NL7106818A - - Google Patents
Info
- Publication number
- NL7106818A NL7106818A NL7106818A NL7106818A NL7106818A NL 7106818 A NL7106818 A NL 7106818A NL 7106818 A NL7106818 A NL 7106818A NL 7106818 A NL7106818 A NL 7106818A NL 7106818 A NL7106818 A NL 7106818A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH377771A CH540349A (de) | 1971-03-15 | 1971-03-15 | Vakuumanlage mit zwei getrennt evakuierbaren Kammern zum Behandeln von Gut |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7106818A true NL7106818A (xx) | 1972-09-19 |
Family
ID=4263258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7106818A NL7106818A (xx) | 1971-03-15 | 1971-05-18 |
Country Status (5)
| Country | Link |
|---|---|
| CH (1) | CH540349A (xx) |
| DE (1) | DE2207957A1 (xx) |
| FR (1) | FR2131987A1 (xx) |
| GB (1) | GB1329397A (xx) |
| NL (1) | NL7106818A (xx) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4002141A (en) * | 1975-11-26 | 1977-01-11 | Airco, Inc. | System for handling substrate holders for vacuum coating |
| US4226208A (en) * | 1977-08-04 | 1980-10-07 | Canon Kabushiki Kaisha | Vapor deposition apparatus |
| DE2940064A1 (de) * | 1979-10-03 | 1981-04-16 | Leybold-Heraeus GmbH, 5000 Köln | Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer |
| GB8413776D0 (en) * | 1984-05-30 | 1984-07-04 | Dowty Electronics Ltd | Sputtering process |
| JPS61291032A (ja) * | 1985-06-17 | 1986-12-20 | Fujitsu Ltd | 真空装置 |
-
1971
- 1971-03-15 CH CH377771A patent/CH540349A/de not_active IP Right Cessation
- 1971-05-18 NL NL7106818A patent/NL7106818A/xx unknown
-
1972
- 1972-02-18 GB GB757572A patent/GB1329397A/en not_active Expired
- 1972-02-21 DE DE19722207957 patent/DE2207957A1/de active Pending
- 1972-03-01 FR FR7207018A patent/FR2131987A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE2207957A1 (de) | 1972-09-28 |
| GB1329397A (en) | 1973-09-05 |
| FR2131987A1 (xx) | 1972-11-17 |
| CH540349A (de) | 1973-08-15 |