ES452521A1 - Un metodo para la preparacion de una solucion para pulimen- tacion de aluminio. - Google Patents
Un metodo para la preparacion de una solucion para pulimen- tacion de aluminio.Info
- Publication number
- ES452521A1 ES452521A1 ES452521A ES452521A ES452521A1 ES 452521 A1 ES452521 A1 ES 452521A1 ES 452521 A ES452521 A ES 452521A ES 452521 A ES452521 A ES 452521A ES 452521 A1 ES452521 A1 ES 452521A1
- Authority
- ES
- Spain
- Prior art keywords
- polishing compositions
- aluminum polishing
- aluminum
- benztriazole
- nitric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title abstract 2
- 229910052782 aluminium Inorganic materials 0.000 title abstract 2
- 238000005498 polishing Methods 0.000 title abstract 2
- 239000000203 mixture Substances 0.000 title 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical class OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract 2
- 235000011149 sulphuric acid Nutrition 0.000 abstract 2
- 239000004411 aluminium Substances 0.000 abstract 1
- -1 aromatic ring compound Chemical class 0.000 abstract 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 125000005842 heteroatom Chemical group 0.000 abstract 1
- 239000001117 sulphuric acid Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/02—Light metals
- C23F3/03—Light metals with acidic solutions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB42902/75A GB1565349A (en) | 1975-10-20 | 1975-10-20 | Aluminium polishing compositions |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES452521A1 true ES452521A1 (es) | 1977-11-01 |
Family
ID=10426479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES452521A Expired ES452521A1 (es) | 1975-10-20 | 1976-10-19 | Un metodo para la preparacion de una solucion para pulimen- tacion de aluminio. |
Country Status (10)
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4319955A (en) * | 1980-11-05 | 1982-03-16 | Philip A. Hunt Chemical Corp. | Ammoniacal alkaline cupric etchant solution for and method of reducing etchant undercut |
| JPS57164984A (en) * | 1981-04-06 | 1982-10-09 | Metsuku Kk | Exfoliating solution for tin or tin alloy |
| US4521240A (en) * | 1983-04-29 | 1985-06-04 | Chevron Research Company | 5-C-Alkyl-3-O-arylmethyl or substituted arylmethyl-1,2-O-alkylidene-α- |
| US4640713A (en) * | 1984-11-19 | 1987-02-03 | S. C. Johnson & Son, Inc. | Tarnish remover/metal polish formulation comprising a metal iodide, an acid, and water |
| US4961867A (en) * | 1985-10-15 | 1990-10-09 | The Dow Chemical Company | Process for preventing corrosion of metals by contacting them with compositions prepared from amino substituted pyrazines and carboxylic acids carboxylic acid anhydrides, carboxylic acid, esters or carboxylic acid halides |
| US4875972A (en) * | 1988-07-27 | 1989-10-24 | E. I. Du Pont De Nemours And Company | Hydrogen peroxide compositions containing a substituted oxybenzene compound |
| US4875973A (en) * | 1988-07-27 | 1989-10-24 | E. I. Du Pont De Nemours And Company | Hydrogen peroxide compositions containing a substituted aminobenzaldehyde |
| US4915781A (en) * | 1988-07-27 | 1990-04-10 | E. I. Du Pont De Nemours And Company | Stabilized hydrogen peroxide compositions |
| US5110494A (en) * | 1990-08-24 | 1992-05-05 | Man-Gill Chemical Company | Alkaline cleaner and process for reducing stain on aluminum surfaces |
| US5200114A (en) * | 1990-08-24 | 1993-04-06 | Man-Gill Chemical Company | Alkaline cleaner for reducing stain on aluminum surfaces |
| US5607718A (en) * | 1993-03-26 | 1997-03-04 | Kabushiki Kaisha Toshiba | Polishing method and polishing apparatus |
| JP3397501B2 (ja) * | 1994-07-12 | 2003-04-14 | 株式会社東芝 | 研磨剤および研磨方法 |
| US5958288A (en) * | 1996-11-26 | 1999-09-28 | Cabot Corporation | Composition and slurry useful for metal CMP |
| US6068787A (en) * | 1996-11-26 | 2000-05-30 | Cabot Corporation | Composition and slurry useful for metal CMP |
| US6083419A (en) * | 1997-07-28 | 2000-07-04 | Cabot Corporation | Polishing composition including an inhibitor of tungsten etching |
| US6419554B2 (en) * | 1999-06-24 | 2002-07-16 | Micron Technology, Inc. | Fixed abrasive chemical-mechanical planarization of titanium nitride |
| SG122739A1 (en) * | 2000-03-03 | 2006-06-29 | Chartered Semiconductor Mfg | Improved chemical agent additives in copper cmp slurry |
| US6489281B1 (en) | 2000-09-12 | 2002-12-03 | Ecolab Inc. | Cleaning composition comprising inorganic acids, an oxidant, and a cationic surfactant |
| US6383065B1 (en) | 2001-01-22 | 2002-05-07 | Cabot Microelectronics Corporation | Catalytic reactive pad for metal CMP |
| KR100742865B1 (ko) * | 2001-09-06 | 2007-07-26 | 주식회사 포스코 | 화학연마용액중의 강산의 분리분석방법 |
| CN100509980C (zh) * | 2002-12-02 | 2009-07-08 | 阿科玛股份有限公司 | 用于铜化学机械平整化加工的组合物及方法 |
| US6911393B2 (en) * | 2002-12-02 | 2005-06-28 | Arkema Inc. | Composition and method for copper chemical mechanical planarization |
| US6884336B2 (en) * | 2003-01-06 | 2005-04-26 | General Motors Corporation | Color finishing method |
| JP2007088258A (ja) * | 2005-09-22 | 2007-04-05 | Fujifilm Corp | 金属研磨液及びそれを用いる研磨方法 |
| EP1918322A1 (en) * | 2006-11-03 | 2008-05-07 | Henkel Kommanditgesellschaft auf Aktien | Paint Stripper with Corrosion Inhibitor for Aluminium |
| KR101475173B1 (ko) * | 2011-06-24 | 2014-12-19 | 애플 인크. | 양극산화처리된 부품의 미용적 결함 저감 |
| CN103160909B (zh) * | 2011-12-15 | 2016-04-27 | 比亚迪股份有限公司 | 一种用于电蚀刻非晶合金材料件的电蚀刻液及蚀刻方法 |
| CN115821267B (zh) * | 2021-12-03 | 2025-02-07 | 浙江瑞特良微电子材料有限公司 | 一种铝合金无磷化抛光液、制备方法及其抛光工艺 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2518109A (en) * | 1947-07-02 | 1950-08-08 | Monsanto Chemicals | Pickling of metals |
| US2694001A (en) * | 1950-04-06 | 1954-11-09 | Armco Steel Corp | Polishing stainless steel |
| US3009849A (en) * | 1958-06-04 | 1961-11-21 | Conversion Chem Corp | Aluminum brightening solution and method |
| GB1088287A (en) * | 1963-12-30 | 1967-10-25 | Albright & Wilson Mfg Ltd | Brightening of aluminium and alloys thereof |
| US3425881A (en) * | 1965-06-28 | 1969-02-04 | Samuel L Cohn | Chemical polishing of aluminum and aluminum alloys |
| GB1129337A (en) * | 1965-12-10 | 1968-10-02 | Pyrene Co Ltd | Improvements relating to the cleaning of metals |
| FR1474572A (fr) * | 1966-04-05 | 1967-03-24 | Colonial Alloys Company | Procédé de brillantage chimique des alliages d'aluminium |
| US3663327A (en) * | 1969-08-13 | 1972-05-16 | Chemed Corp | Formulation and method for brightening aluminum |
| GB1365291A (en) * | 1970-09-25 | 1974-08-29 | Ici Ltd | Inhibition of corrosion |
-
1975
- 1975-10-20 GB GB42902/75A patent/GB1565349A/en not_active Expired
-
1976
- 1976-10-18 US US05/733,508 patent/US4116699A/en not_active Expired - Lifetime
- 1976-10-19 ES ES452521A patent/ES452521A1/es not_active Expired
- 1976-10-19 AU AU18807/76A patent/AU499284B2/en not_active Expired
- 1976-10-19 FR FR7631422A patent/FR2328783A1/fr active Granted
- 1976-10-20 BR BR7607034A patent/BR7607034A/pt unknown
- 1976-10-20 DE DE2647315A patent/DE2647315C3/de not_active Expired
- 1976-10-20 IT IT69529/76A patent/IT1078710B/it active
- 1976-10-20 JP JP51125062A patent/JPS5257033A/ja active Granted
- 1976-10-20 NL NL7611584A patent/NL7611584A/xx not_active Application Discontinuation
-
1977
- 1977-10-19 US US05/843,599 patent/US4251384A/en not_active Expired - Lifetime
-
1981
- 1981-10-19 US US06/312,482 patent/USRE31395E/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| FR2328783B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-04-11 |
| US4251384A (en) | 1981-02-17 |
| DE2647315A1 (de) | 1977-04-28 |
| US4116699A (en) | 1978-09-26 |
| USRE31395E (en) | 1983-09-27 |
| NL7611584A (nl) | 1977-04-22 |
| AU1880776A (en) | 1978-04-27 |
| JPS5257033A (en) | 1977-05-11 |
| FR2328783A1 (fr) | 1977-05-20 |
| DE2647315C3 (de) | 1980-07-24 |
| DE2647315B2 (de) | 1979-11-08 |
| BR7607034A (pt) | 1977-09-06 |
| GB1565349A (en) | 1980-04-16 |
| AU499284B2 (en) | 1979-04-12 |
| IT1078710B (it) | 1985-05-08 |
| JPS5643114B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-10-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FD1A | Patent lapsed |
Effective date: 19971103 |