above description, according to the present invention, a cooling panel cooled to a temperature suitable for exhausting water molecules to the vacuum pump device side as a gate valve of a vacuum exhaust chamber. Because a room temperature valve body portion is provided on the vacuum exhaust chamber side, and a cryogenic valve body made of a hydrogen storage alloy which is further provided between the cooling panel and the valve body portion attached to the cooling panel is provided, It is possible to realize a vacuum exhaust device that can freely open to the atmosphere and that has significantly improved exhaust performance for water and hydrogen without lowering the exhaust performance of the vacuum pump.

[Brief description of the drawings]

FIG. 1 is a partial vertical cross-sectional view showing a schematic configuration of a first embodiment of a vacuum exhaust device according to the present invention, showing a state in which a cryogenic valve body is displaced to a desired exhaust position.

FIG. 2 is a partial longitudinal sectional view showing a state in which the cryogenic valve body is displaced to an airtight holding position (a lower limit fully closed position) in the first embodiment.

FIG. 3 is a configuration diagram illustrating an example of a moving mechanism of a cryovalve.

FIGS. 4A and 4B are enlarged longitudinal sectional views showing a schematic configuration of a second embodiment of the vacuum evacuation apparatus according to the present invention, wherein FIG. 4A is when the cryovalve is in a closed position, and FIG. (C) shows the case where the cryogenic valve is at the exhaust position, and (c) shows the case where the cryogenic valve is at the regeneration position.

FIG. 5 is a view for explaining the structure of a sliding holding mechanism.

FIG. 6 is a longitudinal sectional view showing an example of a conventional evacuation device.

FIG. 7 is a longitudinal sectional view showing another example of a conventional evacuation device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Hydrogen storage alloy 11 Vacuum container 12 Opening 13 Cryo valve body 15 Valve body part 16 Cooling panel 17 Cooling panel holder 18 Nipple 19 Turbo molecular pump 20, 30 Refrigerator 23, 31 Heat transfer member 24 Auxiliary pump 25 Heater 32 Slip holding member

Claims (16)

[Claims] 1. A vacuum exhaust system comprising a turbo-molecular pump for exhausting a vacuum exhaust chamber, wherein the ultimate pressure is ^10-1 Pa or less, wherein hydrogen is stored at an exhaust port of the vacuum exhaust chamber and at a side of the turbo-molecular pump. A cooling panel cooled to a temperature suitable for exhausting the alloy and water molecules; and a valve member having a normal temperature valve body provided on the side of the vacuum exhaust chamber. A vacuum evacuation device that opens and closes as a gate valve that controls the evacuation operation of a chamber. 2. The temperature of the cooling panel is 55-160K.
2. The vacuum evacuation apparatus according to claim 1, wherein the temperature is within the range of the temperature. 3. The vacuum evacuation device according to claim 1, wherein the cooling panel has a chevron shape or a louver shape. 4. The valve according to claim 1, wherein the hydrogen storage alloy is provided between the cooling panel and the valve body.
The vacuum evacuation device as described. 5. The vacuum evacuation apparatus according to claim 1, wherein the hydrogen storage alloy is kept in thermal contact with the cooling panel, and has a temperature substantially equal to that of the cooling panel. 6. The vacuum evacuation apparatus according to claim 1, wherein the hydrogen storage alloy is connected to the cooling panel via a heat insulating member, and the temperature is maintained at a normal temperature. 7. The hydrogen storage alloy and the valve body are connected via a heat insulating member.
7. The vacuum evacuation apparatus according to any one of 6. 8. The vacuum evacuation device according to claim 1, wherein a heater is provided near the hydrogen storage alloy in the valve body. 9. The vacuum evacuation apparatus according to claim 1, wherein the cooling panel is connected to a refrigeration unit via a heat transfer member. 10. The vacuum evacuation apparatus according to claim 9, wherein said heat transfer member is formed of a member having flexibility. 11. The vacuum evacuation apparatus according to claim 9, wherein said heat transfer member is formed of a rigid member. 12. The apparatus according to claim 1, wherein the valve member is movably supported by a position moving mechanism, and the position moving mechanism moves the valve member to one of a closed position and an exhaust position. Evacuation device. 13. The apparatus according to claim 1, wherein the valve member is movably supported by a position moving mechanism, and the position moving mechanism moves the valve member to one of a closed position, an exhaust position, and a regeneration position. 3. The vacuum exhaust device according to 1. 14. The evacuation apparatus according to claim 12, wherein the valve member is provided inside the evacuation chamber, and the evacuation position is set in the evacuation chamber. 15. The evacuation apparatus according to claim 9, wherein the refrigerating means is disposed outside the evacuation chamber. 16. The vacuum evacuation apparatus according to claim 9, wherein the refrigeration unit is a refrigerator.