GB2174215B - Master film processing robot - Google Patents

Master film processing robot

Info

Publication number
GB2174215B
GB2174215B GB08510262A GB8510262A GB2174215B GB 2174215 B GB2174215 B GB 2174215B GB 08510262 A GB08510262 A GB 08510262A GB 8510262 A GB8510262 A GB 8510262A GB 2174215 B GB2174215 B GB 2174215B
Authority
GB
United Kingdom
Prior art keywords
film processing
processing robot
master film
master
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08510262A
Other languages
English (en)
Other versions
GB2174215A (en
GB8510262D0 (en
Inventor
Teruo Orikasa
Shigeo Sumi
Hiroshi Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Corp filed Critical Somar Corp
Priority to GB08510262A priority Critical patent/GB2174215B/en
Priority to DE19853514988 priority patent/DE3514988A1/de
Publication of GB8510262D0 publication Critical patent/GB8510262D0/en
Publication of GB2174215A publication Critical patent/GB2174215A/en
Application granted granted Critical
Publication of GB2174215B publication Critical patent/GB2174215B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB08510262A 1985-04-23 1985-04-23 Master film processing robot Expired GB2174215B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB08510262A GB2174215B (en) 1985-04-23 1985-04-23 Master film processing robot
DE19853514988 DE3514988A1 (de) 1985-04-23 1985-04-25 Verarbeitungssystem fuer ein filmoriginal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08510262A GB2174215B (en) 1985-04-23 1985-04-23 Master film processing robot

Publications (3)

Publication Number Publication Date
GB8510262D0 GB8510262D0 (en) 1985-05-30
GB2174215A GB2174215A (en) 1986-10-29
GB2174215B true GB2174215B (en) 1988-09-14

Family

ID=10578039

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08510262A Expired GB2174215B (en) 1985-04-23 1985-04-23 Master film processing robot

Country Status (2)

Country Link
DE (1) DE3514988A1 (enrdf_load_stackoverflow)
GB (1) GB2174215B (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2210996A (en) * 1987-10-09 1989-06-21 Plessey Co Plc Contents verification apparatus
DE3937556C2 (de) * 1989-11-10 1995-01-05 Krause Biagosch Gmbh Stapelbare Kopiervorlage zur Herstellung von Druckplatten
US6467895B1 (en) 2000-02-16 2002-10-22 Hewlett-Packard Company Vacuum feeder for imaging device
US7661672B2 (en) 2006-04-28 2010-02-16 Michael Tenbrock Film handling system
CN107265129A (zh) * 2017-06-02 2017-10-20 成都福莫斯智能系统集成服务有限公司 采用图像识别辅助机器人堆垛的系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2039208C3 (de) * 1970-08-06 1980-04-24 Agfa-Gevaert Ag, 5090 Leverkusen Verfahren und Vorrichtung zur selbsttätigen Filmpositionierung in Mikrofilm- und Rückvergrößerungsgeräten
CS160721B1 (enrdf_load_stackoverflow) * 1973-05-29 1975-05-04
US4027246A (en) * 1976-03-26 1977-05-31 International Business Machines Corporation Automated integrated circuit manufacturing system
US4124290A (en) * 1977-05-04 1978-11-07 Bell & Howell Company System for interfacing an automatic processing machine with a stack of documents which it is processing
JPS5577434A (en) * 1978-11-27 1980-06-11 Nissan Motor Co Ltd Car assembly control system
GB2049994B (en) * 1979-05-21 1983-08-03 Rca Corp Method for assembly in a crt
DE3027410A1 (de) * 1980-07-19 1982-02-18 Schering Ag, 1000 Berlin Und 4619 Bergkamen Verfahren zur eingabe von informationen an galvanisieranlagen, sowie zugehoerige ware und vorrichtung
US4442188A (en) * 1981-01-02 1984-04-10 Amdahl Corporation System for specifying critical dimensions, sequence numbers and revision levels on integrated circuit photomasks
US4389117A (en) * 1981-05-21 1983-06-21 Consolidated Micrographics, Inc. Microfiche separator and transport apparatus
DE3220009A1 (de) * 1982-05-27 1983-12-01 Johann 8904 Friedberg Tiefel Passer-saug-lochplatte
DE3233318A1 (de) * 1982-09-08 1984-03-08 Agfa-Gevaert Ag, 5090 Leverkusen Verfahren zur herstellung eines zusammengehoerigen kopiensatzes mittels eines optischen kopiergeraetes und geraet zur durchfuehrung des verfahrens

Also Published As

Publication number Publication date
DE3514988A1 (de) 1986-10-30
DE3514988C2 (enrdf_load_stackoverflow) 1988-06-09
GB2174215A (en) 1986-10-29
GB8510262D0 (en) 1985-05-30

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930423