GB1503355A - Vapour detector - Google Patents

Vapour detector

Info

Publication number
GB1503355A
GB1503355A GB22213/75A GB2221375A GB1503355A GB 1503355 A GB1503355 A GB 1503355A GB 22213/75 A GB22213/75 A GB 22213/75A GB 2221375 A GB2221375 A GB 2221375A GB 1503355 A GB1503355 A GB 1503355A
Authority
GB
United Kingdom
Prior art keywords
layer
semi
conductor
dielectric
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB22213/75A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PHILIPS Ltd
Original Assignee
PHILIPS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PHILIPS Ltd filed Critical PHILIPS Ltd
Publication of GB1503355A publication Critical patent/GB1503355A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/129—Diode type sensors, e.g. gas sensitive Schottky diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Detection Mechanisms (AREA)
GB22213/75A 1974-05-27 1975-05-22 Vapour detector Expired GB1503355A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7418213A FR2273275B1 (US20110009641A1-20110113-C00185.png) 1974-05-27 1974-05-27

Publications (1)

Publication Number Publication Date
GB1503355A true GB1503355A (en) 1978-03-08

Family

ID=9139271

Family Applications (1)

Application Number Title Priority Date Filing Date
GB22213/75A Expired GB1503355A (en) 1974-05-27 1975-05-22 Vapour detector

Country Status (6)

Country Link
US (1) US4025892A (US20110009641A1-20110113-C00185.png)
JP (1) JPS512493A (US20110009641A1-20110113-C00185.png)
DE (1) DE2521366C2 (US20110009641A1-20110113-C00185.png)
FR (1) FR2273275B1 (US20110009641A1-20110113-C00185.png)
GB (1) GB1503355A (US20110009641A1-20110113-C00185.png)
IT (1) IT1038444B (US20110009641A1-20110113-C00185.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2138946A (en) * 1983-04-12 1984-10-31 Endress Hauser Gmbh Co Thin-film humidity sensor and method for the production therefor

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2341859A1 (fr) * 1976-02-18 1977-09-16 Radiotechnique Compelec Sonde pour la detection selective de vapeurs, notamment pour la detection de la vapeur d'eau
US4273636A (en) * 1977-05-26 1981-06-16 Kiyoo Shimada Selective chemical sensitive field effect transistor transducers
SE434438B (sv) * 1980-02-21 1984-07-23 Gambro Engstrom Ab Anordning for detektering av forekomsten av en given gaskomponent i en gasblandning
WO1982000362A1 (en) * 1980-07-21 1982-02-04 Kinjo N Moisture-sensitive element,moisture-sensitive material and manufacturing method for same
US4298855A (en) * 1980-08-26 1981-11-03 Honeywell Inc. Conductive polymer film humidity sensor
JPS5834882A (ja) * 1981-08-25 1983-03-01 Nitto Electric Ind Co Ltd 両面粘着用粘着テ−プ積層体
JPS6050446A (ja) * 1983-08-31 1985-03-20 Nohmi Bosai Kogyo Co Ltd ガス検出素子とその製造方法
JPS6082954A (ja) * 1983-10-14 1985-05-11 Nohmi Bosai Kogyo Co Ltd ガス検出素子とその製造方法
US4795968A (en) * 1986-06-30 1989-01-03 Sri International Gas detection method and apparatus using chemisorption and/or physisorption
US5367285A (en) * 1993-02-26 1994-11-22 Lake Shore Cryotronics, Inc. Metal oxy-nitride resistance films and methods of making the same
WO2011063013A2 (en) * 2009-11-17 2011-05-26 Cubic Corporation Chemical-selective device
IT1402406B1 (it) * 2010-10-22 2013-09-04 St Microelectronics Srl Metodo di fabbricazione di un dispositivo sensore di una sostanza gassosa di interesse.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3242007A (en) * 1961-11-15 1966-03-22 Texas Instruments Inc Pyrolytic deposition of protective coatings of semiconductor surfaces
AU5805873A (en) * 1972-07-25 1975-01-16 Koichi Sugaya Humidity sensor electrode assembly
DE2407110C3 (de) * 1974-02-14 1981-04-23 Siemens AG, 1000 Berlin und 8000 München Sensor zum Nachweis einer in einem Gas oder einer Flüssigkeit einthaltenen Substanz

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2138946A (en) * 1983-04-12 1984-10-31 Endress Hauser Gmbh Co Thin-film humidity sensor and method for the production therefor

Also Published As

Publication number Publication date
FR2273275B1 (US20110009641A1-20110113-C00185.png) 1977-03-11
IT1038444B (it) 1979-11-20
DE2521366A1 (de) 1975-12-11
JPS512493A (US20110009641A1-20110113-C00185.png) 1976-01-10
US4025892A (en) 1977-05-24
FR2273275A1 (US20110009641A1-20110113-C00185.png) 1975-12-26
DE2521366C2 (de) 1985-02-21

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee