GB1565349A - Aluminium polishing compositions - Google Patents
Aluminium polishing compositions Download PDFInfo
- Publication number
- GB1565349A GB1565349A GB42902/75A GB4290275A GB1565349A GB 1565349 A GB1565349 A GB 1565349A GB 42902/75 A GB42902/75 A GB 42902/75A GB 4290275 A GB4290275 A GB 4290275A GB 1565349 A GB1565349 A GB 1565349A
- Authority
- GB
- United Kingdom
- Prior art keywords
- polishing solution
- aluminium
- solution according
- aluminium polishing
- percent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 title claims description 59
- 239000004411 aluminium Substances 0.000 title claims description 57
- 229910052782 aluminium Inorganic materials 0.000 title claims description 57
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 57
- 239000000203 mixture Substances 0.000 title claims description 20
- 239000003112 inhibitor Substances 0.000 claims description 37
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 29
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 22
- 235000011149 sulphuric acid Nutrition 0.000 claims description 21
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 20
- 239000001117 sulphuric acid Substances 0.000 claims description 20
- 229910017604 nitric acid Inorganic materials 0.000 claims description 19
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 17
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical group C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims description 14
- -1 amino- Chemical class 0.000 claims description 13
- 125000003118 aryl group Chemical group 0.000 claims description 13
- 125000005842 heteroatom Chemical group 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical group C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 claims description 8
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical group C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 claims description 7
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- FNQJDLTXOVEEFB-UHFFFAOYSA-N 1,2,3-benzothiadiazole Chemical group C1=CC=C2SN=NC2=C1 FNQJDLTXOVEEFB-UHFFFAOYSA-N 0.000 claims description 5
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical group NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- OKEAMBAZBICIFP-UHFFFAOYSA-N 3-oxido-2,1,3-benzoxadiazol-3-ium Chemical group C1=CC=CC2=[N+]([O-])ON=C21 OKEAMBAZBICIFP-UHFFFAOYSA-N 0.000 claims description 4
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 4
- 125000000623 heterocyclic group Chemical group 0.000 claims description 4
- 239000000080 wetting agent Substances 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical class C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 claims description 2
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 claims description 2
- 150000002894 organic compounds Chemical class 0.000 claims description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 2
- 125000003785 benzimidazolyl group Chemical group N1=C(NC2=C1C=CC=C2)* 0.000 claims 2
- 125000000355 1,3-benzoxazolyl group Chemical group O1C(=NC2=C1C=CC=C2)* 0.000 claims 1
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 claims 1
- 229910021529 ammonia Inorganic materials 0.000 claims 1
- 238000007517 polishing process Methods 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 description 13
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 7
- 239000002253 acid Substances 0.000 description 6
- 238000007792 addition Methods 0.000 description 5
- KYQCOXFCLRTKLS-UHFFFAOYSA-N Pyrazine Chemical compound C1=CN=CC=N1 KYQCOXFCLRTKLS-UHFFFAOYSA-N 0.000 description 4
- 125000003545 alkoxy group Chemical group 0.000 description 4
- 125000000217 alkyl group Chemical group 0.000 description 4
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 125000001424 substituent group Chemical group 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 238000006396 nitration reaction Methods 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- GEYOCULIXLDCMW-UHFFFAOYSA-N 1,2-phenylenediamine Chemical compound NC1=CC=CC=C1N GEYOCULIXLDCMW-UHFFFAOYSA-N 0.000 description 2
- 150000000183 1,3-benzoxazoles Chemical class 0.000 description 2
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 2
- 239000005696 Diammonium phosphate Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229920000877 Melamine resin Chemical class 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- PCNDJXKNXGMECE-UHFFFAOYSA-N Phenazine Natural products C1=CC=CC2=NC3=CC=CC=C3N=C21 PCNDJXKNXGMECE-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 239000005864 Sulphur Substances 0.000 description 2
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- ILRRQNADMUWWFW-UHFFFAOYSA-K aluminium phosphate Chemical compound O1[Al]2OP1(=O)O2 ILRRQNADMUWWFW-UHFFFAOYSA-K 0.000 description 2
- 229940001007 aluminium phosphate Drugs 0.000 description 2
- 150000001555 benzenes Chemical group 0.000 description 2
- 150000001556 benzimidazoles Chemical class 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 239000004327 boric acid Substances 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 2
- 229910000388 diammonium phosphate Inorganic materials 0.000 description 2
- 235000019838 diammonium phosphate Nutrition 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- 125000001072 heteroaryl group Chemical group 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 229940018564 m-phenylenediamine Drugs 0.000 description 2
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical class NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 150000003852 triazoles Chemical class 0.000 description 2
- WOAHJDHKFWSLKE-UHFFFAOYSA-N 1,2-benzoquinone Chemical compound O=C1C=CC=CC1=O WOAHJDHKFWSLKE-UHFFFAOYSA-N 0.000 description 1
- MBIZXFATKUQOOA-UHFFFAOYSA-N 1,3,4-thiadiazole Chemical compound C1=NN=CS1 MBIZXFATKUQOOA-UHFFFAOYSA-N 0.000 description 1
- BIGYLAKFCGVRAN-UHFFFAOYSA-N 1,3,4-thiadiazolidine-2,5-dithione Chemical compound S=C1NNC(=S)S1 BIGYLAKFCGVRAN-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- WDCYWAQPCXBPJA-UHFFFAOYSA-N 1,3-dinitrobenzene Chemical compound [O-][N+](=O)C1=CC=CC([N+]([O-])=O)=C1 WDCYWAQPCXBPJA-UHFFFAOYSA-N 0.000 description 1
- RUFPHBVGCFYCNW-UHFFFAOYSA-N 1-naphthylamine Chemical class C1=CC=C2C(N)=CC=CC2=C1 RUFPHBVGCFYCNW-UHFFFAOYSA-N 0.000 description 1
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 1
- SNTWKPAKVQFCCF-UHFFFAOYSA-N 2,3-dihydro-1h-triazole Chemical compound N1NC=CN1 SNTWKPAKVQFCCF-UHFFFAOYSA-N 0.000 description 1
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical compound C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 1
- 239000005964 Acibenzolar-S-methyl Substances 0.000 description 1
- 101100283604 Caenorhabditis elegans pigk-1 gene Proteins 0.000 description 1
- SMHLYEFAQXQYGH-UHFFFAOYSA-N N1N=NC=C1.N1N=NC=C1.C1=CC=CC2=CC=CC=C12 Chemical compound N1N=NC=C1.N1N=NC=C1.C1=CC=CC2=CC=CC=C12 SMHLYEFAQXQYGH-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 1
- 239000001166 ammonium sulphate Substances 0.000 description 1
- 235000011130 ammonium sulphate Nutrition 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 125000005605 benzo group Chemical group 0.000 description 1
- 230000000711 cancerogenic effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012505 colouration Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000001268 conjugating effect Effects 0.000 description 1
- 230000021615 conjugation Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- BWFPGXWASODCHM-UHFFFAOYSA-N copper monosulfide Chemical compound [Cu]=S BWFPGXWASODCHM-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 150000002390 heteroarenes Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 125000001841 imino group Chemical group [H]N=* 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 125000000468 ketone group Chemical group 0.000 description 1
- NTNWKDHZTDQSST-UHFFFAOYSA-N naphthalene-1,2-diamine Chemical class C1=CC=CC2=C(N)C(N)=CC=C21 NTNWKDHZTDQSST-UHFFFAOYSA-N 0.000 description 1
- KXSDZNUZMPLBOT-UHFFFAOYSA-N naphthalene;2h-triazole Chemical compound C=1C=NNN=1.C1=CC=CC2=CC=CC=C21 KXSDZNUZMPLBOT-UHFFFAOYSA-N 0.000 description 1
- 150000002790 naphthalenes Chemical class 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000802 nitrating effect Effects 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 150000003216 pyrazines Chemical class 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 150000003536 tetrazoles Chemical class 0.000 description 1
- VLLMWSRANPNYQX-UHFFFAOYSA-N thiadiazole Chemical compound C1=CSN=N1.C1=CSN=N1 VLLMWSRANPNYQX-UHFFFAOYSA-N 0.000 description 1
- 150000004867 thiadiazoles Chemical group 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/02—Light metals
- C23F3/03—Light metals with acidic solutions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (12)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB42902/75A GB1565349A (en) | 1975-10-20 | 1975-10-20 | Aluminium polishing compositions |
| US05/733,508 US4116699A (en) | 1975-10-20 | 1976-10-18 | Aluminium polishing compositions |
| ES452521A ES452521A1 (es) | 1975-10-20 | 1976-10-19 | Un metodo para la preparacion de una solucion para pulimen- tacion de aluminio. |
| FR7631422A FR2328783A1 (fr) | 1975-10-20 | 1976-10-19 | Composition pour le polissage de l'aluminium comprenant un compose aromatique a hetero-atomes |
| AU18807/76A AU499284B2 (en) | 1975-10-20 | 1976-10-19 | Aluminium polishing compositions |
| BR7607034A BR7607034A (pt) | 1975-10-20 | 1976-10-20 | Composicao e processo para polimento de artigos de aluminio ou de ligas do mesmo |
| DE2647315A DE2647315C3 (de) | 1975-10-20 | 1976-10-20 | Verwendung einer Lösung zum Polieren von Aluminiumgegenständen |
| NL7611584A NL7611584A (nl) | 1975-10-20 | 1976-10-20 | Werkwijze voor het bereiden van een samenstelling voor het polijsten van aluminium. |
| JP51125062A JPS5257033A (en) | 1975-10-20 | 1976-10-20 | Aluminum polishing bath |
| IT69529/76A IT1078710B (it) | 1975-10-20 | 1976-10-20 | Composizione lucidante per alluminio |
| US05/843,599 US4251384A (en) | 1975-10-20 | 1977-10-19 | Aluminum polishing compositions |
| US06/312,482 USRE31395E (en) | 1975-10-20 | 1981-10-19 | Aluminum polishing compositions |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB42902/75A GB1565349A (en) | 1975-10-20 | 1975-10-20 | Aluminium polishing compositions |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1565349A true GB1565349A (en) | 1980-04-16 |
Family
ID=10426479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB42902/75A Expired GB1565349A (en) | 1975-10-20 | 1975-10-20 | Aluminium polishing compositions |
Country Status (10)
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4319955A (en) * | 1980-11-05 | 1982-03-16 | Philip A. Hunt Chemical Corp. | Ammoniacal alkaline cupric etchant solution for and method of reducing etchant undercut |
| JPS57164984A (en) * | 1981-04-06 | 1982-10-09 | Metsuku Kk | Exfoliating solution for tin or tin alloy |
| US4521240A (en) * | 1983-04-29 | 1985-06-04 | Chevron Research Company | 5-C-Alkyl-3-O-arylmethyl or substituted arylmethyl-1,2-O-alkylidene-α- |
| US4640713A (en) * | 1984-11-19 | 1987-02-03 | S. C. Johnson & Son, Inc. | Tarnish remover/metal polish formulation comprising a metal iodide, an acid, and water |
| US4961867A (en) * | 1985-10-15 | 1990-10-09 | The Dow Chemical Company | Process for preventing corrosion of metals by contacting them with compositions prepared from amino substituted pyrazines and carboxylic acids carboxylic acid anhydrides, carboxylic acid, esters or carboxylic acid halides |
| US4875972A (en) * | 1988-07-27 | 1989-10-24 | E. I. Du Pont De Nemours And Company | Hydrogen peroxide compositions containing a substituted oxybenzene compound |
| US4875973A (en) * | 1988-07-27 | 1989-10-24 | E. I. Du Pont De Nemours And Company | Hydrogen peroxide compositions containing a substituted aminobenzaldehyde |
| US4915781A (en) * | 1988-07-27 | 1990-04-10 | E. I. Du Pont De Nemours And Company | Stabilized hydrogen peroxide compositions |
| US5110494A (en) * | 1990-08-24 | 1992-05-05 | Man-Gill Chemical Company | Alkaline cleaner and process for reducing stain on aluminum surfaces |
| US5200114A (en) * | 1990-08-24 | 1993-04-06 | Man-Gill Chemical Company | Alkaline cleaner for reducing stain on aluminum surfaces |
| US5607718A (en) * | 1993-03-26 | 1997-03-04 | Kabushiki Kaisha Toshiba | Polishing method and polishing apparatus |
| JP3397501B2 (ja) * | 1994-07-12 | 2003-04-14 | 株式会社東芝 | 研磨剤および研磨方法 |
| US5958288A (en) * | 1996-11-26 | 1999-09-28 | Cabot Corporation | Composition and slurry useful for metal CMP |
| US6068787A (en) * | 1996-11-26 | 2000-05-30 | Cabot Corporation | Composition and slurry useful for metal CMP |
| US6083419A (en) * | 1997-07-28 | 2000-07-04 | Cabot Corporation | Polishing composition including an inhibitor of tungsten etching |
| US6419554B2 (en) * | 1999-06-24 | 2002-07-16 | Micron Technology, Inc. | Fixed abrasive chemical-mechanical planarization of titanium nitride |
| SG122739A1 (en) * | 2000-03-03 | 2006-06-29 | Chartered Semiconductor Mfg | Improved chemical agent additives in copper cmp slurry |
| US6489281B1 (en) | 2000-09-12 | 2002-12-03 | Ecolab Inc. | Cleaning composition comprising inorganic acids, an oxidant, and a cationic surfactant |
| US6383065B1 (en) | 2001-01-22 | 2002-05-07 | Cabot Microelectronics Corporation | Catalytic reactive pad for metal CMP |
| KR100742865B1 (ko) * | 2001-09-06 | 2007-07-26 | 주식회사 포스코 | 화학연마용액중의 강산의 분리분석방법 |
| CN100509980C (zh) * | 2002-12-02 | 2009-07-08 | 阿科玛股份有限公司 | 用于铜化学机械平整化加工的组合物及方法 |
| US6911393B2 (en) * | 2002-12-02 | 2005-06-28 | Arkema Inc. | Composition and method for copper chemical mechanical planarization |
| US6884336B2 (en) * | 2003-01-06 | 2005-04-26 | General Motors Corporation | Color finishing method |
| JP2007088258A (ja) * | 2005-09-22 | 2007-04-05 | Fujifilm Corp | 金属研磨液及びそれを用いる研磨方法 |
| EP1918322A1 (en) * | 2006-11-03 | 2008-05-07 | Henkel Kommanditgesellschaft auf Aktien | Paint Stripper with Corrosion Inhibitor for Aluminium |
| KR101475173B1 (ko) * | 2011-06-24 | 2014-12-19 | 애플 인크. | 양극산화처리된 부품의 미용적 결함 저감 |
| CN103160909B (zh) * | 2011-12-15 | 2016-04-27 | 比亚迪股份有限公司 | 一种用于电蚀刻非晶合金材料件的电蚀刻液及蚀刻方法 |
| CN115821267B (zh) * | 2021-12-03 | 2025-02-07 | 浙江瑞特良微电子材料有限公司 | 一种铝合金无磷化抛光液、制备方法及其抛光工艺 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2518109A (en) * | 1947-07-02 | 1950-08-08 | Monsanto Chemicals | Pickling of metals |
| US2694001A (en) * | 1950-04-06 | 1954-11-09 | Armco Steel Corp | Polishing stainless steel |
| US3009849A (en) * | 1958-06-04 | 1961-11-21 | Conversion Chem Corp | Aluminum brightening solution and method |
| GB1088287A (en) * | 1963-12-30 | 1967-10-25 | Albright & Wilson Mfg Ltd | Brightening of aluminium and alloys thereof |
| US3425881A (en) * | 1965-06-28 | 1969-02-04 | Samuel L Cohn | Chemical polishing of aluminum and aluminum alloys |
| GB1129337A (en) * | 1965-12-10 | 1968-10-02 | Pyrene Co Ltd | Improvements relating to the cleaning of metals |
| FR1474572A (fr) * | 1966-04-05 | 1967-03-24 | Colonial Alloys Company | Procédé de brillantage chimique des alliages d'aluminium |
| US3663327A (en) * | 1969-08-13 | 1972-05-16 | Chemed Corp | Formulation and method for brightening aluminum |
| GB1365291A (en) * | 1970-09-25 | 1974-08-29 | Ici Ltd | Inhibition of corrosion |
-
1975
- 1975-10-20 GB GB42902/75A patent/GB1565349A/en not_active Expired
-
1976
- 1976-10-18 US US05/733,508 patent/US4116699A/en not_active Expired - Lifetime
- 1976-10-19 ES ES452521A patent/ES452521A1/es not_active Expired
- 1976-10-19 AU AU18807/76A patent/AU499284B2/en not_active Expired
- 1976-10-19 FR FR7631422A patent/FR2328783A1/fr active Granted
- 1976-10-20 BR BR7607034A patent/BR7607034A/pt unknown
- 1976-10-20 DE DE2647315A patent/DE2647315C3/de not_active Expired
- 1976-10-20 IT IT69529/76A patent/IT1078710B/it active
- 1976-10-20 JP JP51125062A patent/JPS5257033A/ja active Granted
- 1976-10-20 NL NL7611584A patent/NL7611584A/xx not_active Application Discontinuation
-
1977
- 1977-10-19 US US05/843,599 patent/US4251384A/en not_active Expired - Lifetime
-
1981
- 1981-10-19 US US06/312,482 patent/USRE31395E/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| FR2328783B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-04-11 |
| US4251384A (en) | 1981-02-17 |
| DE2647315A1 (de) | 1977-04-28 |
| US4116699A (en) | 1978-09-26 |
| USRE31395E (en) | 1983-09-27 |
| NL7611584A (nl) | 1977-04-22 |
| AU1880776A (en) | 1978-04-27 |
| ES452521A1 (es) | 1977-11-01 |
| JPS5257033A (en) | 1977-05-11 |
| FR2328783A1 (fr) | 1977-05-20 |
| DE2647315C3 (de) | 1980-07-24 |
| DE2647315B2 (de) | 1979-11-08 |
| BR7607034A (pt) | 1977-09-06 |
| AU499284B2 (en) | 1979-04-12 |
| IT1078710B (it) | 1985-05-08 |
| JPS5643114B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-10-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |