GB1329397A - Vacuum treatment plant - Google Patents

Vacuum treatment plant

Info

Publication number
GB1329397A
GB1329397A GB757572A GB757572A GB1329397A GB 1329397 A GB1329397 A GB 1329397A GB 757572 A GB757572 A GB 757572A GB 757572 A GB757572 A GB 757572A GB 1329397 A GB1329397 A GB 1329397A
Authority
GB
United Kingdom
Prior art keywords
carrier
articles
carriage
chamber
hood
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB757572A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB1329397A publication Critical patent/GB1329397A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1329397 Vacuum coating apparatus BALZERS PATENT-UND BETEILIGUNGS AG 18 Feb 1972 [15 March 1971] 7575/72 Heading C7F A vacuum plant in which articles are to be treated, e.g. lenses coated, comprises two separately evacuable chambers 1, 13 which are provided with valve 14 to permit the articles to be conveyed from one to the other on a carriage 17, moveable on rollers 18, the chamber 1 having a single treatment position provided with lifting and rotating means 10 for an article carrier 9, and the chamber 13 having a treatment position in the hood 25 and a shunt position 9", each of which has a lifting device 32, 36 respectively. The first position is also the loading/unloading position, the hood 25 being removable. The arrangement is such that a carrier of articles loaded on to the lifting device in hood 25 is pretreated, a carrier of treated articles is lowered on to the carriage and moved from chamber 1 to shunt position 9" and lifted off; the carrier of pre-treated articles is lowered on to the carriage and transported into chamber 1 and lifted off; the carrier in the shunt position is lowered on to the carriage which returns to the unloading position.
GB757572A 1971-03-15 1972-02-18 Vacuum treatment plant Expired GB1329397A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH377771A CH540349A (en) 1971-03-15 1971-03-15 Vacuum system with two chambers that can be evacuated separately for treating goods

Publications (1)

Publication Number Publication Date
GB1329397A true GB1329397A (en) 1973-09-05

Family

ID=4263258

Family Applications (1)

Application Number Title Priority Date Filing Date
GB757572A Expired GB1329397A (en) 1971-03-15 1972-02-18 Vacuum treatment plant

Country Status (5)

Country Link
CH (1) CH540349A (en)
DE (1) DE2207957A1 (en)
FR (1) FR2131987A1 (en)
GB (1) GB1329397A (en)
NL (1) NL7106818A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2160898A (en) * 1984-05-30 1986-01-02 Dowty Electronics Ltd Vacuum sputtering apparatus

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4002141A (en) * 1975-11-26 1977-01-11 Airco, Inc. System for handling substrate holders for vacuum coating
US4226208A (en) * 1977-08-04 1980-10-07 Canon Kabushiki Kaisha Vapor deposition apparatus
DE2940064A1 (en) * 1979-10-03 1981-04-16 Leybold-Heraeus GmbH, 5000 Köln VACUUM EVAPORATION SYSTEM WITH A VALVE CHAMBER, A STEAMING CHAMBER AND AN EVAPORATOR CHAMBER
JPS61291032A (en) * 1985-06-17 1986-12-20 Fujitsu Ltd Vacuum apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2160898A (en) * 1984-05-30 1986-01-02 Dowty Electronics Ltd Vacuum sputtering apparatus

Also Published As

Publication number Publication date
FR2131987A1 (en) 1972-11-17
DE2207957A1 (en) 1972-09-28
CH540349A (en) 1973-08-15
NL7106818A (en) 1972-09-19

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees