GB1426511A - Method for producing a semiconductor device having a very small deviation in lattice constant - Google Patents
Method for producing a semiconductor device having a very small deviation in lattice constantInfo
- Publication number
- GB1426511A GB1426511A GB17173A GB17173A GB1426511A GB 1426511 A GB1426511 A GB 1426511A GB 17173 A GB17173 A GB 17173A GB 17173 A GB17173 A GB 17173A GB 1426511 A GB1426511 A GB 1426511A
- Authority
- GB
- United Kingdom
- Prior art keywords
- lattice constant
- producing
- semiconductor device
- small deviation
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical group [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table further characterised by the doping material
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Recrystallisation Techniques (AREA)
Abstract
1426511 Semi-conductors HANDOTAI KENKYU SHINKOKAI 2 Feb 1973 171/73 Heading H1K Variation in the lattice constant of a germanium region due to the presence of impurity atoms are compensated by doping the region with In and As.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB17173A GB1426511A (en) | 1973-02-02 | 1973-02-02 | Method for producing a semiconductor device having a very small deviation in lattice constant |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB17173A GB1426511A (en) | 1973-02-02 | 1973-02-02 | Method for producing a semiconductor device having a very small deviation in lattice constant |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1426511A true GB1426511A (en) | 1976-03-03 |
Family
ID=9699662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB17173A Expired GB1426511A (en) | 1973-02-02 | 1973-02-02 | Method for producing a semiconductor device having a very small deviation in lattice constant |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1426511A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0903429A2 (en) * | 1997-08-20 | 1999-03-24 | Japan Science and Technology Corporation | Process for producing heavily doped silicon |
-
1973
- 1973-02-02 GB GB17173A patent/GB1426511A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0903429A2 (en) * | 1997-08-20 | 1999-03-24 | Japan Science and Technology Corporation | Process for producing heavily doped silicon |
EP0903429A3 (en) * | 1997-08-20 | 2000-08-09 | Japan Science and Technology Corporation | Process for producing heavily doped silicon |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PE20 | Patent expired after termination of 20 years |
Effective date: 19930131 |