GB2410466A - A method of making an inkjet printhead - Google Patents
A method of making an inkjet printhead Download PDFInfo
- Publication number
- GB2410466A GB2410466A GB0401877A GB0401877A GB2410466A GB 2410466 A GB2410466 A GB 2410466A GB 0401877 A GB0401877 A GB 0401877A GB 0401877 A GB0401877 A GB 0401877A GB 2410466 A GB2410466 A GB 2410466A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- patterned layer
- printhead
- layer
- patterned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 238000000926 separation method Methods 0.000 claims abstract 3
- 238000000034 method Methods 0.000 claims description 18
- 229920002120 photoresistant polymer Polymers 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 57
- 230000004888 barrier function Effects 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000005488 sandblasting Methods 0.000 description 2
- 101100293180 Arabidopsis thaliana MYB28 gene Proteins 0.000 description 1
- 101100020366 Mus musculus Krtap14 gene Proteins 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14024—Assembling head parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0401877A GB2410466A (en) | 2004-01-29 | 2004-01-29 | A method of making an inkjet printhead |
US11/041,969 US8388117B2 (en) | 2004-01-29 | 2005-01-26 | Method of making an inkjet printhead |
DE602005018847T DE602005018847D1 (de) | 2004-01-29 | 2005-01-26 | Verfahren zur Herstellung eines Tintenstrahldruckkopfes |
EP05100501A EP1559554B1 (de) | 2004-01-29 | 2005-01-26 | Verfahren zur Herstellung eines Tintenstrahldruckkopfes |
JP2005023663A JP4594755B2 (ja) | 2004-01-29 | 2005-01-31 | インクジェットプリントヘッドを作製する方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0401877A GB2410466A (en) | 2004-01-29 | 2004-01-29 | A method of making an inkjet printhead |
Publications (2)
Publication Number | Publication Date |
---|---|
GB0401877D0 GB0401877D0 (en) | 2004-03-03 |
GB2410466A true GB2410466A (en) | 2005-08-03 |
Family
ID=31971621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0401877A Withdrawn GB2410466A (en) | 2004-01-29 | 2004-01-29 | A method of making an inkjet printhead |
Country Status (5)
Country | Link |
---|---|
US (1) | US8388117B2 (de) |
EP (1) | EP1559554B1 (de) |
JP (1) | JP4594755B2 (de) |
DE (1) | DE602005018847D1 (de) |
GB (1) | GB2410466A (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7826687B2 (en) | 2005-03-18 | 2010-11-02 | The Invention Science Fund I, Llc | Including contextual information with a formed expression |
US7809215B2 (en) | 2006-10-11 | 2010-10-05 | The Invention Science Fund I, Llc | Contextual information encoded in a formed expression |
US8823636B2 (en) * | 2005-03-18 | 2014-09-02 | The Invention Science Fund I, Llc | Including environmental information in a manual expression |
JP5043548B2 (ja) * | 2007-07-27 | 2012-10-10 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
US8092625B2 (en) * | 2008-08-19 | 2012-01-10 | Silverbrook Research Pty Ltd | Integrated circuit placement system |
US8701276B2 (en) * | 2008-08-19 | 2014-04-22 | Zamtec Ltd | Placement head for a die placing assembly |
US20100043214A1 (en) * | 2008-08-19 | 2010-02-25 | Silverbrook Research Pty Ltd | Integrated circuit dice pick and lift head |
US8296937B2 (en) * | 2008-08-19 | 2012-10-30 | Silverbrook Research Pty Ltd | Wafer positioning system |
US20100047053A1 (en) * | 2008-08-19 | 2010-02-25 | Silverbrook Research Pty Ltd | Die picker for picking printhead die from a wafer |
US20100047962A1 (en) * | 2008-08-19 | 2010-02-25 | Silverbrook Research Pty Ltd | Multi-chip printhead assembler |
US7979979B2 (en) * | 2008-08-19 | 2011-07-19 | Silverbrook Research Pty Ltd | Clamp assembly for an assembler of integrated circuitry on a carrier |
CN111806093A (zh) * | 2020-06-28 | 2020-10-23 | 中国科学院苏州纳米技术与纳米仿生研究所 | 薄型喷墨打印头及其制作方法、设备 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04161341A (ja) * | 1990-10-25 | 1992-06-04 | Fuji Xerox Co Ltd | インクジェット記録ヘッドの製造方法 |
EP0641659A2 (de) * | 1993-09-07 | 1995-03-08 | Hewlett-Packard Company | Selbstausrichtende Düsenkonstruktion für Thermo-Tintenstrahldruckköpfe |
JPH07137263A (ja) * | 1993-11-19 | 1995-05-30 | Canon Inc | 液体噴射記録ヘッドおよびその製造方法 |
US20020071006A1 (en) * | 2000-06-26 | 2002-06-13 | Chien-Hau Chen | Direct imaging polymer fluid jet orifice |
EP1226944A1 (de) * | 2001-01-24 | 2002-07-31 | Xerox Corporation | Herstellungsverfahren |
EP1380422A1 (de) * | 2002-07-10 | 2004-01-14 | Canon Kabushiki Kaisha | Herstellungsverfahren für eine Mikrostruktur, Herstellungsverfahren für einen Flüssigkeitsausstosskopf und Flüssigkeitsausstosskopf |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2925816B2 (ja) | 1991-10-31 | 1999-07-28 | キヤノン株式会社 | 液体噴射記録ヘッド、その製造方法、及び同ヘッドを具備した記録装置 |
US5322811A (en) * | 1991-08-01 | 1994-06-21 | Canon Kabushiki Kaisha | Method for manufacturing a recording head with integrally housed semiconductor functional elements |
DE69534271T2 (de) * | 1994-07-11 | 2006-05-11 | Kabushiki Kaisha Toshiba, Kawasaki | Tintenstrahlaufzeichnungsgerät |
JPH08336976A (ja) | 1995-06-14 | 1996-12-24 | Canon Inc | 液体噴射記録ヘッドおよびその製造方法ならびに前記液体噴射記録ヘッドを搭載する液体噴射記録装置 |
JP3521708B2 (ja) * | 1997-09-30 | 2004-04-19 | セイコーエプソン株式会社 | インクジェット式記録ヘッドおよびその製造方法 |
JP2000094695A (ja) | 1998-09-25 | 2000-04-04 | Sony Corp | プリントヘッドの製造方法 |
JP2000108360A (ja) | 1998-10-02 | 2000-04-18 | Sony Corp | プリントヘッドの製造方法 |
US6364455B1 (en) * | 1999-06-29 | 2002-04-02 | Wisertek International Corporation | Printhead of ink jet printing apparatus and manufacturing method therefor |
JP2002059557A (ja) | 2000-08-22 | 2002-02-26 | Casio Comput Co Ltd | 薄膜体設置方法 |
US6375313B1 (en) * | 2001-01-08 | 2002-04-23 | Hewlett-Packard Company | Orifice plate for inkjet printhead |
US6766817B2 (en) | 2001-07-25 | 2004-07-27 | Tubarc Technologies, Llc | Fluid conduction utilizing a reversible unsaturated siphon with tubarc porosity action |
US20030052101A1 (en) * | 2001-09-14 | 2003-03-20 | Jianhui Gu | Method for cleaning debris off UV laser ablated polymer, method for producing a polymer nozzle member using the same and nozzle member produced thereby |
US20030143444A1 (en) * | 2002-01-31 | 2003-07-31 | Qin Liu | Fuel cell with fuel droplet fuel supply |
US6871942B2 (en) * | 2002-04-15 | 2005-03-29 | Timothy R. Emery | Bonding structure and method of making |
-
2004
- 2004-01-29 GB GB0401877A patent/GB2410466A/en not_active Withdrawn
-
2005
- 2005-01-26 DE DE602005018847T patent/DE602005018847D1/de active Active
- 2005-01-26 US US11/041,969 patent/US8388117B2/en not_active Expired - Fee Related
- 2005-01-26 EP EP05100501A patent/EP1559554B1/de not_active Expired - Fee Related
- 2005-01-31 JP JP2005023663A patent/JP4594755B2/ja not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04161341A (ja) * | 1990-10-25 | 1992-06-04 | Fuji Xerox Co Ltd | インクジェット記録ヘッドの製造方法 |
EP0641659A2 (de) * | 1993-09-07 | 1995-03-08 | Hewlett-Packard Company | Selbstausrichtende Düsenkonstruktion für Thermo-Tintenstrahldruckköpfe |
JPH07137263A (ja) * | 1993-11-19 | 1995-05-30 | Canon Inc | 液体噴射記録ヘッドおよびその製造方法 |
US20020071006A1 (en) * | 2000-06-26 | 2002-06-13 | Chien-Hau Chen | Direct imaging polymer fluid jet orifice |
EP1226944A1 (de) * | 2001-01-24 | 2002-07-31 | Xerox Corporation | Herstellungsverfahren |
EP1380422A1 (de) * | 2002-07-10 | 2004-01-14 | Canon Kabushiki Kaisha | Herstellungsverfahren für eine Mikrostruktur, Herstellungsverfahren für einen Flüssigkeitsausstosskopf und Flüssigkeitsausstosskopf |
Also Published As
Publication number | Publication date |
---|---|
JP4594755B2 (ja) | 2010-12-08 |
EP1559554A1 (de) | 2005-08-03 |
US20060033784A1 (en) | 2006-02-16 |
GB0401877D0 (en) | 2004-03-03 |
DE602005018847D1 (de) | 2010-03-04 |
US8388117B2 (en) | 2013-03-05 |
EP1559554B1 (de) | 2010-01-13 |
JP2005212486A (ja) | 2005-08-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |