GB202018229D0 - An out-of-plane open-loop accelerometer based on surface plasmon and corresponding method - Google Patents

An out-of-plane open-loop accelerometer based on surface plasmon and corresponding method

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Publication number
GB202018229D0
GB202018229D0 GBGB2018229.1A GB202018229A GB202018229D0 GB 202018229 D0 GB202018229 D0 GB 202018229D0 GB 202018229 A GB202018229 A GB 202018229A GB 202018229 D0 GB202018229 D0 GB 202018229D0
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GB
United Kingdom
Prior art keywords
surface plasmon
corresponding method
accelerometer based
plane open
loop accelerometer
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GBGB2018229.1A
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GB2594765A (en
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Northwestern Polytechnical University
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Northwestern Polytechnical University
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Publication of GB202018229D0 publication Critical patent/GB202018229D0/en
Publication of GB2594765A publication Critical patent/GB2594765A/en
Pending legal-status Critical Current

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GB2018229.1A 2019-11-19 2020-11-19 An out-of-plane open-loop accelerometer based on surface plasmon and corresponding method Pending GB2594765A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911130667.2A CN110865204B (en) 2019-11-19 2019-11-19 Open-loop type out-of-plane acceleration sensor and method based on surface plasmons

Publications (2)

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GB202018229D0 true GB202018229D0 (en) 2021-01-06
GB2594765A GB2594765A (en) 2021-11-10

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GB (1) GB2594765A (en)

Cited By (1)

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CN113048887A (en) * 2021-03-03 2021-06-29 西北工业大学 Out-of-plane displacement sensing unit based on four-region equal-linewidth phase modulation grating

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CN116148499A (en) * 2023-04-20 2023-05-23 中北大学 Force feedback high-sensitivity MOEMS integrated acceleration sensor
CN116887662B (en) * 2023-09-06 2023-11-17 中北大学 Silicon-based lithium niobate piezoelectric vibration sensor based on transmission beam structure and preparation method thereof

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JP2008114198A (en) * 2006-11-08 2008-05-22 Yoshinobu Hayashi Treatment method of waste gypsum
CN101580223B (en) * 2009-06-18 2011-04-27 大连理工大学 Manufacturing method of a piezoelectric micro-cantilever beam probe
CN101788267B (en) * 2010-01-26 2011-06-15 浙江大学 Optical micrometric displacement sensor based on two sets of sub-wavelength gratings
CN102128953B (en) * 2010-12-10 2012-10-17 中国科学院上海微系统与信息技术研究所 Capacitive micro-acceleration sensor with symmetrically inclined folded beam structure
CN102570312A (en) * 2011-12-26 2012-07-11 南京邮电大学 Hanging resonance photonic device based on SOI material, and preparation method of same
CN102759635B (en) * 2012-07-17 2015-06-03 浙江大学 Micro-optical acceleration sensor integrated with grating piezoelectric modulation and detection method thereof
CN103175992A (en) * 2013-02-27 2013-06-26 浙江大学 Micro-optical acceleration sensor with integrated grating electro-optical effect and detection method thereof
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CN104502629B (en) * 2014-12-27 2017-05-24 中国人民解放军国防科学技术大学 Folded-beam-type high-sensitivity micro-mechanical accelerometer
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113048887A (en) * 2021-03-03 2021-06-29 西北工业大学 Out-of-plane displacement sensing unit based on four-region equal-linewidth phase modulation grating
CN113048887B (en) * 2021-03-03 2022-09-30 西北工业大学 Out-of-plane displacement sensing unit based on four-region equal-linewidth phase modulation grating

Also Published As

Publication number Publication date
GB2594765A (en) 2021-11-10
CN110865204B (en) 2020-09-25
CN110865204A (en) 2020-03-06

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