CN112394197A - Pendulum accelerometer - Google Patents
Pendulum accelerometer Download PDFInfo
- Publication number
- CN112394197A CN112394197A CN202011230890.7A CN202011230890A CN112394197A CN 112394197 A CN112394197 A CN 112394197A CN 202011230890 A CN202011230890 A CN 202011230890A CN 112394197 A CN112394197 A CN 112394197A
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- Prior art keywords
- damper
- pendulum
- magnetic
- magnetic steel
- torquer
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- 229910000831 Steel Inorganic materials 0.000 claims abstract description 41
- 239000010959 steel Substances 0.000 claims abstract description 41
- 230000003287 optical effect Effects 0.000 claims abstract description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000006073 displacement reaction Methods 0.000 claims abstract description 22
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 22
- 239000010703 silicon Substances 0.000 claims abstract description 22
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910000828 alnico Inorganic materials 0.000 claims description 2
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 claims description 2
- 229910001004 magnetic alloy Inorganic materials 0.000 claims description 2
- 239000000696 magnetic material Substances 0.000 claims description 2
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
- 230000005415 magnetization Effects 0.000 claims 1
- 230000001133 acceleration Effects 0.000 abstract description 13
- 238000013016 damping Methods 0.000 abstract description 11
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 description 7
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 235000015842 Hesperis Nutrition 0.000 description 1
- 235000012633 Iberis amara Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Geophysics And Detection Of Objects (AREA)
Abstract
The invention discloses a pendulum accelerometer, the core of which comprises a silicon pendulum plate (1), a torquer, an optical displacement sensor and an electromagnetic damper, wherein the torquer comprises a magnetic steel (3), a magnetic conduction cap (4) and a torquer coil (5), the torquer coil (5) is fixed on the lower surface of the silicon pendulum piece (1) and is positioned in an annular gap between the magnetic conduction cap (4), the magnetic steel (3) and the base (2), a movable optical window (10) of the optical displacement sensor is fixed on the swinging sheet (1), and is arranged between the light source (12) and the photoelectric receiver (11), the electromagnetic damper comprises a damper magnetic steel (7), a damper magnetic conduction cap (8) and a damper coil (6), the damper coil (6) is fixed on the upper surface of the silicon wobble plate (1), and is positioned in the annular gap between the damper magnetic steel (7), the damper magnetic guide cap (8) and the upper cover (9). The invention realizes acceleration measurement with smaller dynamic error under high dynamic condition by combining the optical flexible pendulum accelerometer and the electromagnetic damping technology.
Description
Technical Field
The invention belongs to the technical field of high-precision instruments and meters, and particularly relates to a pendulum accelerometer.
Background
The accelerometer is an instrument for measuring the linear acceleration of a moving carrier and is one of core devices of an inertial navigation system. In the field of high-precision inertial navigation, the accelerometer product which is most widely applied still takes a pendulum type accelerometer as a main part, has the advantages of simple structure, small volume, long service life, high precision and sensitivity, small temperature coefficient, stable performance and the like, and is widely applied to inertial navigation systems of airplanes, missiles, rockets, ships and vehicles, and the fields of dip angle measurement and earthquake monitoring of oil drilling, buildings and dams and the like.
In the existing pendulum accelerometer, a pendulum piece and a fixed pole plate form a differential capacitance displacement sensor, when an external acceleration signal is input, the pendulum piece swings under the action of inertia force, so that the capacitance value of the differential capacitance displacement sensor changes, the change of differential capacitance is converted into a voltage signal through a C-V reading circuit of a servo circuit, corresponding current is fed back and output through a signal conditioning circuit and is input to a torquer coil of a permanent magnet torquer, so that balance moment is generated to counteract the inertia force generated by external inertia acceleration, the force balance of a closed-loop system is achieved, the magnitude of feedback current input to the torquer is in direct proportion to the value of input inertia acceleration, and the measurement of the acceleration is realized.
