GB1358063A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
GB1358063A
GB1358063A GB4066671A GB4066671A GB1358063A GB 1358063 A GB1358063 A GB 1358063A GB 4066671 A GB4066671 A GB 4066671A GB 4066671 A GB4066671 A GB 4066671A GB 1358063 A GB1358063 A GB 1358063A
Authority
GB
United Kingdom
Prior art keywords
generator
images
scanning
lens
effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4066671A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1358063A publication Critical patent/GB1358063A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB4066671A 1970-09-11 1971-08-31 Scanning electron microscope Expired GB1358063A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45079798A JPS4922768B1 (enrdf_load_stackoverflow) 1970-09-11 1970-09-11

Publications (1)

Publication Number Publication Date
GB1358063A true GB1358063A (en) 1974-06-26

Family

ID=13700223

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4066671A Expired GB1358063A (en) 1970-09-11 1971-08-31 Scanning electron microscope

Country Status (3)

Country Link
JP (1) JPS4922768B1 (enrdf_load_stackoverflow)
FR (1) FR2107544A5 (enrdf_load_stackoverflow)
GB (1) GB1358063A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340073B2 (enrdf_load_stackoverflow) * 1972-09-30 1978-10-25
NL7804038A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop.
JPS5613649A (en) * 1979-07-12 1981-02-10 Akashi Seisakusho Co Ltd Correcting method and device for astigmatism in scanning type electron microscope and the like
EP1238405B1 (en) * 1999-12-14 2014-06-18 Applied Materials, Inc. Method and system for the examination of specimen using a charged particle beam

Also Published As

Publication number Publication date
FR2107544A5 (enrdf_load_stackoverflow) 1972-05-05
JPS4922768B1 (enrdf_load_stackoverflow) 1974-06-11

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee