JPS502458A - - Google Patents
Info
- Publication number
- JPS502458A JPS502458A JP49022240A JP2224074A JPS502458A JP S502458 A JPS502458 A JP S502458A JP 49022240 A JP49022240 A JP 49022240A JP 2224074 A JP2224074 A JP 2224074A JP S502458 A JPS502458 A JP S502458A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Electron Beam Exposure (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2310355A DE2310355C3 (de) | 1973-02-27 | 1973-02-27 | Verstelleinrichtung für Korpuskularstrahlgeräte, insbesondere Elektronenmikroskope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS502458A true JPS502458A (ja) | 1975-01-11 |
Family
ID=5873563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49022240A Pending JPS502458A (ja) | 1973-02-27 | 1974-02-25 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3909611A (ja) |
| JP (1) | JPS502458A (ja) |
| DE (1) | DE2310355C3 (ja) |
| GB (1) | GB1459932A (ja) |
| NL (1) | NL7315331A (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55165628A (en) * | 1979-06-12 | 1980-12-24 | Fujitsu Ltd | Apparatus for electron-beam irradiation |
| DE3128814A1 (de) * | 1981-07-21 | 1983-02-10 | Siemens AG, 1000 Berlin und 8000 München | Elektrisch leitende probenhalterung fuer die analysentechnik der sekundaerionen-massenspektrometrie |
| GB8603473D0 (en) * | 1986-02-12 | 1986-03-19 | Marconi Co Ltd | Mooring tether |
| US4996433A (en) * | 1989-11-06 | 1991-02-26 | Gatan, Inc. | Specimen heating holder for electron microscopes |
| US5153434A (en) * | 1990-05-18 | 1992-10-06 | Hitachi, Ltd. | Electron microscope and method for observing microscopic image |
| WO1996000978A1 (en) * | 1994-06-28 | 1996-01-11 | Leica Cambridge Ltd. | Electron beam lithography machine |
| JP4429783B2 (ja) * | 2004-04-13 | 2010-03-10 | 日本電子株式会社 | アパーチャ板支持機構及びそれを備えた荷電粒子ビーム装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1052542A (ja) * | 1964-01-21 | |||
| US3628013A (en) * | 1969-08-29 | 1971-12-14 | Max Planck Gesellschaft | Adjusting device for corpuscular-beam apparatus |
-
1973
- 1973-02-27 DE DE2310355A patent/DE2310355C3/de not_active Expired
- 1973-11-08 NL NL7315331A patent/NL7315331A/xx not_active Application Discontinuation
-
1974
- 1974-02-12 GB GB642174A patent/GB1459932A/en not_active Expired
- 1974-02-20 US US443946A patent/US3909611A/en not_active Expired - Lifetime
- 1974-02-25 JP JP49022240A patent/JPS502458A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2310355A1 (de) | 1974-09-05 |
| DE2310355B2 (ja) | 1975-04-03 |
| US3909611A (en) | 1975-09-30 |
| DE2310355C3 (de) | 1975-11-13 |
| NL7315331A (ja) | 1974-08-29 |
| GB1459932A (en) | 1976-12-31 |