The quartz accelerometer adopts gas in a capacitor plate gap to form squeeze film damping, and restrains the oscillation motion of the flexible pendulum when a dynamic acceleration signal is input, but the squeeze film damping moment is generally less limited by the plate gap and the area, and the suppression effect on the flexible pendulum oscillation under a high dynamic environment is weaker, so that the dynamic error of the quartz accelerometer under the high dynamic environment is larger.
Disclosure of Invention
In view of the above-mentioned situation of the prior art, the present invention aims to provide a pendulum accelerometer with good dynamic performance under high dynamic conditions.
The above object of the present invention is achieved by the following technical solutions:
a pendulum accelerometer comprises a watch core, wherein the watch core comprises a silicon pendulum piece, a torquer, an optical displacement sensor and an electromagnetic damper, wherein the torquer comprises magnetic steel, a magnetic conduction cap and a torquer coil, the magnetic conduction cap is overlapped on the magnetic steel and fixed on a base together, the torquer coil is fixed on the lower surface of the silicon pendulum piece and positioned in an annular gap formed between the magnetic conduction cap and the magnetic steel as well as the base, the optical displacement sensor comprises a light source, a photoelectric receiver and a movable optical window, the movable optical window is fixed on the pendulum piece and positioned between the light source and the photoelectric receiver, the electromagnetic damper comprises a damper magnetic steel, a damper magnetic conduction cap and a damper coil, the damper magnetic steel is overlapped on the damper magnetic conduction cap and fixed on an upper cover together, the damper coil is fixed on the upper surface of the silicon pendulum piece and positioned in the annular gap formed between the damper magnetic conduction cap and the upper cover, the upper cover is fixed on the base.
The positions of the torquer and the electromagnetic damper can be exchanged, namely, the pendulum accelerometer can be as follows: the watch core comprises a silicon pendulum piece, a torquer, an optical displacement sensor and an electromagnetic damper, wherein the torquer comprises a magnetic steel, a magnetic conduction cap and a torquer coil, the magnetic conduction cap is overlapped on the magnetic steel and fixed on an upper cover together, the torquer coil is fixed on the upper surface of the silicon pendulum piece and positioned in an annular gap formed between the magnetic conduction cap and the upper cover, the optical displacement sensor comprises a light source, a photoelectric receiver and a movable optical window, the movable optical window is fixed on the pendulum piece and is arranged between the light source and the photoelectric receiver, the electromagnetic damper comprises a damper magnetic steel, a damper magnetic conduction cap and a damper coil, the damper magnetic steel is overlapped on the damper magnetic conduction cap and fixed on a base together, the damper coil is fixed on the lower surface of the silicon pendulum piece and positioned in an annular gap formed between the damper magnetic steel and the damper magnetic conduction cap and the base, the upper cover is fixed on the base.
The invention combines the optical flexible pendulum accelerometer and the electromagnetic damping technology to realize acceleration measurement with smaller dynamic error under high dynamic condition.
Drawings
Figure 1 is an exploded schematic diagram illustrating the composition of the watch core in the accelerometer of the present invention.
Detailed Description
For a clearer understanding of the objects, technical solutions and advantages of the present invention, the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.
The pendulum accelerometer of the present invention with good dynamic performance under high dynamic conditions comprises a core, which is the main working component of the pendulum accelerometer, and fig. 1 is an exploded schematic diagram illustrating the composition of the core in the accelerometer of the present invention. As shown in fig. 1, the watch movement mainly includes a silicon pendulum plate 1, a torquer (including a torquer coil 5, a magnetic steel 3 and a magnetic conduction cap 4), a base 2, an optical displacement sensor (including a movable optical window 10, a light source 12 and a photoelectric receiver 11), an electromagnetic damper (including a damper coil 6, a damper magnetic conduction cap 8 and a damper magnetic steel 7), and an upper cover 9.
The silicon pendulum plate 1 comprises flexible support beams 13, preferably two or more flexible support beams 13.
The torquer comprises a torquer coil 5, a magnetic steel 3 and a magnetic conduction cap 4, wherein the magnetic conduction cap 4 is overlapped on the magnetic steel 3 and fixed on the base 2 together, the torquer coil 5 is an open coil and fixed on the lower surface of the silicon swinging piece and is positioned in an annular gap formed between the magnetic conduction cap 4 and the magnetic steel 3 as well as the base 2, and feedback torque is provided for the swinging mass.
The optical displacement sensor comprises a light source 12, a photoelectric receiver 11 and a movable optical window 10. The movable optical window 10 is fixed on the pendulum plate 1 and is arranged between the light source 12 and the photoelectric receiver 11 for detecting the displacement of the pendulum mass.
The electromagnetic damper comprises a damper coil 6, a damper magnetic guide cap 8 and a damper magnetic steel 7, wherein the damper magnetic steel 7 is overlapped on the damper magnetic guide cap 8 and is fixed on an upper cover 9 together, the damper coil 6 is a closing coil and is fixed on the upper surface of the silicon pendulum piece 1 and positioned in an annular gap formed between the damper magnetic guide cap 8 and the upper cover 9 and the damper magnetic guide cap 7, and damping torque is provided for pendulum mass. The upper cover 9 is fixed on the base 2. The movable optical window 10, the torquer coil 5 and the damper coil 6 fixed to the silicon pendulum plate 1 constitute a pendulum mass which can swing around a flexible support beam 13.
The magnetic steel 3 and/or the damper magnetic steel 7 are preferably made of permanent magnetic materials, and samarium-cobalt alloy or alnico can be adopted. The magnetizing direction of the damper magnetic steel 7 is axial magnetizing and is opposite to the magnetizing direction of the magnetic steel 3. The magnetic steel 3 and/or the damper magnetic steel 7 can be in a truncated cone shape, a cylindrical shape or a circular ring shape. In addition, the magnetic conduction cap 4, the base 2, the damper magnetic conduction cap 8 and the upper cover 9 can adopt soft magnetic alloy materials such as 1J50, 1J22 and the like.
The pendulum mass generates displacement around the flexible supporting beam 13, the displacement of the pendulum mass is measured through the optical displacement sensor, a current signal of the displacement sensor is amplified through the servo control circuit and then is loaded on the torquer coil, the torquer coil generates electromagnetic feedback moment in an air gap magnetic field to counteract inertial force generated by external steady acceleration, force balance of a closed loop system is achieved, feedback control current loaded on the torquer coil is in direct proportion to a value of the input steady acceleration, and therefore measurement of the acceleration is achieved. When a dynamic acceleration signal is input, the pendulum mass generates displacement oscillation, the electromagnetic damper generates electromagnetic damping torque, and the damping torque is in direct proportion to the movement speed of the pendulum mass, so that the displacement oscillation of the pendulum mass can be inhibited, and the dynamic performance of the accelerometer is improved.
The existing quartz accelerometer adopts gas in a capacitor plate gap to form squeeze film damping, and restrains the oscillation motion of a flexible pendulum when a dynamic acceleration signal is input, but the squeeze film damping moment is generally limited by the plate gap and the area, and the restraint effect on the flexible pendulum oscillation under a high dynamic environment is weaker, so that the dynamic error of the quartz accelerometer under the high dynamic environment is larger.
The signal sensor of the invention adopts the optical displacement sensor to detect the displacement of the pendulum mass, can realize the angstrom-scale displacement detection resolution and is less influenced by electronic noise, mechanical thermal noise and environmental electromagnetic interference. The electromagnetic damper is adopted to realize larger damping torque, and the electromagnetic damping torque can be changed by changing the sizes of the damper magnetic steel, the damper upper cover and the damper magnetic conduction cap and the number of turns of the damper closed coil, so that the invention has stronger inhibiting effect on the flexible pendulum oscillation under the high dynamic environment, and the dynamic error under the high dynamic environment is smaller.
The above description of the embodiments is only intended to facilitate the understanding of the core ideas of the present invention. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention. For example, although in the above description, the torquer including the torquer coil 5, the magnetic steel 3 and the magnetic conductive cap 4 is located between the base 2 and the lower surface of the silicon pendulum piece, and the electromagnetic damper including the damper coil 6, the damper magnetic conductive cap 8 and the damper magnetic steel 7 is located between the upper cover 9 and the upper surface of the silicon pendulum piece 1, the positions of the torquer and the electromagnetic damper may be reversed, that is, the torquer including the torquer coil 5, the magnetic steel 3 and the magnetic conductive cap 4 is located between the upper cover 9 and the upper surface of the silicon pendulum piece 1, and the electromagnetic damper including the damper coil 6, the damper magnetic conductive cap 8 and the damper magnetic steel 7 is located between the base 2 and the lower surface of the silicon pendulum piece.
Claims (8)
1. A pendulum accelerometer comprises a watch core, wherein the watch core comprises a silicon pendulum piece (1), a torquer, an optical displacement sensor and an electromagnetic damper, the torquer comprises a magnetic steel (3), a magnetic guide cap (4) and a torquer coil (5), the magnetic guide cap (4) is overlapped on the magnetic steel (3) and fixed on a base (2) or an upper cover (9) together, the torquer coil (5) is fixed on the lower surface or the upper surface of the silicon pendulum piece (1) and positioned in an annular gap formed between the magnetic guide cap (4) and the magnetic steel (3) and the base (2) or the upper cover (9), the optical displacement sensor comprises a light source (12), a photoelectric receiver (11) and a movable optical window (10), the movable optical window (10) is fixed on the pendulum piece (1) and is arranged between the light source (12) and the photoelectric receiver (11), and the electromagnetic damper comprises a magnetic steel (7), The damper magnetic guide cap (8) and the damper coil (6) are stacked on the damper magnetic guide cap (8) and fixed on the upper cover (9) or the base (2) together, the damper coil (6) is fixed on the upper surface or the lower surface of the silicon swinging piece (1) and is positioned in an annular gap formed between the damper magnetic guide cap (8) and the upper cover (9) or the base (2), and the upper cover (9) is fixed on the base (2).
2. The pendulum accelerometer of claim 1, wherein the material of the magnetic steel (3) and/or the damper magnetic steel (7) is a permanent magnetic material.
3. The pendulum accelerometer of claim 2, wherein the material of the magnetic steel (3) and/or the damper magnetic steel (7) is samarium cobalt alloy or alnico.
4. The pendulum accelerometer of claim 1, wherein the magnetically conducting cap (4), the base (2), the damper magnetically conducting cap (8), and the top cover (9) are made of soft magnetic alloy material.
5. The pendulum accelerometer of claim 1, wherein the magnetically soft alloy material is 1J50 or 1J22 magnetically soft alloy material.
6. The pendulum accelerometer of claim 1, wherein the damper magnet (7) is magnetized axially and in a direction opposite to the magnetization direction of the magnet (3).
7. The pendulum accelerometer of claim 1, wherein the damper magnetic steel (7) structure is cone-shaped, cylindrical or ring-shaped.
8. The pendulum accelerometer of claim 1, wherein the silicon pendulum piece (1) comprises at least two flexible support beams (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011230890.7A CN112394197A (en) | 2020-11-06 | 2020-11-06 | Pendulum accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011230890.7A CN112394197A (en) | 2020-11-06 | 2020-11-06 | Pendulum accelerometer |
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| Publication Number | Publication Date |
|---|---|
| CN112394197A true CN112394197A (en) | 2021-02-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011230890.7A Pending CN112394197A (en) | 2020-11-06 | 2020-11-06 | Pendulum accelerometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113687435A (en) * | 2021-09-01 | 2021-11-23 | 中国科学院精密测量科学与技术创新研究院 | Translational gravity/acceleration measurement sensitive structure |
| CN114519930A (en) * | 2022-02-23 | 2022-05-20 | 西安中星测控有限公司 | Activation method of intelligent well lid monitoring terminal |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2708319Y (en) * | 2003-01-25 | 2005-07-06 | 高易文 | Electromagnetic damping accelerometer |
| CN101441104A (en) * | 2007-11-21 | 2009-05-27 | 中国科学院半导体研究所 | Electromagnetic damping optical fiber vibration sensor |
| CN101592678A (en) * | 2009-07-03 | 2009-12-02 | 北京航天控制仪器研究所 | A kind of flexible pendulous accelerometer |
| CN103149583A (en) * | 2013-02-05 | 2013-06-12 | 中国地震局工程力学研究所 | Rotation acceleration meter for earthquake |
| CN203455365U (en) * | 2013-09-09 | 2014-02-26 | 湖北三江航天红峰控制有限公司 | Impact-resistant quartz flexible accelerometer |
| CN107102168A (en) * | 2017-04-27 | 2017-08-29 | 青岛智腾微电子有限公司 | A kind of quartz flexible accelerometer |
| CN108507771A (en) * | 2018-04-08 | 2018-09-07 | 中国船舶重工集团公司第七0四研究所 | Passive electromagnetic damper for small torque calibration device |
| US20180306835A1 (en) * | 2016-02-25 | 2018-10-25 | Institute Of Geology And Geophysics, Chinese Academy Of Sciences | High-precision pendulous accelerometer |
| CN109541257A (en) * | 2018-11-23 | 2019-03-29 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of pendulous accelerometer |
| CN111323615A (en) * | 2020-04-05 | 2020-06-23 | 陕西领航传感技术有限公司 | Suspension wire pendulum type accelerometer |
| RU2731652C1 (en) * | 2019-03-15 | 2020-09-07 | Сергей Феодосьевич Коновалов | Pendulum compensating accelerometer |
-
2020
- 2020-11-06 CN CN202011230890.7A patent/CN112394197A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2708319Y (en) * | 2003-01-25 | 2005-07-06 | 高易文 | Electromagnetic damping accelerometer |
| CN101441104A (en) * | 2007-11-21 | 2009-05-27 | 中国科学院半导体研究所 | Electromagnetic damping optical fiber vibration sensor |
| CN101592678A (en) * | 2009-07-03 | 2009-12-02 | 北京航天控制仪器研究所 | A kind of flexible pendulous accelerometer |
| CN103149583A (en) * | 2013-02-05 | 2013-06-12 | 中国地震局工程力学研究所 | Rotation acceleration meter for earthquake |
| CN203455365U (en) * | 2013-09-09 | 2014-02-26 | 湖北三江航天红峰控制有限公司 | Impact-resistant quartz flexible accelerometer |
| US20180306835A1 (en) * | 2016-02-25 | 2018-10-25 | Institute Of Geology And Geophysics, Chinese Academy Of Sciences | High-precision pendulous accelerometer |
| CN107102168A (en) * | 2017-04-27 | 2017-08-29 | 青岛智腾微电子有限公司 | A kind of quartz flexible accelerometer |
| CN108507771A (en) * | 2018-04-08 | 2018-09-07 | 中国船舶重工集团公司第七0四研究所 | Passive electromagnetic damper for small torque calibration device |
| CN109541257A (en) * | 2018-11-23 | 2019-03-29 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of pendulous accelerometer |
| RU2731652C1 (en) * | 2019-03-15 | 2020-09-07 | Сергей Феодосьевич Коновалов | Pendulum compensating accelerometer |
| CN111323615A (en) * | 2020-04-05 | 2020-06-23 | 陕西领航传感技术有限公司 | Suspension wire pendulum type accelerometer |
Non-Patent Citations (2)
| Title |
|---|
| 张国良: "《组合导航原理与技术》", 西安交通大学出版社, pages: 58 * |
| 王错等: "石英挠性加速度计的压膜阻尼分析", 《电子测量与仪器学报》, no. 02, 15 February 2016 (2016-02-15), pages 218 - 224 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113687435A (en) * | 2021-09-01 | 2021-11-23 | 中国科学院精密测量科学与技术创新研究院 | Translational gravity/acceleration measurement sensitive structure |
| CN113687435B (en) * | 2021-09-01 | 2023-08-04 | 中国科学院精密测量科学与技术创新研究院 | Translational gravity/acceleration measurement sensitive structure |
| CN114519930A (en) * | 2022-02-23 | 2022-05-20 | 西安中星测控有限公司 | Activation method of intelligent well lid monitoring terminal |
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Application publication date: 20210223 |