GB1399918A - Epitaxial crystal deposition - Google Patents
Epitaxial crystal depositionInfo
- Publication number
- GB1399918A GB1399918A GB3213272A GB3213272A GB1399918A GB 1399918 A GB1399918 A GB 1399918A GB 3213272 A GB3213272 A GB 3213272A GB 3213272 A GB3213272 A GB 3213272A GB 1399918 A GB1399918 A GB 1399918A
- Authority
- GB
- United Kingdom
- Prior art keywords
- liquid
- substrate
- slide
- jig
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 title abstract 2
- 230000008021 deposition Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 8
- 239000007788 liquid Substances 0.000 abstract 6
- 239000000463 material Substances 0.000 abstract 6
- 239000011344 liquid material Substances 0.000 abstract 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 abstract 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 abstract 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052733 gallium Inorganic materials 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/12—Liquid-phase epitaxial-layer growth characterised by the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/063—Sliding boat system
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7125739A FR2145831A6 (cg-RX-API-DMAC7.html) | 1971-07-13 | 1971-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1399918A true GB1399918A (en) | 1975-07-02 |
Family
ID=9080335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3213272A Expired GB1399918A (en) | 1971-07-13 | 1972-07-10 | Epitaxial crystal deposition |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS5219191B1 (cg-RX-API-DMAC7.html) |
| BE (1) | BE786137A (cg-RX-API-DMAC7.html) |
| CA (1) | CA978663A (cg-RX-API-DMAC7.html) |
| DE (1) | DE2233734C3 (cg-RX-API-DMAC7.html) |
| FR (1) | FR2145831A6 (cg-RX-API-DMAC7.html) |
| GB (1) | GB1399918A (cg-RX-API-DMAC7.html) |
| IT (1) | IT964629B (cg-RX-API-DMAC7.html) |
| NL (1) | NL7209537A (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5120081A (en) * | 1974-08-12 | 1976-02-17 | Hitachi Ltd | Ketsushoseichohoho oyobi sochi |
-
0
- BE BE786137D patent/BE786137A/nl not_active IP Right Cessation
-
1971
- 1971-07-13 FR FR7125739A patent/FR2145831A6/fr not_active Expired
-
1972
- 1972-07-08 DE DE19722233734 patent/DE2233734C3/de not_active Expired
- 1972-07-08 NL NL7209537A patent/NL7209537A/xx unknown
- 1972-07-10 IT IT6922172A patent/IT964629B/it active
- 1972-07-10 GB GB3213272A patent/GB1399918A/en not_active Expired
- 1972-07-12 CA CA146,902A patent/CA978663A/en not_active Expired
- 1972-07-13 JP JP6958872A patent/JPS5219191B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| IT964629B (it) | 1974-01-31 |
| NL7209537A (cg-RX-API-DMAC7.html) | 1973-01-16 |
| CA978663A (en) | 1975-11-25 |
| FR2145831A6 (cg-RX-API-DMAC7.html) | 1973-02-23 |
| BE786137A (nl) | 1973-01-11 |
| DE2233734A1 (de) | 1973-01-18 |
| DE2233734C3 (de) | 1978-04-27 |
| JPS5219191B1 (cg-RX-API-DMAC7.html) | 1977-05-26 |
| DE2233734B2 (de) | 1977-08-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |