GB2178064A - Producing a thin film by reactive evaporation - Google Patents

Producing a thin film by reactive evaporation Download PDF

Info

Publication number
GB2178064A
GB2178064A GB08617904A GB8617904A GB2178064A GB 2178064 A GB2178064 A GB 2178064A GB 08617904 A GB08617904 A GB 08617904A GB 8617904 A GB8617904 A GB 8617904A GB 2178064 A GB2178064 A GB 2178064A
Authority
GB
United Kingdom
Prior art keywords
thin film
reaction gas
metal
specific
partial pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB08617904A
Other languages
English (en)
Other versions
GB8617904D0 (en
Inventor
Masashi Kasaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bosch Corp
Original Assignee
Diesel Kiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diesel Kiki Co Ltd filed Critical Diesel Kiki Co Ltd
Publication of GB8617904D0 publication Critical patent/GB8617904D0/en
Publication of GB2178064A publication Critical patent/GB2178064A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Insulating Bodies (AREA)
GB08617904A 1985-07-22 1986-07-22 Producing a thin film by reactive evaporation Withdrawn GB2178064A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60160216A JPS6222314A (ja) 1985-07-22 1985-07-22 薄膜製造方法

Publications (2)

Publication Number Publication Date
GB8617904D0 GB8617904D0 (en) 1986-08-28
GB2178064A true GB2178064A (en) 1987-02-04

Family

ID=15710240

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08617904A Withdrawn GB2178064A (en) 1985-07-22 1986-07-22 Producing a thin film by reactive evaporation

Country Status (4)

Country Link
JP (1) JPS6222314A (de)
KR (1) KR920000590B1 (de)
DE (1) DE3624772A1 (de)
GB (1) GB2178064A (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2242442A (en) * 1990-03-09 1991-10-02 Allan Matthews Modulated composition composites produced by vapour deposition
GB2243162A (en) * 1990-04-17 1991-10-23 Riken Kk A chromium nitride coating having a steadily increasing nitrogen concentration
EP0657562A2 (de) * 1993-11-12 1995-06-14 Ppg Industries, Inc. Dauerhafte zerstäubte Beschichtung aus Metalloxid
GB2294950A (en) * 1994-10-27 1996-05-15 Riken Kk Chromium nitride sliding surfaces
US5672386A (en) * 1994-10-27 1997-09-30 Kabushiki Kaisha Riken Process for forming a coating of chromium and nitrogen having good wear resistance properties

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63303054A (ja) * 1987-06-04 1988-12-09 Toyota Motor Corp 多層膜の形成方法
DE3726731A1 (de) * 1987-08-11 1989-02-23 Hartec Ges Fuer Hartstoffe Und Verfahren zum aufbringen von ueberzuegen auf gegenstaende mittels magnetfeldunterstuetzter kathodenzerstaeubung im vakuum
DE3737404A1 (de) * 1987-11-04 1989-05-18 Bartl Josef Franz Verfahren und einrichtung zur erzeugung haftfester vakuumbeschichtungen

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123441A (en) * 1982-06-18 1984-02-01 Citizen Watch Co Ltd Method and apparatus for coating materials by ion plating

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3791852A (en) * 1972-06-16 1974-02-12 Univ California High rate deposition of carbides by activated reactive evaporation
JPS5941510B2 (ja) * 1979-07-24 1984-10-08 双葉電子工業株式会社 酸化ベリリウム膜とその形成方法
JPS60234965A (ja) * 1984-05-04 1985-11-21 Diesel Kiki Co Ltd 薄膜製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123441A (en) * 1982-06-18 1984-02-01 Citizen Watch Co Ltd Method and apparatus for coating materials by ion plating

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2242442A (en) * 1990-03-09 1991-10-02 Allan Matthews Modulated composition composites produced by vapour deposition
GB2242442B (en) * 1990-03-09 1994-02-02 Allan Matthews Modulated composition composites produced by vapour deposition
GB2243162A (en) * 1990-04-17 1991-10-23 Riken Kk A chromium nitride coating having a steadily increasing nitrogen concentration
GB2243162B (en) * 1990-04-17 1993-10-06 Riken Kk A wear-resistant coating
EP0657562A2 (de) * 1993-11-12 1995-06-14 Ppg Industries, Inc. Dauerhafte zerstäubte Beschichtung aus Metalloxid
EP0657562A3 (de) * 1993-11-12 1996-01-10 Ppg Industries Inc Dauerhafte zerstäubte Beschichtung aus Metalloxid.
US6346174B1 (en) 1993-11-12 2002-02-12 Ppg Industries Ohio, Inc. Durable sputtered metal oxide coating
GB2294950A (en) * 1994-10-27 1996-05-15 Riken Kk Chromium nitride sliding surfaces
US5587227A (en) * 1994-10-27 1996-12-24 Kabushiki Kaisha Riken Coating of chromium and nitrogen having good wear resistance properties
US5672386A (en) * 1994-10-27 1997-09-30 Kabushiki Kaisha Riken Process for forming a coating of chromium and nitrogen having good wear resistance properties
GB2294950B (en) * 1994-10-27 1997-10-29 Riken Kk Coating of chromium and nitrogen having good wear resistance properties

Also Published As

Publication number Publication date
KR920000590B1 (ko) 1992-01-16
KR870001326A (ko) 1987-03-13
DE3624772A1 (de) 1987-01-22
JPH0467724B2 (de) 1992-10-29
GB8617904D0 (en) 1986-08-28
JPS6222314A (ja) 1987-01-30
DE3624772C2 (de) 1988-07-21

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)