JPS5257033A - Aluminum polishing bath - Google Patents

Aluminum polishing bath

Info

Publication number
JPS5257033A
JPS5257033A JP51125062A JP12506276A JPS5257033A JP S5257033 A JPS5257033 A JP S5257033A JP 51125062 A JP51125062 A JP 51125062A JP 12506276 A JP12506276 A JP 12506276A JP S5257033 A JPS5257033 A JP S5257033A
Authority
JP
Japan
Prior art keywords
polishing bath
aluminum polishing
aluminum
bath
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP51125062A
Other languages
English (en)
Other versions
JPS5643114B2 (ja
Inventor
Roi Ruunii Terensu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Solvay Solutions UK Ltd
Original Assignee
Albright and Wilson Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Albright and Wilson Ltd filed Critical Albright and Wilson Ltd
Publication of JPS5257033A publication Critical patent/JPS5257033A/ja
Publication of JPS5643114B2 publication Critical patent/JPS5643114B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00—Brightening metals by chemical means
    • C23F3/02—Light metals
    • C23F3/03—Light metals with acidic solutions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP51125062A 1975-10-20 1976-10-20 Aluminum polishing bath Granted JPS5257033A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB42902/75A GB1565349A (en) 1975-10-20 1975-10-20 Aluminium polishing compositions

Publications (2)

Publication Number Publication Date
JPS5257033A true JPS5257033A (en) 1977-05-11
JPS5643114B2 JPS5643114B2 (ja) 1981-10-09

Family

ID=10426479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51125062A Granted JPS5257033A (en) 1975-10-20 1976-10-20 Aluminum polishing bath

Country Status (10)

Country Link
US (3) US4116699A (ja)
JP (1) JPS5257033A (ja)
AU (1) AU499284B2 (ja)
BR (1) BR7607034A (ja)
DE (1) DE2647315C3 (ja)
ES (1) ES452521A1 (ja)
FR (1) FR2328783A1 (ja)
GB (1) GB1565349A (ja)
IT (1) IT1078710B (ja)
NL (1) NL7611584A (ja)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4319955A (en) * 1980-11-05 1982-03-16 Philip A. Hunt Chemical Corp. Ammoniacal alkaline cupric etchant solution for and method of reducing etchant undercut
JPS57164984A (en) * 1981-04-06 1982-10-09 Metsuku Kk Exfoliating solution for tin or tin alloy
US4521240A (en) * 1983-04-29 1985-06-04 Chevron Research Company 5-C-Alkyl-3-O-arylmethyl or substituted arylmethyl-1,2-O-alkylidene-α-
US4640713A (en) * 1984-11-19 1987-02-03 S. C. Johnson & Son, Inc. Tarnish remover/metal polish formulation comprising a metal iodide, an acid, and water
US4961867A (en) * 1985-10-15 1990-10-09 The Dow Chemical Company Process for preventing corrosion of metals by contacting them with compositions prepared from amino substituted pyrazines and carboxylic acids carboxylic acid anhydrides, carboxylic acid, esters or carboxylic acid halides
US4915781A (en) * 1988-07-27 1990-04-10 E. I. Du Pont De Nemours And Company Stabilized hydrogen peroxide compositions
US4875972A (en) * 1988-07-27 1989-10-24 E. I. Du Pont De Nemours And Company Hydrogen peroxide compositions containing a substituted oxybenzene compound
US4875973A (en) * 1988-07-27 1989-10-24 E. I. Du Pont De Nemours And Company Hydrogen peroxide compositions containing a substituted aminobenzaldehyde
US5110494A (en) * 1990-08-24 1992-05-05 Man-Gill Chemical Company Alkaline cleaner and process for reducing stain on aluminum surfaces
US5200114A (en) * 1990-08-24 1993-04-06 Man-Gill Chemical Company Alkaline cleaner for reducing stain on aluminum surfaces
US5607718A (en) * 1993-03-26 1997-03-04 Kabushiki Kaisha Toshiba Polishing method and polishing apparatus
JP3397501B2 (ja) * 1994-07-12 2003-04-14 株式会社東芝 研磨剤および研磨方法
US5958288A (en) * 1996-11-26 1999-09-28 Cabot Corporation Composition and slurry useful for metal CMP
US6068787A (en) * 1996-11-26 2000-05-30 Cabot Corporation Composition and slurry useful for metal CMP
US6083419A (en) * 1997-07-28 2000-07-04 Cabot Corporation Polishing composition including an inhibitor of tungsten etching
US6419554B2 (en) * 1999-06-24 2002-07-16 Micron Technology, Inc. Fixed abrasive chemical-mechanical planarization of titanium nitride
SG122739A1 (en) * 2000-03-03 2006-06-29 Chartered Semiconductor Mfg Improved chemical agent additives in copper cmp slurry
US6489281B1 (en) 2000-09-12 2002-12-03 Ecolab Inc. Cleaning composition comprising inorganic acids, an oxidant, and a cationic surfactant
US6383065B1 (en) 2001-01-22 2002-05-07 Cabot Microelectronics Corporation Catalytic reactive pad for metal CMP
KR100742865B1 (ko) * 2001-09-06 2007-07-26 주식회사 포스코 화학연마용액중의 강산의 분리분석방법
US6911393B2 (en) * 2002-12-02 2005-06-28 Arkema Inc. Composition and method for copper chemical mechanical planarization
CN100509980C (zh) * 2002-12-02 2009-07-08 阿科玛股份有限公司 用于铜化学机械平整化加工的组合物及方法
US6884336B2 (en) * 2003-01-06 2005-04-26 General Motors Corporation Color finishing method
JP2007088258A (ja) * 2005-09-22 2007-04-05 Fujifilm Corp 金属研磨液及びそれを用いる研磨方法
EP1918322A1 (en) * 2006-11-03 2008-05-07 Henkel Kommanditgesellschaft auf Aktien Paint Stripper with Corrosion Inhibitor for Aluminium
JP5723068B2 (ja) * 2011-06-24 2015-05-27 アップル インコーポレイテッド アルミニウム部品を陽極酸化する方法及びコンピューティングデバイス
CN103160909B (zh) * 2011-12-15 2016-04-27 比亚迪股份有限公司 一种用于电蚀刻非晶合金材料件的电蚀刻液及蚀刻方法
CN115821267A (zh) * 2021-12-03 2023-03-21 浙江瑞特良微电子材料有限公司 一种铝合金无磷化抛光液、制备方法及其抛光工艺

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2518109A (en) * 1947-07-02 1950-08-08 Monsanto Chemicals Pickling of metals
US2694001A (en) * 1950-04-06 1954-11-09 Armco Steel Corp Polishing stainless steel
US3009849A (en) * 1958-06-04 1961-11-21 Conversion Chem Corp Aluminum brightening solution and method
GB1088287A (en) * 1963-12-30 1967-10-25 Albright & Wilson Mfg Ltd Brightening of aluminium and alloys thereof
US3425881A (en) * 1965-06-28 1969-02-04 Samuel L Cohn Chemical polishing of aluminum and aluminum alloys
GB1129337A (en) * 1965-12-10 1968-10-02 Pyrene Co Ltd Improvements relating to the cleaning of metals
FR1474572A (fr) * 1966-04-05 1967-03-24 Colonial Alloys Company Procédé de brillantage chimique des alliages d'aluminium
US3663327A (en) * 1969-08-13 1972-05-16 Chemed Corp Formulation and method for brightening aluminum
GB1365291A (en) * 1970-09-25 1974-08-29 Ici Ltd Inhibition of corrosion

Also Published As

Publication number Publication date
US4116699A (en) 1978-09-26
NL7611584A (nl) 1977-04-22
AU499284B2 (en) 1979-04-12
ES452521A1 (es) 1977-11-01
AU1880776A (en) 1978-04-27
DE2647315A1 (de) 1977-04-28
FR2328783A1 (fr) 1977-05-20
DE2647315C3 (de) 1980-07-24
IT1078710B (it) 1985-05-08
GB1565349A (en) 1980-04-16
US4251384A (en) 1981-02-17
BR7607034A (pt) 1977-09-06
USRE31395E (en) 1983-09-27
FR2328783B1 (ja) 1980-04-11
DE2647315B2 (de) 1979-11-08
JPS5643114B2 (ja) 1981-10-09

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