GB1313198A - Integrated circuit made by epitaxial deposition - Google Patents

Integrated circuit made by epitaxial deposition

Info

Publication number
GB1313198A
GB1313198A GB6050670A GB6050670A GB1313198A GB 1313198 A GB1313198 A GB 1313198A GB 6050670 A GB6050670 A GB 6050670A GB 6050670 A GB6050670 A GB 6050670A GB 1313198 A GB1313198 A GB 1313198A
Authority
GB
United Kingdom
Prior art keywords
layer
silicon
deposited
substrate
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB6050670A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1313198A publication Critical patent/GB1313198A/en
Expired legal-status Critical Current

Links

Classifications

    • H10P32/15—
    • H10P14/24—
    • H10P14/2905—
    • H10P14/3211—
    • H10P14/3411—

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
GB6050670A 1970-01-15 1970-12-21 Integrated circuit made by epitaxial deposition Expired GB1313198A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US320070A 1970-01-15 1970-01-15

Publications (1)

Publication Number Publication Date
GB1313198A true GB1313198A (en) 1973-04-11

Family

ID=21704678

Family Applications (1)

Application Number Title Priority Date Filing Date
GB6050670A Expired GB1313198A (en) 1970-01-15 1970-12-21 Integrated circuit made by epitaxial deposition

Country Status (3)

Country Link
DE (1) DE2101322A1 (enExample)
FR (1) FR2076117B1 (enExample)
GB (1) GB1313198A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116884832A (zh) * 2023-09-06 2023-10-13 合肥晶合集成电路股份有限公司 半导体器件及其制作方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0714840B2 (ja) * 1988-10-18 1995-02-22 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン エピタキシャル膜成長方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116884832A (zh) * 2023-09-06 2023-10-13 合肥晶合集成电路股份有限公司 半导体器件及其制作方法
CN116884832B (zh) * 2023-09-06 2023-12-15 合肥晶合集成电路股份有限公司 半导体器件及其制作方法

Also Published As

Publication number Publication date
DE2101322A1 (de) 1971-07-22
FR2076117A1 (enExample) 1971-10-15
FR2076117B1 (enExample) 1973-11-23

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees