GB1370992A - Production of hollow bodies of semiconductor material open at least at one end - Google Patents

Production of hollow bodies of semiconductor material open at least at one end

Info

Publication number
GB1370992A
GB1370992A GB5003572A GB5003572A GB1370992A GB 1370992 A GB1370992 A GB 1370992A GB 5003572 A GB5003572 A GB 5003572A GB 5003572 A GB5003572 A GB 5003572A GB 1370992 A GB1370992 A GB 1370992A
Authority
GB
United Kingdom
Prior art keywords
carrier
production
heated
silicon
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5003572A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1370992A publication Critical patent/GB1370992A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
GB5003572A 1971-12-07 1972-10-31 Production of hollow bodies of semiconductor material open at least at one end Expired GB1370992A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712160713 DE2160713A1 (de) 1971-12-07 1971-12-07 Verfahren zum herstellen von mindestens einseitig offenen hohlkoerpern aus halbleitermaterial

Publications (1)

Publication Number Publication Date
GB1370992A true GB1370992A (en) 1974-10-23

Family

ID=5827295

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5003572A Expired GB1370992A (en) 1971-12-07 1972-10-31 Production of hollow bodies of semiconductor material open at least at one end

Country Status (6)

Country Link
JP (1) JPS4866070A (cg-RX-API-DMAC10.html)
DE (1) DE2160713A1 (cg-RX-API-DMAC10.html)
FR (1) FR2162443B1 (cg-RX-API-DMAC10.html)
GB (1) GB1370992A (cg-RX-API-DMAC10.html)
IT (1) IT971385B (cg-RX-API-DMAC10.html)
NL (1) NL7212470A (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
DE2160713A1 (de) 1973-06-14
FR2162443B1 (cg-RX-API-DMAC10.html) 1975-03-28
IT971385B (it) 1974-04-30
JPS4866070A (cg-RX-API-DMAC10.html) 1973-09-11
NL7212470A (cg-RX-API-DMAC10.html) 1973-06-12
FR2162443A1 (cg-RX-API-DMAC10.html) 1973-07-20

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees