JPS532755B2 - - Google Patents

Info

Publication number
JPS532755B2
JPS532755B2 JP9417073A JP9417073A JPS532755B2 JP S532755 B2 JPS532755 B2 JP S532755B2 JP 9417073 A JP9417073 A JP 9417073A JP 9417073 A JP9417073 A JP 9417073A JP S532755 B2 JPS532755 B2 JP S532755B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9417073A
Other languages
Japanese (ja)
Other versions
JPS5044889A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9417073A priority Critical patent/JPS532755B2/ja
Priority to GB2323574*[A priority patent/GB1442507A/en
Priority to NLAANVRAGE7410276,A priority patent/NL180155C/xx
Priority to US495665A priority patent/US3909610A/en
Priority to FR7428731A priority patent/FR2241785B1/fr
Priority to DE2440120A priority patent/DE2440120A1/de
Publication of JPS5044889A publication Critical patent/JPS5044889A/ja
Publication of JPS532755B2 publication Critical patent/JPS532755B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP9417073A 1973-08-22 1973-08-22 Expired JPS532755B2 (enrdf_load_stackoverflow)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP9417073A JPS532755B2 (enrdf_load_stackoverflow) 1973-08-22 1973-08-22
GB2323574*[A GB1442507A (en) 1973-08-22 1974-07-26 Apparatus for displaying the energy distribution of a charged particle beam
NLAANVRAGE7410276,A NL180155C (nl) 1973-08-22 1974-07-31 Inrichting voor het weergeven van de energieverdeling van geladen deeltjes.
US495665A US3909610A (en) 1973-08-22 1974-08-08 Apparatus for displaying the energy distribution of a charged particle beam
FR7428731A FR2241785B1 (enrdf_load_stackoverflow) 1973-08-22 1974-08-21
DE2440120A DE2440120A1 (de) 1973-08-22 1974-08-21 Vorrichtung zur wiedergabe der energieverteilung eines aus geladenen teilchen bestehenden strahles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9417073A JPS532755B2 (enrdf_load_stackoverflow) 1973-08-22 1973-08-22

Publications (2)

Publication Number Publication Date
JPS5044889A JPS5044889A (enrdf_load_stackoverflow) 1975-04-22
JPS532755B2 true JPS532755B2 (enrdf_load_stackoverflow) 1978-01-31

Family

ID=14102864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9417073A Expired JPS532755B2 (enrdf_load_stackoverflow) 1973-08-22 1973-08-22

Country Status (6)

Country Link
US (1) US3909610A (enrdf_load_stackoverflow)
JP (1) JPS532755B2 (enrdf_load_stackoverflow)
DE (1) DE2440120A1 (enrdf_load_stackoverflow)
FR (1) FR2241785B1 (enrdf_load_stackoverflow)
GB (1) GB1442507A (enrdf_load_stackoverflow)
NL (1) NL180155C (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
JPS5780649A (en) * 1980-11-10 1982-05-20 Hitachi Ltd Electron ray energy analyzer
NL8600685A (nl) * 1986-03-18 1987-10-16 Philips Nv Apparaat voor energie selectieve afbeelding.
DE3820549A1 (de) * 1988-06-16 1989-12-21 Fraunhofer Ges Forschung Verfahren und vorrichtung zur untersuchung von membranoberflaechen
JPH04264243A (ja) * 1991-02-20 1992-09-21 Jeol Ltd オージェ像計測におけるピークエネルギーシフト補正法
JPH1097836A (ja) * 1996-09-24 1998-04-14 Hitachi Keisokki Service Kk 走査形電子顕微鏡
WO1999001753A2 (de) * 1997-07-04 1999-01-14 Deutsches Krebsforschungszentrum Stiftung des öffentlichen Rechts Verfahren zur detektion eines elementes in einer probe
DE12870629T1 (de) * 2012-03-06 2015-03-19 Vg Scienta Ab Analysatoranordnung für Teilchenspektrometer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
US3812288A (en) * 1972-11-21 1974-05-21 Edax Int Inc Television display system

Also Published As

Publication number Publication date
JPS5044889A (enrdf_load_stackoverflow) 1975-04-22
US3909610A (en) 1975-09-30
NL7410276A (nl) 1975-02-25
FR2241785A1 (enrdf_load_stackoverflow) 1975-03-21
FR2241785B1 (enrdf_load_stackoverflow) 1977-03-25
GB1442507A (en) 1976-07-14
NL180155B (nl) 1986-08-01
DE2440120A1 (de) 1975-03-27
NL180155C (nl) 1987-01-02

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