DE59010590D1 - Cathode holder for an electron gun - Google Patents

Cathode holder for an electron gun

Info

Publication number
DE59010590D1
DE59010590D1 DE59010590T DE59010590T DE59010590D1 DE 59010590 D1 DE59010590 D1 DE 59010590D1 DE 59010590 T DE59010590 T DE 59010590T DE 59010590 T DE59010590 T DE 59010590T DE 59010590 D1 DE59010590 D1 DE 59010590D1
Authority
DE
Germany
Prior art keywords
electron gun
cathode holder
cathode
holder
gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59010590T
Other languages
German (de)
Inventor
Dieter Fritz
Wolfgang Dr Schwarz
Helmut Spruck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PTR PRAEZISIONSTECH GmbH
Original Assignee
PTR PRAEZISIONSTECH GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19893930201 external-priority patent/DE3930201A1/en
Priority claimed from DE3930203A external-priority patent/DE3930203A1/en
Application filed by PTR PRAEZISIONSTECH GmbH filed Critical PTR PRAEZISIONSTECH GmbH
Application granted granted Critical
Publication of DE59010590D1 publication Critical patent/DE59010590D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/18—Supports; Vibration-damping arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
DE59010590T 1989-09-09 1990-09-06 Cathode holder for an electron gun Expired - Lifetime DE59010590D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19893930201 DE3930201A1 (en) 1989-09-09 1989-09-09 Current transfer contact for electron gun - has separate relatively movable connecting and contact element components
DE3930203A DE3930203A1 (en) 1989-09-09 1989-09-09 CATODE HOLDER FOR AN ELECTRONIC RADIATOR

Publications (1)

Publication Number Publication Date
DE59010590D1 true DE59010590D1 (en) 1997-01-16

Family

ID=25885008

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59010590T Expired - Lifetime DE59010590D1 (en) 1989-09-09 1990-09-06 Cathode holder for an electron gun

Country Status (2)

Country Link
EP (1) EP0417640B1 (en)
DE (1) DE59010590D1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011034985A1 (en) 2009-09-17 2011-03-24 Sciaky, Inc. Electron beam layer manufacturing
US8461474B2 (en) 2010-03-31 2013-06-11 Sciaky, Inc. Raster methodology, apparatus and system for electron beam layer manufacturing using closed loop control

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2729800A (en) * 1953-04-23 1956-01-03 Lewis Eng Co Electric wire coupling
US3197669A (en) * 1961-05-12 1965-07-27 Welding Research Inc Electron emitting element for electron gun
JPS5433512B2 (en) * 1972-05-22 1979-10-20
JPS4929969A (en) * 1972-07-20 1974-03-16
JPS54136170A (en) * 1978-04-14 1979-10-23 Hitachi Ltd Field radiation electronic gun
FR2545993B3 (en) * 1983-05-11 1986-08-22 Marechal Sepm ELASTIC ELECTRICAL CONTACTS AT AXIAL PRESSURE
US4661741A (en) * 1985-06-28 1987-04-28 Control Data Corporation Miniature electron gun with focusing grid structure
US4743201A (en) * 1987-05-08 1988-05-10 General Signal Corporation Moveable electrical contact plunger
EP0296385A3 (en) * 1987-06-26 1989-12-27 Siemens Aktiengesellschaft Beam emitting system for particle beam apparatus

Also Published As

Publication number Publication date
EP0417640B1 (en) 1996-12-04
EP0417640A2 (en) 1991-03-20
EP0417640A3 (en) 1991-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition