GB2205092B - Doping compositions and their use - Google Patents
Doping compositions and their useInfo
- Publication number
- GB2205092B GB2205092B GB8808418A GB8808418A GB2205092B GB 2205092 B GB2205092 B GB 2205092B GB 8808418 A GB8808418 A GB 8808418A GB 8808418 A GB8808418 A GB 8808418A GB 2205092 B GB2205092 B GB 2205092B
- Authority
- GB
- United Kingdom
- Prior art keywords
- doping compositions
- doping
- compositions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000203 mixture Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/6303—Inorganic additives
- C04B35/6306—Binders based on phosphoric acids or phosphates
- C04B35/6309—Aluminium phosphates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S252/00—Compositions
- Y10S252/95—Doping agent source material
- Y10S252/951—Doping agent source material for vapor transport
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Glass Compositions (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/056,621 US4800175A (en) | 1987-05-29 | 1987-05-29 | Phosphorous planar dopant source for low temperature applications |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8808418D0 GB8808418D0 (en) | 1988-05-11 |
GB2205092A GB2205092A (en) | 1988-11-30 |
GB2205092B true GB2205092B (en) | 1991-08-07 |
Family
ID=22005609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8808418A Expired - Fee Related GB2205092B (en) | 1987-05-29 | 1988-04-11 | Doping compositions and their use |
Country Status (5)
Country | Link |
---|---|
US (1) | US4800175A (zh) |
JP (1) | JPS63307719A (zh) |
KR (1) | KR970003905B1 (zh) |
CN (1) | CN1018970B (zh) |
GB (1) | GB2205092B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0439281U (zh) * | 1990-08-01 | 1992-04-02 | ||
US5086016A (en) * | 1990-10-31 | 1992-02-04 | International Business Machines Corporation | Method of making semiconductor device contact including transition metal-compound dopant source |
US5536686A (en) * | 1992-10-20 | 1996-07-16 | The Research Foundation Of State University Of New York At Buffalo | Phosphate binders for metal-matrix composites |
US5350460A (en) * | 1992-12-08 | 1994-09-27 | Techneglas, Inc. | High temperature phosphorus oxide diffusion source |
US5350461A (en) * | 1992-12-08 | 1994-09-27 | Techneglas, Inc. | Low temperature P2 O5 oxide diffusion source |
KR100358129B1 (ko) * | 1995-02-27 | 2003-01-24 | 주식회사 하이닉스반도체 | 산화물이도핑된폴리실리콘막을사용한반도체소자제조방법 |
TWI499070B (zh) * | 2010-04-23 | 2015-09-01 | Hitachi Chemical Co Ltd | 形成n型擴散層的組成物、n型擴散層的製造方法及太陽電池元件的製造方法 |
TWI498945B (zh) * | 2010-04-23 | 2015-09-01 | Hitachi Chemical Co Ltd | p型擴散層形成組成物、p型擴散層的製造方法及太陽電池元件的製造方法 |
JP5625537B2 (ja) * | 2010-06-24 | 2014-11-19 | 日立化成株式会社 | n型拡散層形成組成物、n型拡散層の製造方法、及び太陽電池セルの製造方法 |
JP5691269B2 (ja) * | 2010-07-07 | 2015-04-01 | 日立化成株式会社 | n型拡散層形成組成物、n型拡散層の製造方法、及び太陽電池セルの製造方法 |
JP5803080B2 (ja) * | 2010-09-24 | 2015-11-04 | 日立化成株式会社 | p型拡散層形成組成物、p型拡散層形成組成物の製造方法、p型拡散層の製造方法、及び太陽電池セルの製造方法 |
JP5703673B2 (ja) * | 2010-10-12 | 2015-04-22 | 日立化成株式会社 | n型拡散層形成組成物、n型拡散層の製造方法、及び太陽電池セルの製造方法 |
CN103348449A (zh) * | 2011-02-17 | 2013-10-09 | 日立化成株式会社 | n型扩散层形成用组合物、n型扩散层的制造方法和太阳能电池单元的制造方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3841927A (en) * | 1972-11-10 | 1974-10-15 | Owens Illinois Inc | Aluminum metaphosphate source body for doping silicon |
US3920882A (en) * | 1973-04-16 | 1975-11-18 | Owens Illinois Inc | N-type dopant source |
US3998668A (en) * | 1973-12-21 | 1976-12-21 | Owens-Illinois, Inc. | Aluminum metaphosphate dopant sources |
JPS5171777A (ja) * | 1974-12-19 | 1976-06-21 | Denki Kagaku Kogyo Kk | Uehaajohandotaidoopuzai |
JPS5171776A (ja) * | 1974-12-19 | 1976-06-21 | Denki Kagaku Kogyo Kk | Uehaajohandotaidoopuzai |
JPS5171774A (ja) * | 1974-12-19 | 1976-06-21 | Denki Kagaku Kogyo Kk | Uehaajohandotaidoopuzai |
JPS5171773A (ja) * | 1974-12-19 | 1976-06-21 | Denki Kagaku Kogyo Kk | Uehaajohandotaidoopuzai |
JPS5171775A (ja) * | 1974-12-19 | 1976-06-21 | Denki Kagaku Kogyo Kk | Uehaajohandotaidoopuzai |
JPS5171778A (ja) * | 1974-12-19 | 1976-06-21 | Denki Kagaku Kogyo Kk | Uehaajohandotaidoopuzai |
US4033790A (en) * | 1976-07-29 | 1977-07-05 | Denki Kagaku Kogyo Kabushiki Kaisha | Solid diffusion dopants for semiconductors and method of making the same |
US4141738A (en) * | 1978-03-16 | 1979-02-27 | Owens-Illinois, Inc. | Melt-formed polycrystalline ceramics and dopant hosts containing phosphorus |
US4175988A (en) * | 1978-03-16 | 1979-11-27 | Owens-Illinois, Inc. | Melt-formed polycrystalline ceramics and dopant hosts containing phosphorus |
JPS5531611A (en) * | 1978-08-28 | 1980-03-06 | Keiichi Senmaichi | Hard type airship capable of landing water |
JPS5732026A (en) * | 1980-08-01 | 1982-02-20 | Diesel Kiki Co Ltd | Fuel injection device |
-
1987
- 1987-05-29 US US07/056,621 patent/US4800175A/en not_active Expired - Lifetime
-
1988
- 1988-04-11 GB GB8808418A patent/GB2205092B/en not_active Expired - Fee Related
- 1988-04-15 JP JP63091915A patent/JPS63307719A/ja active Granted
- 1988-05-28 KR KR1019880006327A patent/KR970003905B1/ko not_active IP Right Cessation
- 1988-05-28 CN CN88103168A patent/CN1018970B/zh not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS63307719A (ja) | 1988-12-15 |
GB8808418D0 (en) | 1988-05-11 |
GB2205092A (en) | 1988-11-30 |
KR970003905B1 (ko) | 1997-03-22 |
KR880014655A (ko) | 1988-12-24 |
CN88103168A (zh) | 1988-12-28 |
CN1018970B (zh) | 1992-11-04 |
JPH0239089B2 (zh) | 1990-09-04 |
US4800175A (en) | 1989-01-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3666855D1 (en) | Alcalisilicate compositions and their use | |
GB2159516B (en) | Azaphthalocyanines and their use as photoactivators | |
IL78934A0 (en) | Alfuzosine compositions and use | |
ZA902231B (en) | Composition and use | |
SG56192G (en) | Biocidal composition and use thereof | |
JPS6454032A (en) | Polydisilacyclobutasilazane and its preparation and use | |
GB2205092B (en) | Doping compositions and their use | |
GB8813576D0 (en) | Composition & use | |
AR242084A1 (es) | Una composicion bactericida. | |
GB8911294D0 (en) | Composition and use | |
NZ221694A (en) | Delta-22-milbemycins and parasiticidal compositions | |
GR860075B (en) | Compositions their preparation and use | |
EP0255801A3 (en) | Anilinotriazines and their use | |
GB8818969D0 (en) | Doped batio-3 based compositions | |
GB2215601B (en) | Radiation - screening compositions containing elderblossom extracts and use thereof | |
DE3562486D1 (en) | Arginyl-3-carboxy-4-hydroxyanilide and their use | |
GB2169508B (en) | Ophthalmic compositions and use | |
EP0230052A3 (en) | Immunoamplifiers and related compositions | |
GB8727590D0 (en) | Formulation | |
EP0307665A3 (en) | Encapsulation composition and use thereof | |
GB8712251D0 (en) | Formulation | |
IL86407A0 (en) | Organo-metal compositions,preparation and use | |
IL87030A0 (en) | Bicyclo-octanes and nonanes and compositions | |
GR860180B (en) | Compositions and their use | |
ZA884976B (en) | 1h-pyrazole-1-alkanamides and preparation useful as antiar-rhythmic agents |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20060411 |