GB1283715A - Electroless copper plating - Google Patents

Electroless copper plating

Info

Publication number
GB1283715A
GB1283715A GB3777969A GB3777969A GB1283715A GB 1283715 A GB1283715 A GB 1283715A GB 3777969 A GB3777969 A GB 3777969A GB 3777969 A GB3777969 A GB 3777969A GB 1283715 A GB1283715 A GB 1283715A
Authority
GB
United Kingdom
Prior art keywords
salt
hcho
source
agent
soluble
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3777969A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Publication of GB1283715A publication Critical patent/GB1283715A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/187Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • C23C18/40Coating with copper using reducing agents
    • C23C18/405Formaldehyde

Abstract

1283715 Electroless Cu bath SHIPLEY CO Inc 28 July 1969 [13 Aug 1968(3)] 37779/69 Heading C7F An aqueous electroless Cu bath comprises a source of Cu<SP>++</SP>, OH<SP>-</SP>, a source of HCHO, sufficient complexing agent to render said Cu<SP>++</SP> ions soluble in alkaline solution, and at least two additives selected from (1) a formaldehyde addition agent, (2) a solution soluble salt of a Group VIII metal, (3) an organic silicon compound, and (4) a hydrogen inclusion retarding agent, excepting any combination including both (3) and (4). (1) may be an alkali metal sulphite, bisulphite or phosphite, (2) is preferably the phosphate, nitrate, acetate or a halide of Fe, Co, Ni, Os, Ir, Pt, Ru, Rh or Pd, with Fe, Ni, Pt being preferred, (3) is a silane, e.g. SiH 4 ; disilane, tetramethylsilane, Et 4 Si, tetraphenylsilane, Me 2 SiCl 2 , or a polysiloxane, and (4) may be CN<SP>-</SP> or a soluble compound of V, Mo, Nb, W, Re, As, Sb, Bi, a lanthanide or an actinide, e.g. a molybdate, tungstate, vanadate, arsenate, rhenate or water soluble salts or oxides of said elements. The solution may contain a wetting agent; the Cu salt may be a halide, nitrate, or acetate, but the sulphate is preferred; the source of HCHO is HCHO itself or paraformaldehyde; and the complexing agent may be Rochelle salt, Na salicylate or tartrate, an EDTA salt or a derivative thereof, or triethanolamine, but is preferably a hydroxyalkyl-substituted tertiary amine. In use, a plastics substrate is sensitized and activated using SnCl 2 and PdCl 2 or a colloidal formulation of SnCl 2 and precious metal chloride, and is then plated in the above bath.
GB3777969A 1968-08-13 1969-07-28 Electroless copper plating Expired GB1283715A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US75216668A 1968-08-13 1968-08-13
US75225068A 1968-08-13 1968-08-13
US75216568A 1968-08-13 1968-08-13

Publications (1)

Publication Number Publication Date
GB1283715A true GB1283715A (en) 1972-08-02

Family

ID=27419423

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3777969A Expired GB1283715A (en) 1968-08-13 1969-07-28 Electroless copper plating

Country Status (8)

Country Link
JP (1) JPS5114453B1 (en)
BE (1) BE737368A (en)
DE (1) DE1940643A1 (en)
ES (1) ES370451A1 (en)
FR (1) FR2015590A1 (en)
GB (1) GB1283715A (en)
NL (1) NL6912126A (en)
SE (3) SE396409B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2796084A1 (en) * 1999-07-07 2001-01-12 Sony Corp Chemical copper plating solution for plating contact holes or interconnections in semiconductor device manufacture includes a salt of, e.g., gold, nickel, palladium, cobalt or platinum as a plating accelerator

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528343U (en) * 1975-07-01 1977-01-20
JPS57124483U (en) * 1981-01-29 1982-08-03
JPS5853573A (en) * 1981-09-28 1983-03-30 Nissan Motor Co Ltd Alarm of spare tire in use

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1522048A (en) * 1966-05-06 1968-04-19 Photocircuits Corp Non-galvanic deposit of metals

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2796084A1 (en) * 1999-07-07 2001-01-12 Sony Corp Chemical copper plating solution for plating contact holes or interconnections in semiconductor device manufacture includes a salt of, e.g., gold, nickel, palladium, cobalt or platinum as a plating accelerator
NL1015624C2 (en) * 1999-07-07 2001-05-30 Sony Corp Electroless plating method and electroless plating solution.
US6534117B1 (en) 1999-07-07 2003-03-18 Sony Corporation Electroless plating method and electroless plating solution

Also Published As

Publication number Publication date
BE737368A (en) 1970-02-12
NL6912126A (en) 1970-02-17
ES370451A1 (en) 1971-07-01
SE396409B (en) 1977-09-19
DE1966580A1 (en) 1973-03-08
SE377580B (en) 1975-07-14
JPS5114453B1 (en) 1976-05-10
SE360394B (en) 1973-09-24
DE1940643A1 (en) 1970-05-06
FR2015590A1 (en) 1970-04-30
DE1966580B2 (en) 1976-03-04

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee