GB1442507A - Apparatus for displaying the energy distribution of a charged particle beam - Google Patents

Apparatus for displaying the energy distribution of a charged particle beam

Info

Publication number
GB1442507A
GB1442507A GB2323574*[A GB2323574A GB1442507A GB 1442507 A GB1442507 A GB 1442507A GB 2323574 A GB2323574 A GB 2323574A GB 1442507 A GB1442507 A GB 1442507A
Authority
GB
United Kingdom
Prior art keywords
displaying
charged particle
particle beam
energy distribution
distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2323574*[A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1442507A publication Critical patent/GB1442507A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
GB2323574*[A 1973-08-22 1974-07-26 Apparatus for displaying the energy distribution of a charged particle beam Expired GB1442507A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9417073A JPS532755B2 (enrdf_load_stackoverflow) 1973-08-22 1973-08-22

Publications (1)

Publication Number Publication Date
GB1442507A true GB1442507A (en) 1976-07-14

Family

ID=14102864

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2323574*[A Expired GB1442507A (en) 1973-08-22 1974-07-26 Apparatus for displaying the energy distribution of a charged particle beam

Country Status (6)

Country Link
US (1) US3909610A (enrdf_load_stackoverflow)
JP (1) JPS532755B2 (enrdf_load_stackoverflow)
DE (1) DE2440120A1 (enrdf_load_stackoverflow)
FR (1) FR2241785B1 (enrdf_load_stackoverflow)
GB (1) GB1442507A (enrdf_load_stackoverflow)
NL (1) NL180155C (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
JPS5780649A (en) * 1980-11-10 1982-05-20 Hitachi Ltd Electron ray energy analyzer
NL8600685A (nl) * 1986-03-18 1987-10-16 Philips Nv Apparaat voor energie selectieve afbeelding.
DE3820549A1 (de) * 1988-06-16 1989-12-21 Fraunhofer Ges Forschung Verfahren und vorrichtung zur untersuchung von membranoberflaechen
JPH04264243A (ja) * 1991-02-20 1992-09-21 Jeol Ltd オージェ像計測におけるピークエネルギーシフト補正法
JPH1097836A (ja) * 1996-09-24 1998-04-14 Hitachi Keisokki Service Kk 走査形電子顕微鏡
DE59806059D1 (de) * 1997-07-04 2002-11-28 Deutsches Krebsforsch Verfahren zur detektion eines elementes in einer probe
ES2602055T3 (es) * 2012-03-06 2017-02-17 Scienta Omicron Ab Disposición de análisis para espectrómetro de partículas

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
US3812288A (en) * 1972-11-21 1974-05-21 Edax Int Inc Television display system

Also Published As

Publication number Publication date
FR2241785B1 (enrdf_load_stackoverflow) 1977-03-25
JPS5044889A (enrdf_load_stackoverflow) 1975-04-22
JPS532755B2 (enrdf_load_stackoverflow) 1978-01-31
NL180155B (nl) 1986-08-01
DE2440120A1 (de) 1975-03-27
FR2241785A1 (enrdf_load_stackoverflow) 1975-03-21
NL7410276A (nl) 1975-02-25
NL180155C (nl) 1987-01-02
US3909610A (en) 1975-09-30

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee