JPS4866070A - - Google Patents
Info
- Publication number
- JPS4866070A JPS4866070A JP11422072A JP11422072A JPS4866070A JP S4866070 A JPS4866070 A JP S4866070A JP 11422072 A JP11422072 A JP 11422072A JP 11422072 A JP11422072 A JP 11422072A JP S4866070 A JPS4866070 A JP S4866070A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712160713 DE2160713A1 (de) | 1971-12-07 | 1971-12-07 | Verfahren zum herstellen von mindestens einseitig offenen hohlkoerpern aus halbleitermaterial |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4866070A true JPS4866070A (cg-RX-API-DMAC10.html) | 1973-09-11 |
Family
ID=5827295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11422072A Pending JPS4866070A (cg-RX-API-DMAC10.html) | 1971-12-07 | 1972-11-14 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4866070A (cg-RX-API-DMAC10.html) |
| DE (1) | DE2160713A1 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2162443B1 (cg-RX-API-DMAC10.html) |
| GB (1) | GB1370992A (cg-RX-API-DMAC10.html) |
| IT (1) | IT971385B (cg-RX-API-DMAC10.html) |
| NL (1) | NL7212470A (cg-RX-API-DMAC10.html) |
-
1971
- 1971-12-07 DE DE19712160713 patent/DE2160713A1/de active Pending
-
1972
- 1972-09-14 NL NL7212470A patent/NL7212470A/xx unknown
- 1972-10-31 GB GB5003572A patent/GB1370992A/en not_active Expired
- 1972-11-14 JP JP11422072A patent/JPS4866070A/ja active Pending
- 1972-11-30 IT IT3230072A patent/IT971385B/it active
- 1972-12-05 FR FR7243181A patent/FR2162443B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2160713A1 (de) | 1973-06-14 |
| FR2162443B1 (cg-RX-API-DMAC10.html) | 1975-03-28 |
| GB1370992A (en) | 1974-10-23 |
| IT971385B (it) | 1974-04-30 |
| NL7212470A (cg-RX-API-DMAC10.html) | 1973-06-12 |
| FR2162443A1 (cg-RX-API-DMAC10.html) | 1973-07-20 |