GB1363618A - Electron gun - Google Patents

Electron gun

Info

Publication number
GB1363618A
GB1363618A GB2093373A GB2093373A GB1363618A GB 1363618 A GB1363618 A GB 1363618A GB 2093373 A GB2093373 A GB 2093373A GB 2093373 A GB2093373 A GB 2093373A GB 1363618 A GB1363618 A GB 1363618A
Authority
GB
United Kingdom
Prior art keywords
gun
leads
support
electrode
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2093373A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Publication of GB1363618A publication Critical patent/GB1363618A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1363618 Electron beam apparatus AKASHI SEISAKUSHO KK 2 May 1973 [22 May 1972] 20933/73 Heading H1D An electron gun comprises a Wehnelt electrode 24 adjustably mounted on an insulating plate 23 carrying leads 22 to which a filament 21 is spot welded. Adjustment is achieved by making holes 23a, 25b in plates 23, 25 oversize. The gun is mounted on a support 27 by plugging leads 22 into sockets in members 28 on gun support 27 Potential to electrode 24 is supplied via a spring contact 30. To prevent short circuits due to vapour deposition leads 22 have flanges 22b and the cylinder is inset at 25b. The gun is used in scanning or transmission type electron microscopes and X-ray microanalysis.
GB2093373A 1972-05-22 1973-05-02 Electron gun Expired GB1363618A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5058772A JPS5433512B2 (en) 1972-05-22 1972-05-22

Publications (1)

Publication Number Publication Date
GB1363618A true GB1363618A (en) 1974-08-14

Family

ID=12863092

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2093373A Expired GB1363618A (en) 1972-05-22 1973-05-02 Electron gun

Country Status (5)

Country Link
US (1) US3857055A (en)
JP (1) JPS5433512B2 (en)
DE (1) DE2325993C3 (en)
FR (1) FR2185854B1 (en)
GB (1) GB1363618A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112388141A (en) * 2015-09-24 2021-02-23 阿卡姆股份公司 X-ray calibration standard object

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528595A (en) * 1975-07-09 1977-01-22 Matsushita Electric Ind Co Ltd Electron gun for electronic beam processing machines
JPS52154150U (en) * 1976-05-19 1977-11-22
EP0043184B1 (en) * 1980-05-31 1985-02-20 Bl Technology Limited Control systems for continuously variable ratio transmissions
GB8332237D0 (en) * 1983-12-02 1984-01-11 Leyland Vehicles Transmission system
GB8900210D0 (en) * 1989-01-06 1989-03-08 Fellows Thomas G Improvements in or relating to drivelines for wheeled vehicles
DE59010590D1 (en) * 1989-09-09 1997-01-16 Ptr Praezisionstech Gmbh Cathode holder for an electron gun
DE3930202A1 (en) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh ELECTRONIC BEAM GENERATOR FOR AN ELECTRONIC BEAM CANNON
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope
EP2556525B1 (en) * 2010-04-09 2018-08-22 GE Sensing & Inspection Technologies GmbH Microfocus x-ray tube with cathode element and process using the same
WO2018190436A1 (en) * 2017-04-11 2018-10-18 Mapper Lithography Ip B.V. Charged particle source module
KR102120946B1 (en) * 2018-11-16 2020-06-10 (주)엠크래프츠 Electron microscope with automatic beam alignment
CN110556279A (en) * 2019-08-13 2019-12-10 河南河大科技发展有限公司 Cathode electron gun filament device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2639397A (en) * 1949-06-04 1953-05-19 Collins Radio Co Vacuum gauge of the ionization producing type
US2932755A (en) * 1956-01-30 1960-04-12 Applied Radiation Corp Electron gun and cathode
US3187216A (en) * 1961-05-12 1965-06-01 Welding Research Inc Electron gun having a releasably clamped electron emitting element
US3263109A (en) * 1961-07-24 1966-07-26 Siemens Ag Electron source for corpuscular radiation apparatus operating on a pump including an indirectly heated cathode
US3368163A (en) * 1964-05-28 1968-02-06 Sylvania Electric Prod Ruggedized high frequency apparatus
US3358174A (en) * 1964-12-18 1967-12-12 Gen Electric Electron gun having a segmented control electrode
CH491495A (en) * 1968-05-15 1970-05-31 Eidophor Ag Cathode ray generating system with replaceable cathode
US3601651A (en) * 1970-01-09 1971-08-24 Motorola Inc Replacement cathode assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112388141A (en) * 2015-09-24 2021-02-23 阿卡姆股份公司 X-ray calibration standard object

Also Published As

Publication number Publication date
JPS5433512B2 (en) 1979-10-20
JPS4917166A (en) 1974-02-15
DE2325993B2 (en) 1975-04-24
DE2325993A1 (en) 1973-12-06
FR2185854A1 (en) 1974-01-04
FR2185854B1 (en) 1977-02-18
DE2325993C3 (en) 1981-10-15
US3857055A (en) 1974-12-24

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 19930501