ES483670A1 - Un metodo para producir una pelicula magnetica amorfa mejo- rada - Google Patents

Un metodo para producir una pelicula magnetica amorfa mejo- rada

Info

Publication number
ES483670A1
ES483670A1 ES483670A ES483670A ES483670A1 ES 483670 A1 ES483670 A1 ES 483670A1 ES 483670 A ES483670 A ES 483670A ES 483670 A ES483670 A ES 483670A ES 483670 A1 ES483670 A1 ES 483670A1
Authority
ES
Spain
Prior art keywords
films
amorphous magnetic
making
magnetic material
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES483670A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of ES483670A1 publication Critical patent/ES483670A1/es
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/08Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/13Amorphous metallic alloys, e.g. glassy metals
    • H01F10/131Amorphous metallic alloys, e.g. glassy metals containing iron or nickel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/08Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/18Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
    • H01F10/187Amorphous compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/90Magnetic feature
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Magnetic Record Carriers (AREA)
  • Glass Compositions (AREA)

Abstract

Un método para producir una película magnética amorfa mejorada que comprende depositar una película de hierro-nitruro sobre un substrato por deposición mediante pulverización en diodo utilizando un gas inerte.
ES483670A 1978-08-28 1979-08-27 Un metodo para producir una pelicula magnetica amorfa mejo- rada Expired ES483670A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/937,686 US4271232A (en) 1978-08-28 1978-08-28 Amorphous magnetic film

Publications (1)

Publication Number Publication Date
ES483670A1 true ES483670A1 (es) 1980-04-01

Family

ID=25470265

Family Applications (1)

Application Number Title Priority Date Filing Date
ES483670A Expired ES483670A1 (es) 1978-08-28 1979-08-27 Un metodo para producir una pelicula magnetica amorfa mejo- rada

Country Status (12)

Country Link
US (1) US4271232A (es)
EP (1) EP0008328B1 (es)
JP (1) JPS5533093A (es)
AU (1) AU521856B2 (es)
BR (1) BR7905446A (es)
CA (1) CA1135044A (es)
DE (1) DE2964474D1 (es)
DK (1) DK356879A (es)
ES (1) ES483670A1 (es)
FI (1) FI74165C (es)
NO (1) NO792744L (es)
ZA (1) ZA792889B (es)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4467383A (en) * 1980-02-23 1984-08-21 Sharp Kabushiki Kaisha Magnetooptic memory medium
JPS57130405A (en) * 1981-02-05 1982-08-12 Semiconductor Energy Lab Co Ltd Magnetic recording medium
US4511601A (en) * 1983-05-13 1985-04-16 North American Philips Corporation Copper metallization for dielectric materials
US4610911A (en) * 1983-11-03 1986-09-09 Hewlett-Packard Company Thin film magnetic recording media
DE3342533A1 (de) * 1983-11-24 1985-06-05 Siemens AG, 1000 Berlin und 8000 München Aufstaeubung von permalloy-schichten
US4640755A (en) * 1983-12-12 1987-02-03 Sony Corporation Method for producing magnetic medium
JPS6154023A (ja) * 1984-08-24 1986-03-18 Fuji Photo Film Co Ltd 磁気記録媒体
JPH061551B2 (ja) * 1984-08-24 1994-01-05 富士写真フイルム株式会社 磁気記録媒体の製造方法
GB2167448B (en) * 1984-11-02 1988-10-19 Hitachi Ltd Perpendicular magnetic recording medium
JPS62210607A (ja) * 1986-03-12 1987-09-16 Matsushita Electric Ind Co Ltd 軟磁性合金膜及びその形成法
JP2790451B2 (ja) * 1987-04-10 1998-08-27 松下電器産業株式会社 窒素を含む軟磁性合金膜
US5112701A (en) * 1988-03-25 1992-05-12 Ricoh Company, Ltd. Magneto-optic recording media and process for producing the same
JP2698813B2 (ja) * 1989-04-03 1998-01-19 富士写真フイルム株式会社 軟磁性薄膜
US5538802A (en) * 1992-09-18 1996-07-23 Kao Corporation Magnetic recording medium and process for producing the same
GB2353293A (en) * 1999-08-18 2001-02-21 Rtc Systems Ltd FeXN deposition process based on helicon sputtering
JP3886802B2 (ja) * 2001-03-30 2007-02-28 株式会社東芝 磁性体のパターニング方法、磁気記録媒体、磁気ランダムアクセスメモリ

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3607460A (en) * 1968-11-18 1971-09-21 Gen Electric First order transition films for magnetic recording and method of forming
US3700499A (en) * 1969-06-17 1972-10-24 American Cyanamid Co Magnetic recording element
NL6909541A (es) * 1969-06-21 1970-12-23
US3620841A (en) * 1970-02-16 1971-11-16 Ibm Process for making continuous magnetite films
US3965463A (en) * 1972-08-29 1976-06-22 International Business Machines Corporation Apparatus using amorphous magnetic compositions
DE2250481C3 (de) * 1972-10-14 1981-08-27 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur Herstellung eines magnetischen Aufzeichnungsträgers
JPS56851B2 (es) * 1973-07-24 1981-01-09
JPS573137B2 (es) * 1974-03-13 1982-01-20
JPS5311679B2 (es) * 1974-08-26 1978-04-24
US4144058A (en) * 1974-09-12 1979-03-13 Allied Chemical Corporation Amorphous metal alloys composed of iron, nickel, phosphorus, boron and, optionally carbon
JPS5812728B2 (ja) * 1974-12-10 1983-03-10 富士写真フイルム株式会社 ジキキロクバイタイノ セイホウ
JPS5197545A (en) * 1975-02-25 1976-08-27 Paamaroimakuno seisakuho
US4067732A (en) * 1975-06-26 1978-01-10 Allied Chemical Corporation Amorphous alloys which include iron group elements and boron
US4013803A (en) * 1975-10-30 1977-03-22 Sperry Rand Corporation Fabrication of amorphous bubble film devices
JPS5931970B2 (ja) * 1976-12-17 1984-08-06 日本電気株式会社 非晶質強磁性膜の製造方法
US4236946A (en) * 1978-03-13 1980-12-02 International Business Machines Corporation Amorphous magnetic thin films with highly stable easy axis

Also Published As

Publication number Publication date
EP0008328B1 (en) 1983-01-12
DK356879A (da) 1980-02-29
NO792744L (no) 1980-02-29
DE2964474D1 (en) 1983-02-17
BR7905446A (pt) 1980-05-20
ZA792889B (en) 1981-01-28
EP0008328A1 (en) 1980-03-05
CA1135044A (en) 1982-11-09
FI74165C (fi) 1987-12-10
FI792600A (fi) 1980-02-29
US4271232A (en) 1981-06-02
JPS614163B2 (es) 1986-02-07
JPS5533093A (en) 1980-03-08
AU521856B2 (en) 1982-05-06
AU4796879A (en) 1980-03-06
FI74165B (fi) 1987-08-31

Similar Documents

Publication Publication Date Title
ES483670A1 (es) Un metodo para producir una pelicula magnetica amorfa mejo- rada
EP0476652A3 (en) Method for depositing thin film on substrate by sputtering process
GB1492164A (en) Method of forming iron oxide films
JPS5362788A (en) Method of controlling thin film deposit by active sputtering and active sputtering apparatus for carrying out said method
GB1366146A (en) Magnetic storage devices
AU4076195A (en) Process and apparatus for forming thin films of metallic compounds
EP0391258A3 (en) Magnetic recording medium and method for its production
JPS5516554A (en) Manufacture of thin film of zinc oxide
GB1466655A (en) Making a magnetic oxide film
GB2029017B (en) Control of deposition of thin films
ES8105057A1 (es) Un procedimiento para obtener un papel con metal depositado
JPS5339226A (en) Deposition method of hafnium metal thin film
JPS5724022A (en) Production of magnetic recording substance
GB1297936A (es)
GB1440357A (en) Method for making amorphous semiconductor films
EP0151861A3 (en) Thermally controlled sputtering of high anisotropy magnetic material
JPS5755531A (en) Vertical magnetic recording medium
JPS5634143A (en) Magnetic recording medium
JPS53132310A (en) Production of magnetic recording media
GB1384109A (en) Forming magnetic films on substrates
JPS5290902A (en) Production of reproducing stylus
GB1409232A (en) Method of making manganese-gallium-germanium films
JPS5388704A (en) Magnetic recording medium
JPS57169217A (en) Magnetic recording tape
JPS58147559A (ja) スパツタリング装置

Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 19960603