GB1431736A - Device for measuring electron signals accompanied by strong back-ground noise - Google Patents
Device for measuring electron signals accompanied by strong back-ground noiseInfo
- Publication number
- GB1431736A GB1431736A GB1106374A GB1106374A GB1431736A GB 1431736 A GB1431736 A GB 1431736A GB 1106374 A GB1106374 A GB 1106374A GB 1106374 A GB1106374 A GB 1106374A GB 1431736 A GB1431736 A GB 1431736A
- Authority
- GB
- United Kingdom
- Prior art keywords
- analyser
- spectrum
- output
- electron beam
- peak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48028724A JPS49118493A (fr) | 1973-03-12 | 1973-03-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1431736A true GB1431736A (en) | 1976-04-14 |
Family
ID=12256375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1106374A Expired GB1431736A (en) | 1973-03-12 | 1974-03-12 | Device for measuring electron signals accompanied by strong back-ground noise |
Country Status (5)
Country | Link |
---|---|
US (1) | US3914606A (fr) |
JP (1) | JPS49118493A (fr) |
DE (1) | DE2411841C3 (fr) |
FR (1) | FR2221729B1 (fr) |
GB (1) | GB1431736A (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4126781A (en) * | 1977-05-10 | 1978-11-21 | Extranuclear Laboratories, Inc. | Method and apparatus for producing electrostatic fields by surface currents on resistive materials with applications to charged particle optics and energy analysis |
US4459482A (en) * | 1982-05-06 | 1984-07-10 | Bales Maurice J | Auger spectroscopic technique measuring the number of electrons emitted from a surface as a function of the energy level of those electrons |
US4638446A (en) * | 1983-05-31 | 1987-01-20 | The Perkin-Elmer Corporation | Apparatus and method for reducing topographical effects in an auger image |
IE58049B1 (en) * | 1985-05-21 | 1993-06-16 | Tekscan Ltd | Surface analysis microscopy apparatus |
US5008535A (en) * | 1988-09-02 | 1991-04-16 | U.S. Philips Corporation | Energy analyzer and spectrometer for low-energy electrons |
JPH02145950A (ja) * | 1988-11-26 | 1990-06-05 | Shimadzu Corp | X線光電子分析装置 |
JP3143279B2 (ja) * | 1993-09-03 | 2001-03-07 | 日本電子株式会社 | 電子エネルギー分析器 |
GB9719417D0 (en) * | 1997-09-13 | 1997-11-12 | Univ York | Electron microscope |
US8283631B2 (en) * | 2008-05-08 | 2012-10-09 | Kla-Tencor Corporation | In-situ differential spectroscopy |
JP6467600B2 (ja) * | 2016-09-30 | 2019-02-13 | 株式会社リガク | 波長分散型蛍光x線分析装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1240385A (en) * | 1969-04-15 | 1971-07-21 | Ass Elect Ind | Improvements in or relating to waveform measuring |
CH505393A (de) * | 1969-09-29 | 1971-03-31 | Bbc Brown Boveri & Cie | Gerät zur Messung der Energie von elektrisch geladenen Teilchen oder zum Erzeugen elektrisch geladener Teilchen bestimmter Energie und Verfahren zum Betrieb dieses Gerätes |
US3631238A (en) * | 1969-11-17 | 1971-12-28 | North American Rockwell | Method of measuring electric potential on an object surface using auger electron spectroscopy |
US3626184A (en) * | 1970-03-05 | 1971-12-07 | Atomic Energy Commission | Detector system for a scanning electron microscope |
JPS521869B2 (fr) * | 1972-07-11 | 1977-01-18 |
-
1973
- 1973-03-12 JP JP48028724A patent/JPS49118493A/ja active Pending
-
1974
- 1974-03-06 US US448480A patent/US3914606A/en not_active Expired - Lifetime
- 1974-03-11 FR FR7408200A patent/FR2221729B1/fr not_active Expired
- 1974-03-12 DE DE2411841A patent/DE2411841C3/de not_active Expired
- 1974-03-12 GB GB1106374A patent/GB1431736A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2411841A1 (de) | 1974-09-19 |
JPS49118493A (fr) | 1974-11-12 |
US3914606A (en) | 1975-10-21 |
FR2221729B1 (fr) | 1976-06-25 |
DE2411841C3 (de) | 1980-02-07 |
DE2411841B2 (de) | 1979-05-31 |
FR2221729A1 (fr) | 1974-10-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |