GB1209781A - Thin fil distributed rc network - Google Patents

Thin fil distributed rc network

Info

Publication number
GB1209781A
GB1209781A GB49351/67A GB4935167A GB1209781A GB 1209781 A GB1209781 A GB 1209781A GB 49351/67 A GB49351/67 A GB 49351/67A GB 4935167 A GB4935167 A GB 4935167A GB 1209781 A GB1209781 A GB 1209781A
Authority
GB
United Kingdom
Prior art keywords
layer
tantalum
distributed
oct
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB49351/67A
Inventor
Walter Worobey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB1209781A publication Critical patent/GB1209781A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/01Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate comprising only passive thin-film or thick-film elements formed on a common insulating substrate
    • H01L27/016Thin-film circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/40Structural combinations of fixed capacitors with other electric elements, the structure mainly consisting of a capacitor, e.g. RC combinations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49082Resistor making
    • Y10T29/49099Coating resistive material on a base

Abstract

1,209,781. Printed circuits. WESTERN ELECTRIC CO. Inc. 31 Oct. 1967 [31 Oct., 1966], No. 49351/67. Heading H1R. A thin film distributed RC network comprises a substrate 11, a layer (12) (Figs. 1 to 5, not shown) of film forming metal deposited on the substrate, a layer 14 of the oxide of the film forming metal formed by anodizing the surface except for terminal 13, and a tantalum layer 17 wherein the density of the tantalum is less than 16 grams per c.c. The first metal layer is formed by vacuum evaporation or cathode sputtering, the low density tantalum layer by cathode sputtering at 800 to 2500 volts at partial pressures of 10 to 100 microns mercury. Photoengraving techniques are used to give the desired pattern to layer 17 and the resistance of the layer is increased by anodizing until the frequency response curve equals that desired.
GB49351/67A 1966-10-31 1967-10-31 Thin fil distributed rc network Expired GB1209781A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US59080566A 1966-10-31 1966-10-31

Publications (1)

Publication Number Publication Date
GB1209781A true GB1209781A (en) 1970-10-21

Family

ID=24363791

Family Applications (1)

Application Number Title Priority Date Filing Date
GB49351/67A Expired GB1209781A (en) 1966-10-31 1967-10-31 Thin fil distributed rc network

Country Status (8)

Country Link
US (1) US3443311A (en)
BE (1) BE705351A (en)
DE (1) DE1639061B1 (en)
FR (1) FR1541382A (en)
GB (1) GB1209781A (en)
MY (1) MY7400043A (en)
NL (1) NL6714773A (en)
SE (1) SE318648B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3784951A (en) * 1968-05-22 1974-01-08 Bell Telephone Labor Inc Thin film resistors
US3615760A (en) * 1969-04-14 1971-10-26 Bell Telephone Labor Inc Calcium oxide-aluminum oxide-silicon dioxide ceramic substrate material for thin film circuits
DE2513859C2 (en) * 1975-03-27 1981-11-12 Siemens AG, 1000 Berlin und 8000 München Method for producing a capacitor-resistor network
US3993967A (en) * 1975-03-31 1976-11-23 Western Electric Company, Inc. Resistance-capacitance network
US4280889A (en) * 1976-03-11 1981-07-28 Honeywell Inc. Solid state ion responsive and reference electrodes
DE3024030A1 (en) * 1980-06-26 1982-01-14 Siemens AG, 1000 Berlin und 8000 München RC-Network film circuits - made using a polyimide film support coated on both sides with a poly:fluoroethylene-propylene! polymer
FR2505070B1 (en) * 1981-01-16 1986-04-04 Suwa Seikosha Kk NON-LINEAR DEVICE FOR A LIQUID CRYSTAL DISPLAY PANEL AND METHOD FOR MANUFACTURING SUCH A DISPLAY PANEL
GB2136235B (en) * 1983-02-22 1986-07-09 Philips Electronic Associated Rc active filter device
US5311710A (en) * 1992-03-11 1994-05-17 Eaton Jay S Portable curing cell
US5598131A (en) * 1995-11-16 1997-01-28 Emc Technology, Inc. AC coupled termination
CN106024379B (en) * 2016-05-12 2018-11-06 中国电子科技集团公司第四十一研究所 A kind of processing method of beam lead capacitance

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3330696A (en) * 1967-07-11 Method of fabricating thin film capacitors
US2694185A (en) * 1951-01-19 1954-11-09 Sprague Electric Co Electrical circuit arrangement
US3109983A (en) * 1957-05-02 1963-11-05 Glenn F Cooper Circuits with distributed characteristics
US3205555A (en) * 1961-11-07 1965-09-14 Western Electric Co Methods of making printed circuit components
US3239731A (en) * 1964-04-21 1966-03-08 Hughes Aircraft Co Self-healing thin-film capacitor

Also Published As

Publication number Publication date
FR1541382A (en) 1968-10-04
DE1639061B1 (en) 1971-08-26
US3443311A (en) 1969-05-13
BE705351A (en) 1968-03-01
NL6714773A (en) 1968-05-01
MY7400043A (en) 1974-12-31
SE318648B (en) 1969-12-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees