GB1363386A - Electron beam fabrication methods - Google Patents
Electron beam fabrication methodsInfo
- Publication number
- GB1363386A GB1363386A GB2956272A GB2956272A GB1363386A GB 1363386 A GB1363386 A GB 1363386A GB 2956272 A GB2956272 A GB 2956272A GB 2956272 A GB2956272 A GB 2956272A GB 1363386 A GB1363386 A GB 1363386A
- Authority
- GB
- United Kingdom
- Prior art keywords
- resist
- substrate
- electron
- silicon
- nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
- H05K3/146—By vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15846371A | 1971-06-30 | 1971-06-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1363386A true GB1363386A (en) | 1974-08-14 |
Family
ID=22568245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2956272A Expired GB1363386A (en) | 1971-06-30 | 1972-06-23 | Electron beam fabrication methods |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5432315B1 (de) |
DE (1) | DE2227342C2 (de) |
FR (1) | FR2143713B1 (de) |
GB (1) | GB1363386A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2733147A1 (de) * | 1977-07-22 | 1979-01-25 | Licentia Gmbh | Verfahren zum beseitigen stoerender streueffekte bei der elektronenstrahlbelichtung |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2922642C2 (de) * | 1979-06-02 | 1981-10-01 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe | Verfahren zum Herstellen von Platten für den Aufbau von Trenndüsenelementen |
DE3176140D1 (en) * | 1981-10-30 | 1987-05-27 | Ibm Deutschland | Contact device for the detachable connection of electrical components |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1534173A (fr) * | 1966-08-10 | 1968-07-26 | Gen Precision Inc | Procédé pour former des réserves photographiques sur des supports transparents outranslucides avec une résolution élevée |
-
1972
- 1972-04-19 JP JP3880772A patent/JPS5432315B1/ja active Pending
- 1972-06-06 DE DE19722227342 patent/DE2227342C2/de not_active Expired
- 1972-06-08 FR FR7221506A patent/FR2143713B1/fr not_active Expired
- 1972-06-23 GB GB2956272A patent/GB1363386A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2733147A1 (de) * | 1977-07-22 | 1979-01-25 | Licentia Gmbh | Verfahren zum beseitigen stoerender streueffekte bei der elektronenstrahlbelichtung |
Also Published As
Publication number | Publication date |
---|---|
FR2143713B1 (de) | 1976-01-16 |
JPS5432315B1 (de) | 1979-10-13 |
DE2227342A1 (de) | 1973-01-18 |
DE2227342C2 (de) | 1982-10-28 |
FR2143713A1 (de) | 1973-02-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |