CN116148499A - Force feedback high-sensitivity MOEMS integrated acceleration sensor - Google Patents
Force feedback high-sensitivity MOEMS integrated acceleration sensor Download PDFInfo
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- CN116148499A CN116148499A CN202310422641.5A CN202310422641A CN116148499A CN 116148499 A CN116148499 A CN 116148499A CN 202310422641 A CN202310422641 A CN 202310422641A CN 116148499 A CN116148499 A CN 116148499A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
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Abstract
The invention belongs to the technical field of sensors, and particularly relates to a force feedback high-sensitivity MOEMS integrated acceleration sensor which solves the requirements of the force feedback high-sensitivity MOEMS integrated acceleration sensor on a low-rigidity and anti-transverse interference mechanical sensitive structure and a high-performance force feedback mode. The invention combines the low-rigidity mechanical sensitive structure with the optical detection technology, improves the sensitivity of the acceleration sensor, the transverse sensitivity of the cantilever Liang Jianxiao which is arranged in a rotationally symmetrical way, the designed coil and the permanent magnet can provide larger electromagnetic force, the feedback electromagnetic force and the input current are in a linear relation, so that the mass block is maintained at the original position, and the sensor has good stability and electromagnetic interference resistance and can detect acceleration signals with high precision.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a force feedback high-sensitivity MOEMS integrated acceleration sensor.
Background
Acceleration sensors are used in a variety of fields including inertial navigation and positioning, seismic detection, spacecraft micro-vibration detection, and automotive control and safety systems, which require acceleration sensors to be resistant to lateral acceleration disturbances, large linear range output, and excellent sensitivity performance. The MEMS (micro electro mechanical system) in the last 80 th century is widely studied at home and abroad after being proposed, and the MEMS acceleration sensor has the advantages of small volume, light weight, low power consumption, low cost, easy integration and the like, and the high-performance MEMS accelerometer starts to enter the field of precision measurement. For example, an optical MEMS microseismic instrument developed by Silicon Audio company in the United states, the detection level can reach 3ng +.
Hz; high-performance microseismic instrument developed by the university of imperial technology in the united kingdom and used for Mars geological detection, which has a self-noise of 0.25 ng/-j>
Hz@1Hz。
As the MOEMS sensor fuses MEMS and optical detection technology, the sensor has the advantages of small volume, high sensitivity, electromagnetic interference resistance and the like. The mechanical sensitive structure is an important component of the sensor, the performance of the mechanical sensitive structure has a decisive meaning on the measurement level of the sensor, the weight of the proof mass needs to be increased and the rigidity of the cantilever beam needs to be reduced in order to improve the sensitivity of the sensor, the thickness of the cantilever beam is designed to be very thick in order to reduce the surface area of the mass, the rigidity of the cantilever beam in the sensitive direction is reduced by reducing the thickness and increasing the length, and the width of the cantilever beam is far greater than the thickness of the cantilever beam in order to improve the capability of resisting the transverse input acceleration. The feedback implementation mode of the acceleration sensor mainly comprises PZT driving, electrostatic force driving and electromagnetic force driving, wherein the PZT driving is large in general volume, is not beneficial to miniaturization, and the input voltage of the electrostatic force driving and the acceleration are in a secondary relation, so that nonlinear errors are easy to generate; the electromagnetic force drive realizes feedback control by generating electromagnetic force through the electrified coil and the permanent magnet, the acceleration and the input current are easy to control in one-time relation, and the electromagnetic drive can provide larger feedback force, so that the weight of a mass block can be increased when the sensitive head (the mass block-the cantilever beam) is designed, and the sensor precision is effectively improved.
Disclosure of Invention
The invention aims to solve the requirements of a MOEMS acceleration sensor on a low-rigidity, anti-transverse interference mechanical sensitive structure and a high-performance force feedback mode, and designs a force feedback high-sensitivity MOEMS integrated acceleration sensor.
The invention is realized by adopting the following technical scheme: the utility model provides a high sensitivity MOEMS integrated acceleration sensor of force feedback, which comprises an outer shell, mechanical sensitive structure and optical detection module, wherein mechanical sensitive structure includes mass and cantilever beam, optical detection module includes reflective film, the grating, the glass plane, photoelectric detector, laser instrument and basement, the one end and the mass of cantilever beam are fixed, the other end is then fixed with the outer shell, the cantilever beam is with the mass suspension inside the outer shell, reflective film is fixed at the lower surface of mass, the glass plane is fixed in the outer shell and is located the below of mass, the grating is fixed on the glass plane, the basement is fixed in the outer shell bottom, photoelectric detector, laser instrument is all fixed in on the basement.
Working principle:
the light source is emitted upwards by the laser and then is incident on the surface of the vertical grating, one part of light is reflected by the reflecting film at the bottom of the mass block through the glass plane, the other part of light is reflected by the grating, interference is generated after the two parts of light are overlapped to form an interference light signal, and the interference light signal is received by the photoelectric detector and is converted into an electric signal. When the acceleration sensor moves along with the acceleration of the device to be detected, the mass block generates displacement along the axial direction of the acceleration sensor, the optical path of the light reflected by the reflecting film changes, the formed interference light signal changes, the changed interference light signal is received by the photoelectric detector and is converted into a changed electric signal, and the acceleration value can be measured according to the photoelectric signal.
The force feedback high-sensitivity MOEMS integrated acceleration sensor comprises L-shaped end parts at two ends and a multi-fold snake-shaped beam in the middle, wherein the multi-fold snake-shaped beam is used for connecting the L-shaped end parts at two ends, a plurality of cantilever beams are staggered up and down and are respectively crossed and arranged around a mass block. The L-shaped end part of the cantilever beam saves space, in addition, the multi-fold snake-shaped beam has smaller rigidity, the stress at the fold can be released, the integral stress of the beam is reduced, and the sensitivity of the acceleration sensor is improved.
The force feedback high-sensitivity MOEMS integrated acceleration sensor has the advantages that the included angles between every two cantilever beams are equal, the cantilever beams are identical in shape and size, the two cantilever beams are distributed around the edge of the mass block in a two-layer rotation mode, and the upper cantilever beam and the lower cantilever beam are rotationally symmetrical. Rotationally symmetrically placed cantilever beams are advantageous for reducing non-axial sensitivity.
The force feedback high-sensitivity MOEMS integrated acceleration sensor further comprises an electromagnetic feedback part, wherein the electromagnetic feedback part comprises a permanent magnet and a circular coil, the permanent magnet is fixed at the inner top of the outer shell, the circular coil is fixed on the upper surface of the mass block, and the permanent magnet is arranged above the mass block. When the acceleration is detected, the mass block generates displacement, and after the detection is finished, the mass block needs to be reset, so that corresponding current is input into the circular coil according to the changed electric signal, the circular coil generates electromagnetism, the permanent magnet generates attractive force or repulsive force to the circular coil, the mass block is brought back to the original position, and finally high-precision detection of the acceleration is realized.
The invention has the beneficial effects that:
by combining MEMS and optical detection technology, the accuracy of the sensor is improved, and the influence of electromagnetic interference on the sensor is effectively reduced;
the acceleration-displacement sensitivity is effectively improved through the large weight mass block and the low-rigidity cantilever beam, so that the sensitivity of the sensor is improved;
by means of electromagnetic force feedback, larger feedback force can be provided, the linear measurement range of the sensor can be effectively enlarged, and the closed loop detection precision of the optical acceleration sensor is improved.
Drawings
Fig. 1 is a schematic diagram of a MOEMS acceleration sensor.
Fig. 2 is a schematic view of a permanent magnet.
FIG. 3 is a schematic diagram of a mechanically sensitive structure, a circular coil, and a reflective film.
Fig. 4 is a schematic view of a grating and a glass substrate.
Fig. 5 is a schematic diagram of a laser and photodetector.
In the figure: 1-outer shell, 2-permanent magnet, 3-round coil, 4-mass block, 5-cantilever beam, 6-reflecting film, 7-grating, 8-glass plane, 9-optical signal, 10-photoelectric detector, 11-laser and 12-substrate.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Referring to fig. 1-5, the present invention provides a technical solution: the integrated acceleration sensor comprises an outer shell 1, an electromagnetic feedback part, a mechanical sensitive structure and an optical detection module, wherein the electromagnetic feedback part consists of a permanent magnet 2 and a circular coil 3, the mechanical sensitive structure comprises a mass block 4 and a cantilever beam 5, and the optical detection module consists of a reflecting film 6, a grating 7, a glass plane 8, a photoelectric detector 10, a laser 11 and a substrate 12.
The permanent magnet 2 of the electromagnetic feedback part is cylindrical and magnetized along the axial direction of the acceleration sensor and is used for providing a required magnetic field, and the permanent magnet 2 is fixed at the inner top of the outer shell 1; the circular coil 3 is electrified, the electromagnetic force direction and the electromagnetic force are controlled by changing the electrified current, and the circular coil 3 is fixed on the upper surface of the mass block 4.
The upper surface and the lower surface of the mass block 4 of the mechanical sensitive structure are hexagonal, and after the acceleration sensor axially inputs acceleration, the mass block 4 axially moves along the acceleration sensor due to the action of inertia force, so that the acceleration-displacement conversion is realized; the cantilever beams 5 comprise L-shaped end parts at two ends and four middle reverse-folded snake-shaped beams, the L-shaped end parts at the two ends are connected by the four reverse-folded snake-shaped beams, six cantilever beams 5 are arranged up and down in a staggered and rotating mode around the mass block 4 respectively, one end of each cantilever beam 5 is fixed with the mass block 4, and the other end of each cantilever beam 5 is fixed with the outer shell 1.
The optical detection module realizes measurement by utilizing a Michael interference technology, the reflection film 6 is a layer of metal film and is used for reflecting light reaching the bottom of the mass block 4, and the reflection film 6 is fixed on the lower surface of the mass block 4; the grating 7 is a metal grating for forming a diffraction field; the glass plane 8 is used as a substrate of the grating 7, is fixed in the outer shell 1 and is positioned below the mass block 4, and the grating 7 is fixed on the glass plane 8; the optical signal 9 includes a 0-order interference optical signal, ±1-order optical signal, and a light source signal; the photodetector 10 converts the + -1-level optical signal into an electrical signal.
The light source is emitted upwards by the laser 11 and then enters the surface of the vertical grating, one part of the light is reflected by the reflecting film 6 at the bottom of the mass block 4 through the glass plane 8, the other part of the light is reflected by the grating 7, and interference occurs after the two parts of light are overlapped to form an interference light signal (+/-1 level light signal), and the interference light signal is received by the photoelectric detector 10 and converted into an electric signal. When the mass block 4 is displaced along the axial direction of the acceleration sensor, the optical path of the light reflected by the reflecting film 6 is changed, the formed interference light signal is changed, the changed interference light signal is received by the photoelectric detector 10 and is converted into a changed electric signal, and the acceleration value can be measured according to the photoelectric signal. According to the changed electric signals, corresponding current is input into the circular coil 3, the circular coil generates electromagnetism, the permanent magnet 2 generates attractive force or repulsive force to the circular coil 3, the mass block 4 is brought back to the original position, and finally high-precision detection of acceleration is achieved.
The substrate 12 is fixed at the bottom of the outer casing 1, and the photodetector 10 and the laser 11 are both fixed on the substrate 12.
The permanent magnet 2 and the circular coil 3 are used for balancing inertial force by controlling electromagnetic force through input current, so that the mass block 4 is always maintained at an original position after acceleration is detected.
The round coil 3 is at least two layers of coils, an insulating layer is arranged between each layer of coils, and the coil ends are communicated.
The included angles among the cantilever beams 5 are equal, the shape and the size of each cantilever beam are equal, the cantilever beams are distributed around the edge of the mass block 4 in two layers, and the upper cantilever beam 5 and the lower cantilever beam 5 have rotational symmetry.
In summary, due to the adoption of the technical scheme, the beneficial effects of the invention are as follows:
by combining MEMS and optical detection technology, the accuracy of the sensor is improved, and the influence of electromagnetic interference on the sensor is effectively reduced. The acceleration-displacement sensitivity is effectively improved through the large weight block 4 and the low-rigidity cantilever beam 5, so that the sensitivity of the sensor is improved. By means of electromagnetic force feedback, larger feedback force can be provided, the linear measurement range of the sensor can be effectively enlarged, and the closed loop detection precision of the optical acceleration sensor is improved.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (5)
1. A force feedback high-sensitivity MOEMS integrated acceleration sensor is characterized in that: including external casing (1), machinery sensitive structure and optical detection module, wherein machinery sensitive structure includes quality piece (4) and cantilever beam (5), optical detection module includes reflection film (6), grating (7), glass plane (8), photoelectric detector (10), laser instrument (11) and basement (12), the one end and the quality piece (4) of cantilever beam (5) are fixed, the other end then is fixed with external casing (1), cantilever beam (5) are with quality piece (4) suspension at the inside of external casing (1), reflection film (6) are fixed at the lower surface of quality piece (4), glass plane (8) are fixed in external casing (1) and are located the below of quality piece (4), grating (7) are fixed on glass plane (8), basement (12) are fixed in external casing (1) bottom, photoelectric detector (10), laser instrument (11) are all fixed on basement (12).
2. The force feedback high sensitivity MOEMS integrated acceleration sensor of claim 1, wherein: the cantilever beams (5) comprise L-shaped end parts at two ends and a plurality of middle reverse-folded snake-shaped beams, the L-shaped end parts at the two ends are connected by the reverse-folded snake-shaped beams, the cantilever beams (5) are multiple, and the cantilever beams (5) are layered, staggered in pairs and rotationally arranged around the mass block (4).
3. The force feedback high sensitivity MOEMS integrated acceleration sensor of claim 2, wherein: the included angles between every two cantilever beams (5) are equal, the cantilever beams (5) are identical in shape and size, the two cantilever beams are distributed around the edge of the mass block (4) in two layers, and the upper cantilever beam (5) and the lower cantilever beam (5) have rotational symmetry.
4. A force feedback high sensitivity MOEMS integrated acceleration sensor according to claim 3, characterized in that: the electromagnetic feedback part comprises a permanent magnet (2) and a circular coil (3), wherein the permanent magnet (2) is fixed at the inner top of the outer shell (1), the circular coil (3) is fixed on the upper surface of the mass block (4), and the permanent magnet (2) is arranged above the mass block (4).
5. The force feedback high sensitivity MOEMS integrated acceleration sensor of claim 4, wherein: the circular coil (3) is at least two layers of coils, an insulating layer is arranged between each layer of coils, and the coil ends are communicated.
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| CN202310422641.5A CN116148499A (en) | 2023-04-20 | 2023-04-20 | Force feedback high-sensitivity MOEMS integrated acceleration sensor |
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| CN202310422641.5A CN116148499A (en) | 2023-04-20 | 2023-04-20 | Force feedback high-sensitivity MOEMS integrated acceleration sensor |
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Citations (8)
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-
2023
- 2023-04-20 CN CN202310422641.5A patent/CN116148499A/en active Pending
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| CN109870592A (en) * | 2019-03-20 | 2019-06-11 | 北京航空航天大学 | A kind of optical accelerometer based on electromagnetism power drive |
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