GB1305523A - - Google Patents

Info

Publication number
GB1305523A
GB1305523A GB251771A GB251771A GB1305523A GB 1305523 A GB1305523 A GB 1305523A GB 251771 A GB251771 A GB 251771A GB 251771 A GB251771 A GB 251771A GB 1305523 A GB1305523 A GB 1305523A
Authority
GB
United Kingdom
Prior art keywords
rods
electrodes
plate
diameter
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB251771A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1305523A publication Critical patent/GB1305523A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/80—Arrangements for controlling the ray or beam after passing the main deflection system, e.g. for post-acceleration or post-concentration, for colour switching
    • H01J29/803—Arrangements for controlling the ray or beam after passing the main deflection system, e.g. for post-acceleration or post-concentration, for colour switching for post-acceleration or post-deflection, e.g. for colour switching
    • H01J29/806—Electron lens mosaics, e.g. fly's eye lenses, colour selection lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Beam Exposure (AREA)
GB251771A 1970-01-20 1971-01-19 Expired GB1305523A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7001862A FR2076567A5 (es) 1970-01-20 1970-01-20
FR7101748A FR2122684A6 (es) 1970-01-20 1971-01-20

Publications (1)

Publication Number Publication Date
GB1305523A true GB1305523A (es) 1973-02-07

Family

ID=26215496

Family Applications (1)

Application Number Title Priority Date Filing Date
GB251771A Expired GB1305523A (es) 1970-01-20 1971-01-19

Country Status (5)

Country Link
US (1) US3717785A (es)
DE (1) DE2102608A1 (es)
FR (2) FR2076567A5 (es)
GB (1) GB1305523A (es)
NL (1) NL7100748A (es)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0033805A1 (en) * 1980-01-30 1981-08-19 Control Data Corporation An electrostatic lens assembly for a charged particle beam tube and a method of operating the same
DE3138744A1 (de) * 1981-09-29 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von halbleitervorrichtungen

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2326279A1 (de) * 1973-05-23 1974-12-19 Siemens Ag Ionenstrahlschnellschaltung zur erzielung definierter festkoerperdotierungen durch ionenimplantation
GB1443215A (en) * 1973-11-07 1976-07-21 Mullard Ltd Electrostatically clamping a semiconductor wafer during device manufacture
JPS52119178A (en) * 1976-03-31 1977-10-06 Toshiba Corp Electron beam exposure device
US4194123A (en) * 1978-05-12 1980-03-18 Rockwell International Corporation Lithographic apparatus
EP0069728A4 (en) * 1981-01-23 1983-07-08 Veeco Instr Inc EXPOSURE SYSTEM FOR PARALLEL CHARGED PARTICLE RAY.
US4465934A (en) * 1981-01-23 1984-08-14 Veeco Instruments Inc. Parallel charged particle beam exposure system
JPS57163955A (en) * 1981-02-25 1982-10-08 Toshiba Corp Mask focusing type color picture tube
US4354111A (en) * 1981-03-10 1982-10-12 Veeco Instruments Incorporated Screen lens array system
US4667108A (en) * 1985-06-28 1987-05-19 Control Data Corporation Impedance matched and thermally cooled deflection amplifiers for charged particle beam apparatus employing deflectors
US5023458A (en) * 1989-01-04 1991-06-11 Eaton Corporation Ion beam control system
JPH05205695A (ja) * 1992-01-28 1993-08-13 Hitachi Ltd 多段多重電極及び質量分析装置
JP5322363B2 (ja) * 2000-02-09 2013-10-23 エフ イー アイ カンパニ 微小二次加工処理用マルチカラムｆｉｂ
DE10237297A1 (de) * 2002-08-14 2004-03-11 Leo Elektronenmikroskopie Gmbh Teilchenoptische Vorrichtung, Elektronenmikroskopiesystem und Lithogrphiesystem
DE60323909D1 (de) * 2002-08-13 2008-11-20 Zeiss Carl Nts Gmbh Teilchenoptischer Apparat und seine Verwendung als elektronenmikroskopisches System
DE102004048892A1 (de) * 2004-10-06 2006-04-20 Leica Microsystems Lithography Gmbh Beleuchtungssystem für eine Korpuskularstrahleinrichtung und Verfahren zur Beleuchtung mit einem Korpuskularstrahl
JP2007287365A (ja) * 2006-04-13 2007-11-01 Jeol Ltd 多極子レンズ及び多極子レンズの製造方法
GB0700754D0 (en) * 2007-01-15 2007-02-21 Oxford Instr Analytical Ltd Charged particle analyser and method
US8389950B2 (en) * 2007-01-31 2013-03-05 Microsaic Systems Plc High performance micro-fabricated quadrupole lens
GB2446184B (en) * 2007-01-31 2011-07-27 Microsaic Systems Ltd High performance micro-fabricated quadrupole lens
WO2019211072A1 (en) 2018-05-01 2019-11-07 Asml Netherlands B.V. Multi-beam inspection apparatus
CN110534385A (zh) * 2019-09-09 2019-12-03 中国科学院合肥物质科学研究院 一种具有整体膜电极棒的电四极透镜组

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens
US2941114A (en) * 1958-01-09 1960-06-14 Bell Telephone Labor Inc Slalom focusing structures
NL155980B (nl) * 1966-08-11 1978-02-15 Philips Nv Kathodestraalbuis met een vierpoollens voor de correctie van orthogonaliteitsfouten.
US3612946A (en) * 1967-08-01 1971-10-12 Murata Manufacturing Co Electron multiplier device using semiconductor ceramic

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0033805A1 (en) * 1980-01-30 1981-08-19 Control Data Corporation An electrostatic lens assembly for a charged particle beam tube and a method of operating the same
DE3138744A1 (de) * 1981-09-29 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von halbleitervorrichtungen

Also Published As

Publication number Publication date
DE2102608A1 (de) 1971-07-29
FR2122684A6 (es) 1972-09-01
NL7100748A (es) 1971-07-22
US3717785A (en) 1973-02-20
FR2076567A5 (es) 1971-10-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
435 Patent endorsed 'licences of right' on the date specified (sect. 35/1949)
PCNP Patent ceased through non-payment of renewal fee