GB1597192A - High-pressure high-temperature gaseous chemical apparatus and method - Google Patents

High-pressure high-temperature gaseous chemical apparatus and method Download PDF

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Publication number
GB1597192A
GB1597192A GB8277/78A GB827778A GB1597192A GB 1597192 A GB1597192 A GB 1597192A GB 8277/78 A GB8277/78 A GB 8277/78A GB 827778 A GB827778 A GB 827778A GB 1597192 A GB1597192 A GB 1597192A
Authority
GB
United Kingdom
Prior art keywords
reaction chamber
pressure
gas
chamber
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8277/78A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atomel Corp
Original Assignee
Atomel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomel Corp filed Critical Atomel Corp
Publication of GB1597192A publication Critical patent/GB1597192A/en
Expired legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6304—Formation by oxidation, e.g. oxidation of the substrate
    • H10P14/6306—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials
    • H10P14/6308—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors
    • H10P14/6309—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors of silicon in uncombined form, i.e. pure silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6322—Formation by thermal treatments

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
GB8277/78A 1977-03-09 1978-03-02 High-pressure high-temperature gaseous chemical apparatus and method Expired GB1597192A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/775,963 US4167915A (en) 1977-03-09 1977-03-09 High-pressure, high-temperature gaseous chemical apparatus

Publications (1)

Publication Number Publication Date
GB1597192A true GB1597192A (en) 1981-09-03

Family

ID=25106067

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8277/78A Expired GB1597192A (en) 1977-03-09 1978-03-02 High-pressure high-temperature gaseous chemical apparatus and method

Country Status (6)

Country Link
US (1) US4167915A (cg-RX-API-DMAC10.html)
JP (1) JPS53112064A (cg-RX-API-DMAC10.html)
DE (1) DE2810492A1 (cg-RX-API-DMAC10.html)
FR (1) FR2382931A1 (cg-RX-API-DMAC10.html)
GB (1) GB1597192A (cg-RX-API-DMAC10.html)
NL (1) NL190770C (cg-RX-API-DMAC10.html)

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US4268538A (en) * 1977-03-09 1981-05-19 Atomel Corporation High-pressure, high-temperature gaseous chemical method for silicon oxidation
US4275094A (en) * 1977-10-31 1981-06-23 Fujitsu Limited Process for high pressure oxidation of silicon
JPS5923412Y2 (ja) * 1979-03-08 1984-07-12 テルサ−ムコ株式会社 半導体熱処理装置用キヤツプ装着装置
US4278705A (en) * 1979-11-08 1981-07-14 Bell Telephone Laboratories, Incorporated Sequentially annealed oxidation of silicon to fill trenches with silicon dioxide
US4253417A (en) * 1980-02-21 1981-03-03 Thermco Products Corporation Closure for thermal reactor
US4315479A (en) * 1980-06-27 1982-02-16 Atomel Corporation Silicon wafer steam oxidizing apparatus
JPS5754331A (cg-RX-API-DMAC10.html) * 1980-08-11 1982-03-31 Western Electric Co
JPS5772318A (en) * 1980-10-24 1982-05-06 Seiko Epson Corp Vapor growth method
US4351805A (en) * 1981-04-06 1982-09-28 International Business Machines Corporation Single gas flow elevated pressure reactor
US4488506A (en) * 1981-06-18 1984-12-18 Itt Industries, Inc. Metallization plant
US4376796A (en) * 1981-10-27 1983-03-15 Thermco Products Corporation Processing silicon wafers employing processing gas atmospheres of similar molecular weight
US4427378A (en) 1982-03-29 1984-01-24 Atomel Corporation Closure and seal construction for high-pressure oxidation furnace and the like
US4420503A (en) * 1982-05-17 1983-12-13 Rca Corporation Low temperature elevated pressure glass flow/re-flow process
JPS5977289A (ja) * 1982-10-26 1984-05-02 ウシオ電機株式会社 光照射炉
JPS5982731A (ja) * 1982-11-04 1984-05-12 Toshiba Corp ウエハ水蒸気酸化装置
US4518623A (en) * 1982-11-24 1985-05-21 Riley Thomas J Polymeric film coating method with continuous deposition pressure control
US4495889A (en) * 1982-11-24 1985-01-29 Riley Thomas J Polymeric film coating apparatus
US4584205A (en) * 1984-07-02 1986-04-22 Signetics Corporation Method for growing an oxide layer on a silicon surface
US4619844A (en) * 1985-01-22 1986-10-28 Fairchild Camera Instrument Corp. Method and apparatus for low pressure chemical vapor deposition
CA1251100A (en) * 1985-05-17 1989-03-14 Richard Cloutier Chemical vapor deposition
DE3539981C1 (de) * 1985-11-11 1987-06-11 Telog Systems Gmbh Verfahren und Vorrichtung zur Behandlung von Halbleitermaterialien
JPS6317381A (ja) * 1986-07-09 1988-01-25 東邦レーヨン株式会社 炭素化炉
US5234501A (en) * 1987-09-01 1993-08-10 Tokyo Electron Sagami Limited Oxidation metod
US4854863A (en) * 1987-12-02 1989-08-08 Gas Research Institute Convective heat transfer within an industrial heat treating furnace
US4854860A (en) * 1987-12-02 1989-08-08 Gas Research Institute Convective heat transfer within an industrial heat treating furnace
US4789333A (en) * 1987-12-02 1988-12-06 Gas Research Institute Convective heat transfer within an industrial heat treating furnace
USRE36328E (en) * 1988-03-31 1999-10-05 Kabushiki Kaisha Toshiba Semiconductor manufacturing apparatus including temperature control mechanism
US4914276A (en) * 1988-05-12 1990-04-03 Princeton Scientific Enterprises, Inc. Efficient high temperature radiant furnace
US5167717A (en) * 1989-02-15 1992-12-01 Charles Boitnott Apparatus and method for processing a semiconductor wafer
US5123994A (en) * 1989-05-30 1992-06-23 Motorola, Inc. Ramped oxide formation method
US5167716A (en) * 1990-09-28 1992-12-01 Gasonics, Inc. Method and apparatus for batch processing a semiconductor wafer
US5451258A (en) * 1994-05-11 1995-09-19 Materials Research Corporation Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
JP3270852B2 (ja) * 1995-04-20 2002-04-02 東京エレクトロン株式会社 圧力調整装置及びこれを用いた部屋の連通方法
JP2867946B2 (ja) * 1996-03-13 1999-03-10 日本電気株式会社 気相成長装置
US5846888A (en) * 1996-09-27 1998-12-08 Micron Technology, Inc. Method for in-situ incorporation of desirable impurities into high pressure oxides
US6037273A (en) * 1997-07-11 2000-03-14 Applied Materials, Inc. Method and apparatus for insitu vapor generation
US6136703A (en) * 1998-09-03 2000-10-24 Micron Technology, Inc. Methods for forming phosphorus- and/or boron-containing silica layers on substrates
US6331212B1 (en) * 2000-04-17 2001-12-18 Avansys, Llc Methods and apparatus for thermally processing wafers
FI118805B (fi) * 2000-05-15 2008-03-31 Asm Int Menetelmä ja kokoonpano kaasufaasireaktantin syöttämiseksi reaktiokammioon
WO2004061265A1 (en) * 2002-12-26 2004-07-22 Baker Hughes Incorporated Alternative packer setting method
US20050175519A1 (en) 2004-02-06 2005-08-11 Rogers William A.Jr. Microchannel compression reactor
US20070187386A1 (en) * 2006-02-10 2007-08-16 Poongsan Microtec Corporation Methods and apparatuses for high pressure gas annealing
CN102760640B (zh) * 2011-04-25 2015-06-17 中国科学院微电子研究所 防止积留水液的热氧化系统和方法
US10224224B2 (en) * 2017-03-10 2019-03-05 Micromaterials, LLC High pressure wafer processing systems and related methods
US10179941B1 (en) * 2017-07-14 2019-01-15 Applied Materials, Inc. Gas delivery system for high pressure processing chamber
KR102774549B1 (ko) * 2023-09-21 2025-03-05 주식회사 에이치피에스피 고압 기상산화수소 제공 디바이스, 그리고 그를 이용하는 고압 기판 처리 장치 및 방법
US20260016231A1 (en) * 2024-04-10 2026-01-15 Hpsp Co., Ltd. Gas management assembly for substrate processing apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL289736A (cg-RX-API-DMAC10.html) * 1961-11-18
GB1081629A (en) * 1965-08-26 1967-08-31 Associated Semiconductor Mft Improvements in or relating to silicon bodies
US3446659A (en) * 1966-09-16 1969-05-27 Texas Instruments Inc Apparatus and process for growing noncontaminated thermal oxide on silicon
US3647535A (en) * 1969-10-27 1972-03-07 Ncr Co Method of controllably oxidizing a silicon wafer
US3865647A (en) * 1970-09-30 1975-02-11 Siemens Ag Method for precipitation of semiconductor material
US3907981A (en) * 1973-03-12 1975-09-23 Rockwell International Corp Method for recombining hydrogen and oxygen
US4018183A (en) * 1973-11-15 1977-04-19 U.S. Philips Corporation Apparatus for treating a plurality of semiconductor slices to a reacting gas current
JPS5337188B2 (cg-RX-API-DMAC10.html) * 1974-02-15 1978-10-06
US4018184A (en) * 1975-07-28 1977-04-19 Mitsubishi Denki Kabushiki Kaisha Apparatus for treatment of semiconductor wafer

Also Published As

Publication number Publication date
NL190770C (nl) 1994-08-01
NL190770B (nl) 1994-03-01
FR2382931A1 (fr) 1978-10-06
US4167915A (en) 1979-09-18
JPS53112064A (en) 1978-09-30
DE2810492C2 (cg-RX-API-DMAC10.html) 1987-07-02
NL7802619A (nl) 1978-09-12
DE2810492A1 (de) 1978-09-14
FR2382931B1 (cg-RX-API-DMAC10.html) 1985-02-08

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
476H Application made for correction of error (sect. 76/1949)
711G Correction allowed (sect. 117/1977)
PE20 Patent expired after termination of 20 years

Effective date: 19980301