GB1363907A - Thin film devices - Google Patents
Thin film devicesInfo
- Publication number
- GB1363907A GB1363907A GB5131471A GB5131471A GB1363907A GB 1363907 A GB1363907 A GB 1363907A GB 5131471 A GB5131471 A GB 5131471A GB 5131471 A GB5131471 A GB 5131471A GB 1363907 A GB1363907 A GB 1363907A
- Authority
- GB
- United Kingdom
- Prior art keywords
- thin film
- contact
- nov
- deposition
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 3
- 230000008021 deposition Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
- H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US8746270A | 1970-11-06 | 1970-11-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1363907A true GB1363907A (en) | 1974-08-21 |
Family
ID=22205332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5131471A Expired GB1363907A (en) | 1970-11-06 | 1971-11-04 | Thin film devices |
Country Status (9)
Country | Link |
---|---|
US (1) | US3765937A (enrdf_load_stackoverflow) |
JP (1) | JPS5146250B1 (enrdf_load_stackoverflow) |
BE (1) | BE774894A (enrdf_load_stackoverflow) |
CA (1) | CA929277A (enrdf_load_stackoverflow) |
DE (1) | DE2154794B2 (enrdf_load_stackoverflow) |
FR (1) | FR2113648A1 (enrdf_load_stackoverflow) |
GB (1) | GB1363907A (enrdf_load_stackoverflow) |
IT (1) | IT942287B (enrdf_load_stackoverflow) |
SE (1) | SE370162B (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3925572A (en) * | 1972-10-12 | 1975-12-09 | Ncr Co | Multilevel conductor structure and method |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2000226A (en) * | 1932-02-29 | 1935-05-07 | Lehon Co | Method of treating asphalt shingles and composition therefor |
US2063268A (en) * | 1933-05-15 | 1936-12-08 | Patent & Licensing Corp | Roofing unit and method of making the same |
US2563936A (en) * | 1948-02-06 | 1951-08-14 | Willard Storage Battery Co | Method of manufacturing battery grids |
DE1085209B (de) * | 1959-12-12 | 1960-07-14 | Dielektra Ag | Gedruckte elektrische Leiterplatte |
NL299975A (enrdf_load_stackoverflow) * | 1962-11-01 | |||
US3322655A (en) * | 1963-08-12 | 1967-05-30 | United Aircraft Corp | Method of making terminated microwafers |
US3329922A (en) * | 1964-05-08 | 1967-07-04 | Allen Bradley Co | Welded terminal resistor |
USB392136I5 (enrdf_load_stackoverflow) * | 1964-08-26 | |||
US3387952A (en) * | 1964-11-09 | 1968-06-11 | Western Electric Co | Multilayer thin-film coated substrate with metallic parting layer to permit selectiveequential etching |
US3437888A (en) * | 1966-07-01 | 1969-04-08 | Union Carbide Corp | Method of providing electrical contacts by sputtering a film of gold on a layer of sputtered molybdenum |
US3591413A (en) * | 1967-08-25 | 1971-07-06 | Nippon Electric Co | Resistor structure for thin film variable resistor |
US3469226A (en) * | 1967-10-26 | 1969-09-23 | Angstrohm Precision Inc | Thin film resistor |
-
1970
- 1970-11-06 US US00087462A patent/US3765937A/en not_active Expired - Lifetime
-
1971
- 1971-05-18 CA CA113274A patent/CA929277A/en not_active Expired
- 1971-10-26 SE SE13565/71A patent/SE370162B/xx unknown
- 1971-11-04 GB GB5131471A patent/GB1363907A/en not_active Expired
- 1971-11-04 BE BE774894A patent/BE774894A/xx unknown
- 1971-11-04 DE DE19712154794 patent/DE2154794B2/de active Granted
- 1971-11-05 FR FR7139846A patent/FR2113648A1/fr not_active Withdrawn
- 1971-11-05 IT IT53887/71A patent/IT942287B/it active
- 1971-11-06 JP JP46088002A patent/JPS5146250B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS5146250B1 (enrdf_load_stackoverflow) | 1976-12-08 |
IT942287B (it) | 1973-03-20 |
SE370162B (enrdf_load_stackoverflow) | 1974-09-30 |
CA929277A (en) | 1973-06-26 |
DE2154794A1 (de) | 1972-05-25 |
BE774894A (fr) | 1972-03-01 |
US3765937A (en) | 1973-10-16 |
FR2113648A1 (enrdf_load_stackoverflow) | 1972-06-23 |
DE2154794B2 (de) | 1972-10-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |