GB1459932A - Corpuscular beam apparatus - Google Patents

Corpuscular beam apparatus

Info

Publication number
GB1459932A
GB1459932A GB642174A GB642174A GB1459932A GB 1459932 A GB1459932 A GB 1459932A GB 642174 A GB642174 A GB 642174A GB 642174 A GB642174 A GB 642174A GB 1459932 A GB1459932 A GB 1459932A
Authority
GB
United Kingdom
Prior art keywords
beam apparatus
bores
feb
balls
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB642174A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1459932A publication Critical patent/GB1459932A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)

Abstract

1459932 Electron or ion beam apparatus SIEMENS AG 12 Feb 1974 [27 Feb 1973] 06421/74 Heading H1D An adjustable mounting for an object or a diaphragm in an electron or ion beam apparatus, such as a microscope, comprises an object table 3 adjustable in a plane transverse to the beam direction by sliding over body 2 and external adjusting means 12 acting on an intermediate member 10 which rolls in a direction transverse to the beam direction on at least two balls 8 in bores 9 in the object table 3, the balls being slightly smaller by several microns than the bores so that there is a lost motion between member 10 and the table 3. Member 10 and table 3 are pushed downwards by springs 11, 7.
GB642174A 1973-02-27 1974-02-12 Corpuscular beam apparatus Expired GB1459932A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2310355A DE2310355C3 (en) 1973-02-27 1973-02-27 Adjustment device for particle beam devices, in particular electron microscopes

Publications (1)

Publication Number Publication Date
GB1459932A true GB1459932A (en) 1976-12-31

Family

ID=5873563

Family Applications (1)

Application Number Title Priority Date Filing Date
GB642174A Expired GB1459932A (en) 1973-02-27 1974-02-12 Corpuscular beam apparatus

Country Status (5)

Country Link
US (1) US3909611A (en)
JP (1) JPS502458A (en)
DE (1) DE2310355C3 (en)
GB (1) GB1459932A (en)
NL (1) NL7315331A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4774903A (en) * 1986-02-12 1988-10-04 The Marconi Company Limited Mooring tether

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55165628A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Apparatus for electron-beam irradiation
DE3128814A1 (en) * 1981-07-21 1983-02-10 Siemens AG, 1000 Berlin und 8000 München ELECTRICALLY CONDUCTIVE SAMPLE HOLDER FOR THE ANALYSIS TECHNOLOGY OF SECONDARY ION MASS SPECTROMETRY
US4996433A (en) * 1989-11-06 1991-02-26 Gatan, Inc. Specimen heating holder for electron microscopes
DE69128104T2 (en) * 1990-05-18 1998-04-09 Hitachi Ltd Electron microscope, sample actuator for an electron microscope and method for observing microscopic images
US5786601A (en) * 1994-06-28 1998-07-28 Leica Lithography Systems Ltd. Electron beam lithography machine
JP4429783B2 (en) * 2004-04-13 2010-03-10 日本電子株式会社 Aperture plate support mechanism and charged particle beam apparatus including the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1052542A (en) * 1964-01-21
US3628013A (en) * 1969-08-29 1971-12-14 Max Planck Gesellschaft Adjusting device for corpuscular-beam apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4774903A (en) * 1986-02-12 1988-10-04 The Marconi Company Limited Mooring tether

Also Published As

Publication number Publication date
DE2310355A1 (en) 1974-09-05
DE2310355B2 (en) 1975-04-03
JPS502458A (en) 1975-01-11
DE2310355C3 (en) 1975-11-13
US3909611A (en) 1975-09-30
NL7315331A (en) 1974-08-29

Similar Documents

Publication Publication Date Title
GB1313727A (en) Robot devices
GB1480167A (en) Apparatus for orienting and maintaining a rod in any direction
GB1459932A (en) Corpuscular beam apparatus
GB823659A (en) Improved vehicle frame and suspension system
JPS53119775A (en) Bender used for press
GB1323156A (en) Television deflection coil assemblies
GB1230404A (en)
IE37357B1 (en) Static convergence device for electron beams
CA935529A (en) Circuit for an electro-eroding machine for the control of the relative movement between at least one electrode and at least one workpiece
GB1163530A (en) Electron beam generating apparatus
GB1030607A (en) A machine with slide assembly
JPS5322375A (en) Beam blanking device
DE957539C (en) Rail straightening press
ES432603A1 (en) Roller guide
JPS548318A (en) Truck for car
JPS52119214A (en) Adjusting method for load bearing spring
JPS5225697A (en) Apparatus for varying of dispersion power in corpuscular beam optical systems
JPS5785229A (en) Casette holding device for electron beam exposure
JPS51136277A (en) Lens for electron particle beam
AU2307870A (en) Circuit arrangement for correcting the deflection ofan electron beam
JPS5210690A (en) Self-fischarging electric rejector
ES8400273A1 (en) Device for electron-beam welding.
GB850641A (en) Improvements in and relating to electromagnetic contactors
GB1126791A (en) Machining metallic strip
JPS5364091A (en) Mass analyzer

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee