GB1523841A - Process for the production of a thin-film resistor - Google Patents
Process for the production of a thin-film resistorInfo
- Publication number
- GB1523841A GB1523841A GB536377A GB536377A GB1523841A GB 1523841 A GB1523841 A GB 1523841A GB 536377 A GB536377 A GB 536377A GB 536377 A GB536377 A GB 536377A GB 1523841 A GB1523841 A GB 1523841A
- Authority
- GB
- United Kingdom
- Prior art keywords
- thin
- production
- film resistor
- feb
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 239000010408 film Substances 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19762605174 DE2605174B2 (de) | 1976-02-10 | 1976-02-10 | Verfahren zur Herstellung von Dünnschicht-Widerstandselementen |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1523841A true GB1523841A (en) | 1978-09-06 |
Family
ID=5969497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB536377A Expired GB1523841A (en) | 1976-02-10 | 1977-02-09 | Process for the production of a thin-film resistor |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE2605174B2 (de) |
GB (1) | GB1523841A (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2154658A (en) * | 1984-02-28 | 1985-09-11 | Diesel Kiki Co | Valve unit including a switch |
GB2158104A (en) * | 1984-05-04 | 1985-11-06 | Diesel Kiki Co | Method for producing a thin film |
-
1976
- 1976-02-10 DE DE19762605174 patent/DE2605174B2/de not_active Ceased
-
1977
- 1977-02-09 GB GB536377A patent/GB1523841A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2154658A (en) * | 1984-02-28 | 1985-09-11 | Diesel Kiki Co | Valve unit including a switch |
GB2158104A (en) * | 1984-05-04 | 1985-11-06 | Diesel Kiki Co | Method for producing a thin film |
Also Published As
Publication number | Publication date |
---|---|
DE2605174B2 (de) | 1978-07-27 |
DE2605174A1 (de) | 1977-08-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |