GB1468137A - High intensity radiation source - Google Patents

High intensity radiation source

Info

Publication number
GB1468137A
GB1468137A GB2524775A GB2524775A GB1468137A GB 1468137 A GB1468137 A GB 1468137A GB 2524775 A GB2524775 A GB 2524775A GB 2524775 A GB2524775 A GB 2524775A GB 1468137 A GB1468137 A GB 1468137A
Authority
GB
United Kingdom
Prior art keywords
arc
liquid
gas
anode
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2524775A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canadian Patents and Development Ltd
Original Assignee
Canadian Patents and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canadian Patents and Development Ltd filed Critical Canadian Patents and Development Ltd
Publication of GB1468137A publication Critical patent/GB1468137A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/28—Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
  • Plasma Technology (AREA)
GB2524775A 1974-06-13 1975-06-12 High intensity radiation source Expired GB1468137A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47887274A 1974-06-13 1974-06-13

Publications (1)

Publication Number Publication Date
GB1468137A true GB1468137A (en) 1977-03-23

Family

ID=23901715

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2524775A Expired GB1468137A (en) 1974-06-13 1975-06-12 High intensity radiation source

Country Status (6)

Country Link
JP (1) JPS5111684A (https=)
CA (1) CA1015817A (https=)
DE (1) DE2525401C3 (https=)
FR (1) FR2275024A1 (https=)
GB (1) GB1468137A (https=)
NL (1) NL166580C (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005078762A3 (en) * 2004-02-12 2006-06-01 Mattson Tech Canada Inc High-intensity electromagnetic radiation apparatus and methods
US7781947B2 (en) 2004-02-12 2010-08-24 Mattson Technology Canada, Inc. Apparatus and methods for producing electromagnetic radiation

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2310883A1 (en) 1999-06-07 2000-12-07 Norman L. Arrison Method and apparatus for fracturing brittle materials by thermal stressing
US6912356B2 (en) 1999-06-07 2005-06-28 Diversified Industries Ltd. Method and apparatus for fracturing brittle materials by thermal stressing
US6621199B1 (en) 2000-01-21 2003-09-16 Vortek Industries Ltd. High intensity electromagnetic radiation apparatus and method
JP2011014541A (ja) * 2010-07-09 2011-01-20 Mattson Technology Canada Inc 高強度の電磁放射線発生装置及び発生方法
DE102011089090B4 (de) * 2011-12-19 2014-07-03 Von Ardenne Anlagentechnik Gmbh Gasentladungslampe mit Kühleinrichtung
US9927094B2 (en) * 2012-01-17 2018-03-27 Kla-Tencor Corporation Plasma cell for providing VUV filtering in a laser-sustained plasma light source

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005078762A3 (en) * 2004-02-12 2006-06-01 Mattson Tech Canada Inc High-intensity electromagnetic radiation apparatus and methods
US7781947B2 (en) 2004-02-12 2010-08-24 Mattson Technology Canada, Inc. Apparatus and methods for producing electromagnetic radiation
US8384274B2 (en) 2004-02-12 2013-02-26 Mattson Technology, Inc. High-intensity electromagnetic radiation apparatus and methods

Also Published As

Publication number Publication date
DE2525401C3 (de) 1978-06-22
JPS5111684A (ja) 1976-01-29
NL166580B (nl) 1981-03-16
JPS5340274B2 (https=) 1978-10-26
FR2275024B1 (https=) 1978-06-23
FR2275024A1 (fr) 1976-01-09
DE2525401A1 (de) 1976-01-02
CA1015817A (en) 1977-08-16
DE2525401B2 (de) 1977-10-27
NL166580C (nl) 1981-08-17
NL7506545A (nl) 1975-12-16

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Legal Events

Date Code Title Description
PS Patent sealed
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19940612