GB1305605A - - Google Patents
Info
- Publication number
- GB1305605A GB1305605A GB937870A GB937870A GB1305605A GB 1305605 A GB1305605 A GB 1305605A GB 937870 A GB937870 A GB 937870A GB 937870 A GB937870 A GB 937870A GB 1305605 A GB1305605 A GB 1305605A
- Authority
- GB
- United Kingdom
- Prior art keywords
- workpiece
- laser
- multiplier
- patterns
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
- H01L21/0275—Photolithographic processes using lasers
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19691910546 DE1910546C (de) | 1969-03-01 | Elektro oder magneto optische Anord nung zur Herstellung und Bearbeitung von integrierten Schaltungen und ahnlichen Ob jekten |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1305605A true GB1305605A (fr) | 1973-02-07 |
Family
ID=5726854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB937870A Expired GB1305605A (fr) | 1969-03-01 | 1970-02-26 |
Country Status (7)
Country | Link |
---|---|
BE (1) | BE746704A (fr) |
BR (1) | BR7017138D0 (fr) |
CH (1) | CH504784A (fr) |
ES (1) | ES376993A1 (fr) |
FR (1) | FR2041059B1 (fr) |
GB (1) | GB1305605A (fr) |
NL (1) | NL7002789A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2441472A1 (de) * | 1974-08-29 | 1976-03-11 | Siemens Ag | Anordnung zum lichtoptischen rechnergesteuerten zeichnen von masken fuer halbleiter-bauelemente |
JPS57198631A (en) * | 1981-05-29 | 1982-12-06 | Ibm | Exposing method and device |
FR2615635B1 (fr) * | 1987-05-19 | 1991-10-11 | Thomson Csf | Dispositif de controle d'un faisceau lumineux dans un grand champ angulaire et application a un dispositif de detection |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1565007A1 (de) * | 1965-05-25 | 1970-05-21 | Philips Patentverwaltung | Verfahren und Geraet zur thermischen Materialbearbeitung mittels Laserstrahlen |
-
1970
- 1970-02-26 CH CH284270A patent/CH504784A/de not_active IP Right Cessation
- 1970-02-26 GB GB937870A patent/GB1305605A/en not_active Expired
- 1970-02-26 NL NL7002789A patent/NL7002789A/xx unknown
- 1970-02-27 ES ES376993A patent/ES376993A1/es not_active Expired
- 1970-02-27 FR FR7007171A patent/FR2041059B1/fr not_active Expired
- 1970-02-27 BE BE746704D patent/BE746704A/nl unknown
- 1970-03-02 BR BR21713870A patent/BR7017138D0/pt unknown
Also Published As
Publication number | Publication date |
---|---|
DE1910546B2 (de) | 1972-04-06 |
NL7002789A (fr) | 1970-09-03 |
ES376993A1 (es) | 1972-05-16 |
FR2041059A1 (fr) | 1971-01-29 |
CH504784A (de) | 1971-03-15 |
FR2041059B1 (fr) | 1974-05-24 |
BE746704A (nl) | 1970-08-27 |
DE1910546A1 (de) | 1970-09-17 |
BR7017138D0 (pt) | 1973-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |