GB202018229D0 - An out-of-plane open-loop accelerometer based on surface plasmon and corresponding method - Google Patents
An out-of-plane open-loop accelerometer based on surface plasmon and corresponding methodInfo
- Publication number
- GB202018229D0 GB202018229D0 GBGB2018229.1A GB202018229A GB202018229D0 GB 202018229 D0 GB202018229 D0 GB 202018229D0 GB 202018229 A GB202018229 A GB 202018229A GB 202018229 D0 GB202018229 D0 GB 202018229D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- surface plasmon
- corresponding method
- accelerometer based
- plane open
- loop accelerometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911130667.2A CN110865204B (en) | 2019-11-19 | 2019-11-19 | Open-loop type out-of-plane acceleration sensor and method based on surface plasmons |
Publications (2)
Publication Number | Publication Date |
---|---|
GB202018229D0 true GB202018229D0 (en) | 2021-01-06 |
GB2594765A GB2594765A (en) | 2021-11-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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GB2018229.1A Pending GB2594765A (en) | 2019-11-19 | 2020-11-19 | An out-of-plane open-loop accelerometer based on surface plasmon and corresponding method |
Country Status (2)
Country | Link |
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CN (1) | CN110865204B (en) |
GB (1) | GB2594765A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113048887A (en) * | 2021-03-03 | 2021-06-29 | 西北工业大学 | Out-of-plane displacement sensing unit based on four-region equal-linewidth phase modulation grating |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116148499A (en) * | 2023-04-20 | 2023-05-23 | 中北大学 | Force feedback high-sensitivity MOEMS integrated acceleration sensor |
CN116887662B (en) * | 2023-09-06 | 2023-11-17 | 中北大学 | Silicon-based lithium niobate piezoelectric vibration sensor based on transmission beam structure and preparation method thereof |
Family Cites Families (18)
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JP2008114198A (en) * | 2006-11-08 | 2008-05-22 | Yoshinobu Hayashi | Treatment method of waste gypsum |
CN101580223B (en) * | 2009-06-18 | 2011-04-27 | 大连理工大学 | Manufacturing method of a piezoelectric micro-cantilever beam probe |
CN101788267B (en) * | 2010-01-26 | 2011-06-15 | 浙江大学 | Optical micrometric displacement sensor based on two sets of sub-wavelength gratings |
CN102128953B (en) * | 2010-12-10 | 2012-10-17 | 中国科学院上海微系统与信息技术研究所 | Capacitive micro-acceleration sensor with symmetrically inclined folded beam structure |
CN102570312A (en) * | 2011-12-26 | 2012-07-11 | 南京邮电大学 | Hanging resonance photonic device based on SOI material, and preparation method of same |
CN102759635B (en) * | 2012-07-17 | 2015-06-03 | 浙江大学 | Micro-optical acceleration sensor integrated with grating piezoelectric modulation and detection method thereof |
CN103175992A (en) * | 2013-02-27 | 2013-06-26 | 浙江大学 | Micro-optical acceleration sensor with integrated grating electro-optical effect and detection method thereof |
CN104166015B (en) * | 2014-08-15 | 2016-08-24 | 浙江大学 | Based on single chip integrated high accuracy, wide range optics NEMS micro-acceleration gauge |
CN104502629B (en) * | 2014-12-27 | 2017-05-24 | 中国人民解放军国防科学技术大学 | Folded-beam-type high-sensitivity micro-mechanical accelerometer |
CN105182000B (en) * | 2015-05-30 | 2018-05-22 | 浙江大学 | Three optical path signal compensation systems and its method in optical MEMS accelerometer |
CN105353166A (en) * | 2015-11-24 | 2016-02-24 | 西安交通大学 | Low lateral effect micro piezoelectric acceleration sensor chip, and manufacturing method of the same |
CN105372449B (en) * | 2015-12-03 | 2018-12-07 | 浙江大学 | Inhibit the micro-machine acceleration sensitive structure and its manufacturing method of crosstalk in high-precise uniaxial optics micro-acceleration gauge |
CN105514258A (en) * | 2015-12-10 | 2016-04-20 | 上海集成电路研发中心有限公司 | Piezoelectric cantilever beam sensor structure and manufacturing method thereof |
CN105858585B (en) * | 2016-05-18 | 2018-02-16 | 浙江大学 | Sensitive structure, accelerometer and the manufacture method of superelevation acceleration displacement sensitivity |
CN106841679B (en) * | 2017-01-11 | 2023-07-28 | 浙江大学 | High-precision micro-optical electromechanical system accelerometer resistant to large impact |
CN108588819B (en) * | 2018-04-24 | 2020-10-30 | Fd3M公司 | Microwave plasma chemical vapor deposition device and method for synthesizing diamond |
CN110329982B (en) * | 2019-07-31 | 2022-09-13 | 西北工业大学 | In-plane accelerometer based on rotating folding beam and nano optical resonant cavity and method |
CN110360935B (en) * | 2019-07-31 | 2020-05-12 | 西北工业大学 | In-plane displacement sensing unit and method based on simplified optical nano resonant cavity |
-
2019
- 2019-11-19 CN CN201911130667.2A patent/CN110865204B/en active Active
-
2020
- 2020-11-19 GB GB2018229.1A patent/GB2594765A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113048887A (en) * | 2021-03-03 | 2021-06-29 | 西北工业大学 | Out-of-plane displacement sensing unit based on four-region equal-linewidth phase modulation grating |
CN113048887B (en) * | 2021-03-03 | 2022-09-30 | 西北工业大学 | Out-of-plane displacement sensing unit based on four-region equal-linewidth phase modulation grating |
Also Published As
Publication number | Publication date |
---|---|
GB2594765A (en) | 2021-11-10 |
CN110865204B (en) | 2020-09-25 |
CN110865204A (en) | 2020-03-06 |
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