GB1363907A - Thin film devices - Google Patents

Thin film devices

Info

Publication number
GB1363907A
GB1363907A GB5131471A GB5131471A GB1363907A GB 1363907 A GB1363907 A GB 1363907A GB 5131471 A GB5131471 A GB 5131471A GB 5131471 A GB5131471 A GB 5131471A GB 1363907 A GB1363907 A GB 1363907A
Authority
GB
United Kingdom
Prior art keywords
thin film
contact
nov
deposition
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5131471A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB1363907A publication Critical patent/GB1363907A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Non-Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
GB5131471A 1970-11-06 1971-11-04 Thin film devices Expired GB1363907A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8746270A 1970-11-06 1970-11-06

Publications (1)

Publication Number Publication Date
GB1363907A true GB1363907A (en) 1974-08-21

Family

ID=22205332

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5131471A Expired GB1363907A (en) 1970-11-06 1971-11-04 Thin film devices

Country Status (9)

Country Link
US (1) US3765937A (enrdf_load_stackoverflow)
JP (1) JPS5146250B1 (enrdf_load_stackoverflow)
BE (1) BE774894A (enrdf_load_stackoverflow)
CA (1) CA929277A (enrdf_load_stackoverflow)
DE (1) DE2154794B2 (enrdf_load_stackoverflow)
FR (1) FR2113648A1 (enrdf_load_stackoverflow)
GB (1) GB1363907A (enrdf_load_stackoverflow)
IT (1) IT942287B (enrdf_load_stackoverflow)
SE (1) SE370162B (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3925572A (en) * 1972-10-12 1975-12-09 Ncr Co Multilevel conductor structure and method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2000226A (en) * 1932-02-29 1935-05-07 Lehon Co Method of treating asphalt shingles and composition therefor
US2063268A (en) * 1933-05-15 1936-12-08 Patent & Licensing Corp Roofing unit and method of making the same
US2563936A (en) * 1948-02-06 1951-08-14 Willard Storage Battery Co Method of manufacturing battery grids
DE1085209B (de) * 1959-12-12 1960-07-14 Dielektra Ag Gedruckte elektrische Leiterplatte
NL299975A (enrdf_load_stackoverflow) * 1962-11-01
US3322655A (en) * 1963-08-12 1967-05-30 United Aircraft Corp Method of making terminated microwafers
US3329922A (en) * 1964-05-08 1967-07-04 Allen Bradley Co Welded terminal resistor
USB392136I5 (enrdf_load_stackoverflow) * 1964-08-26
US3387952A (en) * 1964-11-09 1968-06-11 Western Electric Co Multilayer thin-film coated substrate with metallic parting layer to permit selectiveequential etching
US3437888A (en) * 1966-07-01 1969-04-08 Union Carbide Corp Method of providing electrical contacts by sputtering a film of gold on a layer of sputtered molybdenum
US3591413A (en) * 1967-08-25 1971-07-06 Nippon Electric Co Resistor structure for thin film variable resistor
US3469226A (en) * 1967-10-26 1969-09-23 Angstrohm Precision Inc Thin film resistor

Also Published As

Publication number Publication date
FR2113648A1 (enrdf_load_stackoverflow) 1972-06-23
CA929277A (en) 1973-06-26
JPS5146250B1 (enrdf_load_stackoverflow) 1976-12-08
SE370162B (enrdf_load_stackoverflow) 1974-09-30
DE2154794A1 (de) 1972-05-25
DE2154794B2 (de) 1972-10-05
BE774894A (fr) 1972-03-01
US3765937A (en) 1973-10-16
IT942287B (it) 1973-03-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee