GB1288278A - - Google Patents
Info
- Publication number
- GB1288278A GB1288278A GB5686169A GB5686169A GB1288278A GB 1288278 A GB1288278 A GB 1288278A GB 5686169 A GB5686169 A GB 5686169A GB 5686169 A GB5686169 A GB 5686169A GB 1288278 A GB1288278 A GB 1288278A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- oxide layer
- semi
- conductor
- isolated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/69—Etching of wafers, substrates or parts of devices using masks for semiconductor materials
- H10P50/691—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/64—Wet etching of semiconductor materials
- H10P50/642—Chemical etching
- H10P50/644—Anisotropic liquid etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Landscapes
- Element Separation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US78817768A | 1968-12-31 | 1968-12-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1288278A true GB1288278A (enExample) | 1972-09-06 |
Family
ID=25143680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5686169A Expired GB1288278A (enExample) | 1968-12-31 | 1969-11-20 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1965408C3 (enExample) |
| FR (1) | FR2027429B1 (enExample) |
| GB (1) | GB1288278A (enExample) |
| NL (1) | NL6918388A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4235014A (en) | 1979-03-26 | 1980-11-25 | Western Electric Company, Inc. | Apparatus for assembling a plurality of articles |
| US4253280A (en) | 1979-03-26 | 1981-03-03 | Western Electric Company, Inc. | Method of labelling directional characteristics of an article having two opposite major surfaces |
| US4983538A (en) * | 1987-11-20 | 1991-01-08 | Fujitsu Limited | Method for fabricating a silicon carbide substrate |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3579057A (en) * | 1969-08-18 | 1971-05-18 | Rca Corp | Method of making a semiconductor article and the article produced thereby |
| GB1439351A (en) * | 1972-06-02 | 1976-06-16 | Texas Instruments Inc | Capacitor |
| US4238275A (en) * | 1978-12-29 | 1980-12-09 | International Business Machines Corporation | Pyrocatechol-amine-water solution for the determination of defects |
| JPH0775244B2 (ja) * | 1990-11-16 | 1995-08-09 | 信越半導体株式会社 | 誘電体分離基板及びその製造方法 |
| JPH0775245B2 (ja) * | 1990-11-16 | 1995-08-09 | 信越半導体株式会社 | 誘電体分離基板及びその製造方法 |
| RU2220449C1 (ru) | 2002-12-19 | 2003-12-27 | Акционерное общество закрытого типа "ЛИТЭКС" | Способ маркирования изделий с помощью набора меток и метка для маркирования |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3425879A (en) * | 1965-10-24 | 1969-02-04 | Texas Instruments Inc | Method of making shaped epitaxial deposits |
| NL144778B (nl) * | 1966-12-20 | 1975-01-15 | Western Electric Co | Werkwijze voor het vervaardigen van een halfgeleiderinrichting door anisotroop etsen alsmede aldus vervaardigde inrichting. |
-
1969
- 1969-11-20 GB GB5686169A patent/GB1288278A/en not_active Expired
- 1969-12-08 NL NL6918388A patent/NL6918388A/xx unknown
- 1969-12-19 FR FR696944145A patent/FR2027429B1/fr not_active Expired
- 1969-12-30 DE DE1965408A patent/DE1965408C3/de not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4235014A (en) | 1979-03-26 | 1980-11-25 | Western Electric Company, Inc. | Apparatus for assembling a plurality of articles |
| US4253280A (en) | 1979-03-26 | 1981-03-03 | Western Electric Company, Inc. | Method of labelling directional characteristics of an article having two opposite major surfaces |
| US4983538A (en) * | 1987-11-20 | 1991-01-08 | Fujitsu Limited | Method for fabricating a silicon carbide substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| DE1965408C3 (de) | 1979-01-25 |
| DE1965408B2 (de) | 1978-02-16 |
| NL6918388A (enExample) | 1970-07-02 |
| FR2027429A1 (enExample) | 1970-09-25 |
| FR2027429B1 (enExample) | 1973-08-10 |
| DE1965408A1 (de) | 1970-07-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB1116209A (en) | Improvements in semiconductor structures | |
| GB1161343A (en) | Method of Making Shaped Epitaxial Deposits | |
| GB1320773A (en) | Method for forming epitaxial crystals or wafers in selected regions of substraes | |
| GB945747A (enExample) | ||
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| GB1288278A (enExample) | ||
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PE20 | Patent expired after termination of 20 years |