GB1290863A - - Google Patents
Info
- Publication number
- GB1290863A GB1290863A GB1290863DA GB1290863A GB 1290863 A GB1290863 A GB 1290863A GB 1290863D A GB1290863D A GB 1290863DA GB 1290863 A GB1290863 A GB 1290863A
- Authority
- GB
- United Kingdom
- Prior art keywords
- lens
- mask
- ion
- grid
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 238000010884 ion-beam technique Methods 0.000 abstract 2
- 230000000873 masking effect Effects 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 230000003628 erosive effect Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000010849 ion bombardment Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 238000003801 milling Methods 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
- 238000009827 uniform distribution Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3926069 | 1969-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1290863A true GB1290863A (nl) | 1972-09-27 |
Family
ID=10408572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1290863D Expired GB1290863A (nl) | 1969-08-05 | 1969-08-05 |
Country Status (4)
| Country | Link |
|---|---|
| DE (2) | DE2037864A1 (nl) |
| FR (1) | FR2056551A5 (nl) |
| GB (1) | GB1290863A (nl) |
| SE (1) | SE354435B (nl) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50151162A (nl) * | 1974-05-27 | 1975-12-04 | ||
| GB2188924A (en) * | 1986-04-08 | 1987-10-14 | Glaverbel | Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell |
| GB2188925A (en) * | 1986-04-08 | 1987-10-14 | Glaverbel | Matted glass and process of manufacturing same |
| US7863587B2 (en) | 2007-01-31 | 2011-01-04 | Hitachi Global Storage Technologies, Netherlands, B.V. | Symmetrical shaper for an ion beam deposition and etching apparatus |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5531154A (en) * | 1978-08-28 | 1980-03-05 | Hitachi Ltd | Plasma etching apparatus |
| CH658545A5 (de) * | 1982-09-10 | 1986-11-14 | Balzers Hochvakuum | Verfahren zum gleichmaessigen erwaermen von heizgut in einem vakuumrezipienten. |
| DE3427587A1 (de) * | 1984-07-26 | 1986-02-06 | Leybold-Heraeus GmbH, 5000 Köln | Zerstaeubungseinrichtung fuer katodenzerstaeubungsanlagen |
-
1969
- 1969-08-05 GB GB1290863D patent/GB1290863A/en not_active Expired
-
1970
- 1970-07-30 DE DE19702037864 patent/DE2037864A1/de active Pending
- 1970-07-30 DE DE19707028721 patent/DE7028721U/de not_active Expired
- 1970-08-04 FR FR7028702A patent/FR2056551A5/fr not_active Expired
- 1970-08-04 SE SE1068670A patent/SE354435B/xx unknown
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50151162A (nl) * | 1974-05-27 | 1975-12-04 | ||
| GB2188924A (en) * | 1986-04-08 | 1987-10-14 | Glaverbel | Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell |
| GB2188925A (en) * | 1986-04-08 | 1987-10-14 | Glaverbel | Matted glass and process of manufacturing same |
| US4880677A (en) * | 1986-04-08 | 1989-11-14 | Glaverbel | Matted glass |
| US4882214A (en) * | 1986-04-08 | 1989-11-21 | Glaverbel | Matted glass |
| GB2188925B (en) * | 1986-04-08 | 1990-05-09 | Glaverbel | Matted glass and process of manufacturing same |
| GB2188924B (en) * | 1986-04-08 | 1990-05-09 | Glaverbel | Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell |
| US7863587B2 (en) | 2007-01-31 | 2011-01-04 | Hitachi Global Storage Technologies, Netherlands, B.V. | Symmetrical shaper for an ion beam deposition and etching apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2056551A5 (nl) | 1971-05-14 |
| DE2037864A1 (de) | 1971-02-18 |
| SE354435B (nl) | 1973-03-12 |
| DE7028721U (de) | 1970-11-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |