FR2107544A5 - - Google Patents

Info

Publication number
FR2107544A5
FR2107544A5 FR7132768A FR7132768A FR2107544A5 FR 2107544 A5 FR2107544 A5 FR 2107544A5 FR 7132768 A FR7132768 A FR 7132768A FR 7132768 A FR7132768 A FR 7132768A FR 2107544 A5 FR2107544 A5 FR 2107544A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7132768A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Application granted granted Critical
Publication of FR2107544A5 publication Critical patent/FR2107544A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7132768A 1970-09-11 1971-09-10 Expired FR2107544A5 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45079798A JPS4922768B1 (enrdf_load_stackoverflow) 1970-09-11 1970-09-11

Publications (1)

Publication Number Publication Date
FR2107544A5 true FR2107544A5 (enrdf_load_stackoverflow) 1972-05-05

Family

ID=13700223

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7132768A Expired FR2107544A5 (enrdf_load_stackoverflow) 1970-09-11 1971-09-10

Country Status (3)

Country Link
JP (1) JPS4922768B1 (enrdf_load_stackoverflow)
FR (1) FR2107544A5 (enrdf_load_stackoverflow)
GB (1) GB1358063A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4956580A (enrdf_load_stackoverflow) * 1972-09-30 1974-06-01
FR2423861A1 (fr) * 1978-04-17 1979-11-16 Philips Nv Microscope electronique
FR2461353A1 (fr) * 1979-07-12 1981-01-30 Akashi Seisakusho Kk Procede et dispositif pour corriger l'astigmatisme dans des microscopes electroniques a balayage et equipements analogues

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1238405B1 (en) * 1999-12-14 2014-06-18 Applied Materials, Inc. Method and system for the examination of specimen using a charged particle beam

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4956580A (enrdf_load_stackoverflow) * 1972-09-30 1974-06-01
FR2423861A1 (fr) * 1978-04-17 1979-11-16 Philips Nv Microscope electronique
FR2461353A1 (fr) * 1979-07-12 1981-01-30 Akashi Seisakusho Kk Procede et dispositif pour corriger l'astigmatisme dans des microscopes electroniques a balayage et equipements analogues

Also Published As

Publication number Publication date
GB1358063A (en) 1974-06-26
JPS4922768B1 (enrdf_load_stackoverflow) 1974-06-11

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Legal Events

Date Code Title Description
ST Notification of lapse