JPS4922768B1 - - Google Patents

Info

Publication number
JPS4922768B1
JPS4922768B1 JP45079798A JP7979870A JPS4922768B1 JP S4922768 B1 JPS4922768 B1 JP S4922768B1 JP 45079798 A JP45079798 A JP 45079798A JP 7979870 A JP7979870 A JP 7979870A JP S4922768 B1 JPS4922768 B1 JP S4922768B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45079798A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP45079798A priority Critical patent/JPS4922768B1/ja
Priority to GB4066671A priority patent/GB1358063A/en
Priority to FR7132768A priority patent/FR2107544A5/fr
Publication of JPS4922768B1 publication Critical patent/JPS4922768B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP45079798A 1970-09-11 1970-09-11 Pending JPS4922768B1 (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP45079798A JPS4922768B1 (enrdf_load_stackoverflow) 1970-09-11 1970-09-11
GB4066671A GB1358063A (en) 1970-09-11 1971-08-31 Scanning electron microscope
FR7132768A FR2107544A5 (enrdf_load_stackoverflow) 1970-09-11 1971-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45079798A JPS4922768B1 (enrdf_load_stackoverflow) 1970-09-11 1970-09-11

Publications (1)

Publication Number Publication Date
JPS4922768B1 true JPS4922768B1 (enrdf_load_stackoverflow) 1974-06-11

Family

ID=13700223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45079798A Pending JPS4922768B1 (enrdf_load_stackoverflow) 1970-09-11 1970-09-11

Country Status (3)

Country Link
JP (1) JPS4922768B1 (enrdf_load_stackoverflow)
FR (1) FR2107544A5 (enrdf_load_stackoverflow)
GB (1) GB1358063A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1238405B1 (en) * 1999-12-14 2014-06-18 Applied Materials, Inc. Method and system for the examination of specimen using a charged particle beam

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340073B2 (enrdf_load_stackoverflow) * 1972-09-30 1978-10-25
NL7804038A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop.
JPS5613649A (en) * 1979-07-12 1981-02-10 Akashi Seisakusho Co Ltd Correcting method and device for astigmatism in scanning type electron microscope and the like

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1238405B1 (en) * 1999-12-14 2014-06-18 Applied Materials, Inc. Method and system for the examination of specimen using a charged particle beam

Also Published As

Publication number Publication date
FR2107544A5 (enrdf_load_stackoverflow) 1972-05-05
GB1358063A (en) 1974-06-26

Similar Documents

Publication Publication Date Title
ATA96471A (enrdf_load_stackoverflow)
AU2044470A (enrdf_load_stackoverflow)
AU1473870A (enrdf_load_stackoverflow)
AU1146470A (enrdf_load_stackoverflow)
AU1326870A (enrdf_load_stackoverflow)
AU2130570A (enrdf_load_stackoverflow)
AU2085370A (enrdf_load_stackoverflow)
AU2017870A (enrdf_load_stackoverflow)
AU1833270A (enrdf_load_stackoverflow)
AU1716970A (enrdf_load_stackoverflow)
AU1517670A (enrdf_load_stackoverflow)
AU1336970A (enrdf_load_stackoverflow)
AU1591370A (enrdf_load_stackoverflow)
AU1004470A (enrdf_load_stackoverflow)
AU1277070A (enrdf_load_stackoverflow)
AU2144270A (enrdf_load_stackoverflow)
AU1235770A (enrdf_load_stackoverflow)
AU1328670A (enrdf_load_stackoverflow)
AU2131570A (enrdf_load_stackoverflow)
AU1343870A (enrdf_load_stackoverflow)
AU2130770A (enrdf_load_stackoverflow)
AU1189670A (enrdf_load_stackoverflow)
AU2119370A (enrdf_load_stackoverflow)
AU1581370A (enrdf_load_stackoverflow)
AU2115870A (enrdf_load_stackoverflow)