KR102291610B9 - Force sensor and method for manufacturing the force sensor - Google Patents

Force sensor and method for manufacturing the force sensor

Info

Publication number
KR102291610B9
KR102291610B9 KR20190167206A KR20190167206A KR102291610B9 KR 102291610 B9 KR102291610 B9 KR 102291610B9 KR 20190167206 A KR20190167206 A KR 20190167206A KR 20190167206 A KR20190167206 A KR 20190167206A KR 102291610 B9 KR102291610 B9 KR 102291610B9
Authority
KR
South Korea
Prior art keywords
force sensor
manufacturing
sensor
force
Prior art date
Application number
KR20190167206A
Other languages
Korean (ko)
Other versions
KR102291610B1 (en
KR20210076301A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1020190167206A priority Critical patent/KR102291610B1/en
Publication of KR20210076301A publication Critical patent/KR20210076301A/en
Application granted granted Critical
Publication of KR102291610B1 publication Critical patent/KR102291610B1/en
Publication of KR102291610B9 publication Critical patent/KR102291610B9/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
KR1020190167206A 2019-12-13 2019-12-13 Force sensor and method for manufacturing the force sensor KR102291610B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020190167206A KR102291610B1 (en) 2019-12-13 2019-12-13 Force sensor and method for manufacturing the force sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020190167206A KR102291610B1 (en) 2019-12-13 2019-12-13 Force sensor and method for manufacturing the force sensor

Publications (3)

Publication Number Publication Date
KR20210076301A KR20210076301A (en) 2021-06-24
KR102291610B1 KR102291610B1 (en) 2021-08-23
KR102291610B9 true KR102291610B9 (en) 2021-10-27

Family

ID=76607439

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190167206A KR102291610B1 (en) 2019-12-13 2019-12-13 Force sensor and method for manufacturing the force sensor

Country Status (1)

Country Link
KR (1) KR102291610B1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101266210B1 (en) * 2011-09-22 2013-05-21 성균관대학교산학협력단 Six-axis sensor measuring power and torque
KR101470160B1 (en) 2013-05-29 2014-12-08 성균관대학교산학협력단 Plate type force/torque sensor
KR101653914B1 (en) * 2015-03-11 2016-09-05 성균관대학교산학협력단 Force sensor and multyaxial force/torque sensor using the same

Also Published As

Publication number Publication date
KR102291610B1 (en) 2021-08-23
KR20210076301A (en) 2021-06-24

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Legal Events

Date Code Title Description
E701 Decision to grant or registration of patent right
G170 Publication of correction