GB1477030A - Method and apparatus for the automatic focussing of electron beams in electron optical apparatus - Google Patents

Method and apparatus for the automatic focussing of electron beams in electron optical apparatus

Info

Publication number
GB1477030A
GB1477030A GB5526374A GB5526374A GB1477030A GB 1477030 A GB1477030 A GB 1477030A GB 5526374 A GB5526374 A GB 5526374A GB 5526374 A GB5526374 A GB 5526374A GB 1477030 A GB1477030 A GB 1477030A
Authority
GB
United Kingdom
Prior art keywords
scan
electron
signal
output
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5526374A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP741436A external-priority patent/JPS5917496B2/ja
Priority claimed from JP49046286A external-priority patent/JPS5847824B2/ja
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1477030A publication Critical patent/GB1477030A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB5526374A 1973-12-24 1974-12-20 Method and apparatus for the automatic focussing of electron beams in electron optical apparatus Expired GB1477030A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP741436A JPS5917496B2 (ja) 1973-12-24 1973-12-24 走査電子顕微鏡等における焦点合わせ方法及びそのための装置
JP49046286A JPS5847824B2 (ja) 1974-04-24 1974-04-24 ソウチデンシケンビキヨウトウヨウ シヨウテンアワセホウホウ オヨビ ソウチ

Publications (1)

Publication Number Publication Date
GB1477030A true GB1477030A (en) 1977-06-22

Family

ID=26334650

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5526374A Expired GB1477030A (en) 1973-12-24 1974-12-20 Method and apparatus for the automatic focussing of electron beams in electron optical apparatus

Country Status (4)

Country Link
US (1) US3937959A (enExample)
DE (1) DE2461202C3 (enExample)
FR (1) FR2255701B1 (enExample)
GB (1) GB1477030A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4169240A (en) 1976-07-30 1979-09-25 Cambridge Scientific Instruments Limited Automatic focussing systems
GB2157852A (en) * 1984-04-18 1985-10-30 Smith Kenneth C A The compensation of instabilities in charged-particle beams

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221763A (en) * 1975-08-13 1977-02-18 Hitachi Ltd Electronic microscope
JPS5457949A (en) * 1977-10-18 1979-05-10 Jeol Ltd Automatic focusing unit for scanning electron microscope and so on
JPS5492050A (en) * 1977-12-29 1979-07-20 Jeol Ltd Method and apparatus for astigmatic correction of scanning electronic microscope and others
US4387304A (en) * 1981-04-06 1983-06-07 Mcdonnell Douglas Corporation Phase dependent SEM IC chip testing with voltage contrast
GB2118009B (en) * 1982-03-02 1985-09-04 Cambridge Instr Ltd Improvements in and relating to electron beam focussing
JPS58152354A (ja) * 1982-03-05 1983-09-09 Hitachi Ltd 電子顕微鏡の軸調整装置
JPS5918555A (ja) * 1982-07-22 1984-01-30 Erionikusu:Kk 荷電粒子線取扱方法および装置
JPS6070651A (ja) * 1983-09-28 1985-04-22 Hitachi Ltd 焦点合わせ方法およびその装置
US4595836A (en) * 1984-06-29 1986-06-17 International Business Machines Corporation Alignment correction technique
US4879468A (en) * 1985-10-28 1989-11-07 Trw Inc. Photoionization optical filter and detector
US4764818A (en) * 1986-02-03 1988-08-16 Electron Beam Memories Electron beam memory system with improved high rate digital beam pulsing system
JPS63119147A (ja) * 1986-11-07 1988-05-23 Jeol Ltd 荷電粒子線の集束状態を検出する装置
JPH01255142A (ja) * 1988-04-01 1989-10-12 Nichidenshi Tekunikusu:Kk 電子顕微鏡のオートフォーカス回路
JPH0689687A (ja) * 1990-12-27 1994-03-29 Jeol Ltd 走査電子顕微鏡における自動焦点合わせ装置
JPH0594798A (ja) * 1991-05-21 1993-04-16 Jeol Ltd 焦点深度切り換え可能な電子顕微鏡等の電子光学観察装置
JP2535695B2 (ja) * 1992-01-13 1996-09-18 株式会社東芝 走査型電子顕微鏡の自動焦点合わせ方法
US5216235A (en) * 1992-04-24 1993-06-01 Amray, Inc. Opto-mechanical automatic focusing system and method
US6365897B1 (en) 1997-12-18 2002-04-02 Nikon Corporation Electron beam type inspection device and method of making same
US6278114B1 (en) 1997-12-19 2001-08-21 Kabushiki Kaisha Toshiba Method and apparatus for measuring dimensions of a feature of a specimen
US7262765B2 (en) * 1999-08-05 2007-08-28 Microvision, Inc. Apparatuses and methods for utilizing non-ideal light sources
JP2004055239A (ja) * 2002-07-18 2004-02-19 Topcon Corp 走査形電子顕微鏡
EP1777728A1 (en) * 2005-10-20 2007-04-25 Carl Zeiss SMS GmbH Lithography system
JP4896626B2 (ja) * 2006-08-22 2012-03-14 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP4945463B2 (ja) * 2008-01-18 2012-06-06 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356792A (en) * 1964-06-02 1967-12-05 Hazeltine Research Inc Automatic electron beam focusing system
US3409799A (en) * 1966-08-29 1968-11-05 Ibm Automatic focusing system for beam devices
US3436589A (en) * 1967-01-12 1969-04-01 Hughes Aircraft Co Focus monitor arrangement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4169240A (en) 1976-07-30 1979-09-25 Cambridge Scientific Instruments Limited Automatic focussing systems
GB2157852A (en) * 1984-04-18 1985-10-30 Smith Kenneth C A The compensation of instabilities in charged-particle beams

Also Published As

Publication number Publication date
US3937959A (en) 1976-02-10
FR2255701B1 (enExample) 1978-04-28
DE2461202A1 (de) 1975-07-03
DE2461202C3 (de) 1979-11-29
DE2461202B2 (de) 1979-04-12
FR2255701A1 (enExample) 1975-07-18

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19931220