GB1503355A - Vapour detector - Google Patents
Vapour detectorInfo
- Publication number
- GB1503355A GB1503355A GB22213/75A GB2221375A GB1503355A GB 1503355 A GB1503355 A GB 1503355A GB 22213/75 A GB22213/75 A GB 22213/75A GB 2221375 A GB2221375 A GB 2221375A GB 1503355 A GB1503355 A GB 1503355A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- semi
- conductor
- dielectric
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 abstract 4
- 239000007789 gas Substances 0.000 abstract 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract 2
- 239000003989 dielectric material Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 abstract 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- CJOBVZJTOIVNNF-UHFFFAOYSA-N cadmium sulfide Chemical compound [Cd]=S CJOBVZJTOIVNNF-UHFFFAOYSA-N 0.000 abstract 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- -1 polytetrafluorethylene Polymers 0.000 abstract 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 abstract 1
- 239000000523 sample Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 abstract 1
- 239000011787 zinc oxide Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/129—Diode type sensors, e.g. gas sensitive Schottky diodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Fire-Detection Mechanisms (AREA)
- Emergency Alarm Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7418213A FR2273275B1 (en, 2012) | 1974-05-27 | 1974-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1503355A true GB1503355A (en) | 1978-03-08 |
Family
ID=9139271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB22213/75A Expired GB1503355A (en) | 1974-05-27 | 1975-05-22 | Vapour detector |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4025892A (en, 2012) |
| JP (1) | JPS512493A (en, 2012) |
| DE (1) | DE2521366C2 (en, 2012) |
| FR (1) | FR2273275B1 (en, 2012) |
| GB (1) | GB1503355A (en, 2012) |
| IT (1) | IT1038444B (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2138946A (en) * | 1983-04-12 | 1984-10-31 | Endress Hauser Gmbh Co | Thin-film humidity sensor and method for the production therefor |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2341859A1 (fr) * | 1976-02-18 | 1977-09-16 | Radiotechnique Compelec | Sonde pour la detection selective de vapeurs, notamment pour la detection de la vapeur d'eau |
| US4273636A (en) * | 1977-05-26 | 1981-06-16 | Kiyoo Shimada | Selective chemical sensitive field effect transistor transducers |
| SE434438B (sv) * | 1980-02-21 | 1984-07-23 | Gambro Engstrom Ab | Anordning for detektering av forekomsten av en given gaskomponent i en gasblandning |
| WO1982000362A1 (en) * | 1980-07-21 | 1982-02-04 | Kinjo N | Moisture-sensitive element,moisture-sensitive material and manufacturing method for same |
| US4298855A (en) * | 1980-08-26 | 1981-11-03 | Honeywell Inc. | Conductive polymer film humidity sensor |
| JPS5834882A (ja) * | 1981-08-25 | 1983-03-01 | Nitto Electric Ind Co Ltd | 両面粘着用粘着テ−プ積層体 |
| JPS6050446A (ja) * | 1983-08-31 | 1985-03-20 | Nohmi Bosai Kogyo Co Ltd | ガス検出素子とその製造方法 |
| JPS6082954A (ja) * | 1983-10-14 | 1985-05-11 | Nohmi Bosai Kogyo Co Ltd | ガス検出素子とその製造方法 |
| US4795968A (en) * | 1986-06-30 | 1989-01-03 | Sri International | Gas detection method and apparatus using chemisorption and/or physisorption |
| US5367285A (en) * | 1993-02-26 | 1994-11-22 | Lake Shore Cryotronics, Inc. | Metal oxy-nitride resistance films and methods of making the same |
| US8704660B2 (en) * | 2009-11-17 | 2014-04-22 | Cubic Corporation | Chemical-selective device |
| IT1402406B1 (it) * | 2010-10-22 | 2013-09-04 | St Microelectronics Srl | Metodo di fabbricazione di un dispositivo sensore di una sostanza gassosa di interesse. |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3242007A (en) * | 1961-11-15 | 1966-03-22 | Texas Instruments Inc | Pyrolytic deposition of protective coatings of semiconductor surfaces |
| AU5805873A (en) * | 1972-07-25 | 1975-01-16 | Koichi Sugaya | Humidity sensor electrode assembly |
| DE2407110C3 (de) * | 1974-02-14 | 1981-04-23 | Siemens AG, 1000 Berlin und 8000 München | Sensor zum Nachweis einer in einem Gas oder einer Flüssigkeit einthaltenen Substanz |
-
1974
- 1974-05-27 FR FR7418213A patent/FR2273275B1/fr not_active Expired
-
1975
- 1975-05-13 US US05/577,068 patent/US4025892A/en not_active Expired - Lifetime
- 1975-05-14 DE DE2521366A patent/DE2521366C2/de not_active Expired
- 1975-05-22 GB GB22213/75A patent/GB1503355A/en not_active Expired
- 1975-05-23 IT IT23698/75A patent/IT1038444B/it active
- 1975-05-24 JP JP50061506A patent/JPS512493A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2138946A (en) * | 1983-04-12 | 1984-10-31 | Endress Hauser Gmbh Co | Thin-film humidity sensor and method for the production therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2521366C2 (de) | 1985-02-21 |
| FR2273275A1 (en, 2012) | 1975-12-26 |
| JPS512493A (en, 2012) | 1976-01-10 |
| US4025892A (en) | 1977-05-24 |
| FR2273275B1 (en, 2012) | 1977-03-11 |
| DE2521366A1 (de) | 1975-12-11 |
| IT1038444B (it) | 1979-11-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |