GB1396038A - Charged particle accelerating device - Google Patents
Charged particle accelerating deviceInfo
- Publication number
- GB1396038A GB1396038A GB2196072A GB2196072A GB1396038A GB 1396038 A GB1396038 A GB 1396038A GB 2196072 A GB2196072 A GB 2196072A GB 2196072 A GB2196072 A GB 2196072A GB 1396038 A GB1396038 A GB 1396038A
- Authority
- GB
- United Kingdom
- Prior art keywords
- insulating
- insulating material
- conductive material
- semi
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 title 1
- 239000011810 insulating material Substances 0.000 abstract 7
- 239000004020 conductor Substances 0.000 abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000009825 accumulation Methods 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000010884 ion-beam technique Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/026—Eliminating deleterious effects due to thermal effects, electric or magnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/241—High voltage power supply or regulation circuits
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Abstract
1396038 Discharge apparatus NIHON DENSHI KK 10 May 1972 [12 May 1971 7 July 1971 17 Nov 1971] 21960/72 Heading H1D In a high voltage discharge apparatus the surface of an electrode is covered with an insulating or semi-insulating layer to prevent the occurrence of micro-discharges. In one example the control electrode of an electron microscope is covered on the side facing the accelerating electrode with insulating material such as silicon oxide or with a semi-insulating material comprising glass including dispersed lead. A semiinsulating layer should have the product of specific resistance (ohm-cm.) and thickness (microns) within the range 10<SP>3</SP> to 10<SP>12</SP>. The control electrode may be of conductive material coated with insulating material or of insulating material coated with conductive material. The region near and surrounding the aperture for passage of the beam may be coated with conductive material to prevent accumulation of charge, or the aperture may be provided with a metal lining. In another example the accelerating electrodes of an electron or ion beam accelerator are formed of conductive material coated with insulating or semi-insulating material on the side facing the higher potential, or are formed of insulating or semi-insulating material coated with conductive material; in the latter case the insulating material may be cup-shaped with an apertured base, and the cups may be stacked together to form the envelope.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3181571A JPS5248434B1 (en) | 1971-05-12 | 1971-05-12 | |
| JP5007471 | 1971-07-07 | ||
| JP46092063A JPS5247660B2 (en) | 1971-11-17 | 1971-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1396038A true GB1396038A (en) | 1975-05-29 |
Family
ID=27287479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2196072A Expired GB1396038A (en) | 1971-05-12 | 1972-05-10 | Charged particle accelerating device |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2221139B2 (en) |
| GB (1) | GB1396038A (en) |
| NL (1) | NL7206289A (en) |
-
1972
- 1972-04-28 DE DE19722221139 patent/DE2221139B2/en active Pending
- 1972-05-10 NL NL7206289A patent/NL7206289A/xx not_active Application Discontinuation
- 1972-05-10 GB GB2196072A patent/GB1396038A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7206289A (en) | 1972-11-14 |
| DE2221139A1 (en) | 1972-11-23 |
| DE2221139B2 (en) | 1974-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |